Scanning probe system
First Claim
1. A scanning probe system comprising:
- a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
a first driver with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input;
a second driver with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input;
a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and
a surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample, wherein the control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip, and the control system is arranged to control the first drive signal so that for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample, and a retract phase after generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample, wherein the system further comprises a measurement system which takes a measurement from the surface of the sample for each cycle in response to receipt of the surface signal from the surface detector.
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Accused Products
Abstract
A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.
12 Citations
20 Claims
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1. A scanning probe system comprising:
- a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
a first driver with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input;
a second driver with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input;
a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and
a surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample, wherein the control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip, and the control system is arranged to control the first drive signal so that for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample, and a retract phase after generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample, wherein the system further comprises a measurement system which takes a measurement from the surface of the sample for each cycle in response to receipt of the surface signal from the surface detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
- a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
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18. A method of scanning a sample with a scanning probe system, the scanning probe system comprising a probe with a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
- the method comprising;
translating the probe tip and the base of the cantilever together repeatedly towards and away from a surface of the sample; directing a sensing beam onto the cantilever thereby generating a reflected beam; analysing the reflected beam to detect an interaction of the probe tip with the surface of the sample as the probe tip moves towards the surface of the sample; generating a surface signal on detection of the interaction of the probe tip with the surface of the sample; and in response to receipt of the surface signal, changing a shape of the cantilever so that an angle of the cantilever relative to the sensing beam changes; wherein the angle of the cantilever relative to the sensing beam remains substantially constant as the probe tip and the base of the cantilever translate together towards the surface of the sample. - View Dependent Claims (19)
- the method comprising;
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20. A method of scanning a sample with a scanning probe system, the scanning probe system comprising:
- a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
a first driver with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; and
a second driver with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input, the method comprising;
controlling the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of the sample in a series of cycles;
generating a surface signal for each cycle on detection of an interaction of the probe tip with the surface of the sample;
taking a measurement from the surface of the sample for each cycle in response to receipt of the surface signal from the surface detector; and
modifying the second drive signal in response to receipt of the surface signal, the modification of the second drive signal causing the second driver to control the probe tip, wherein for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample, and a retract phase after generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample.
- a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;
Specification