Transmit operation of an ultrasonic sensor

• US 10,600,403 B2
• Filed: 05/08/2017
• Issued: 03/24/2020
• Est. Priority Date: 05/10/2016
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Garlepp, Bruno W., Salvia, James Christian, Pan, Yang, Perrott, Michael H.
• Primary Examiner(s): Lobo, Ian J
• Application Number:
  US15/589,941
• Publication Number:
  US 20170330552A1
• Time in Patent Office: 1,051 Days
• CPC Class Codes: B06B 1/0629 Square array
• CPC Class Codes: G10K 11/345 using energy switching from one active element to another
• CPC Class Codes: G10K 11/346 using phase variation

Abstract

An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers. A signal generator is configured to generate a plurality of transmit signals, wherein each transmit signal of the plurality of transmit signals has a different phase delay relative to other transmit signals of the plurality of transmit signals. A plurality of shift registers is configured to store a beamforming space including a beamforming pattern to apply to the two-dimensional array, wherein the beamforming pattern identifies a transmit signal of the plurality of transmit signals that is applied to each ultrasonic transducer of the beamforming space that is activated during a transmit operation. An array controller is configured to control activation of ultrasonic transducers during a transmit operation according to the beamforming pattern and configured to shift a position of the beamforming space within the plurality of shift registers such that the beamforming space moves within the two-dimensional array.

Claims

1. An ultrasonic sensor comprising:

a two-dimensional array of ultrasonic transducers;

a signal generator configured to generate a plurality of transmit signals, wherein each transmit signal of the plurality of transmit signals has a different phase delay relative to other transmit signals of the plurality of transmit signals;

a plurality of signal lines, wherein a signal line of the plurality of signal lines is configured to transmit one ultrasonic signal of the plurality of ultrasonic signals, wherein each ultrasonic transducer of the two-dimensional array of ultrasonic transducers is independently and selectively coupled to the plurality of signal lines for receiving any transmit signal of the plurality of transmit signals;

a plurality of shift registers configured to store control bits for applying a beamforming space comprising a beamforming pattern to the two-dimensional array of ultrasonic transducers, wherein the beamforming pattern identifies a transmit signal of the plurality of transmit signals that is applied to each ultrasonic transducer of the beamforming space that is activated during a transmit operation by identifying a signal line of the plurality of signal lines to drive each ultrasonic transducer identified by the beamforming pattern; and

an array controller configured to control activation of ultrasonic transducers during a transmit operation according to the beamforming pattern and configured to shift a position of the beamforming space within the plurality of shift registers such that the beamforming space moves within and relative to the two-dimensional array of ultrasonic transducers, wherein the beamforming space is applied to the two-dimensional array of ultrasonic transducers at a plurality of positions simultaneously such that a plurality of ultrasonic beams are generated simultaneously at the plurality of positions.

2. The ultrasonic sensor of claim 1, wherein the ultrasonic transducers are Piezoelectric Micromachined Ultrasonic Transducer (PMUT) devices.

3. The ultrasonic sensor of claim 2, wherein the PMUT devices comprise an interior support structure.

4. The ultrasonic sensor of claim 1, wherein the signal generator comprises a digital phase delay configured to apply at least one phase delay to a source signal for generating the plurality of transmit signals.

5. The ultrasonic sensor of claim 1, further comprising an alternating current ground providing a null signal, wherein the beamforming space identifies that the null signal is applied to ultrasonic sensors of the beamforming space that are not activated during the transmit operation.

6. The ultrasonic sensor of claim 1, wherein the two-dimensional array of ultrasonic transducers comprises a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently or jointly controllable.

7. The ultrasonic sensor of claim 6, wherein the plurality of shift registers is configured to store a plurality of instances of the beamforming space, wherein each instance of the beamforming space corresponds to a different sub-array of ultrasonic transducers, and wherein each instance of the beamforming space comprises the beamforming pattern.

8. The ultrasonic sensor of claim 7, wherein the array controller is configured to control activation of ultrasonic transducers of more than one sub-array of ultrasonic transducers during a transmit operation according to the beamforming pattern of each instance of the beamforming space, wherein the beamforming pattern is applied to the more than one sub-array of ultrasonic transducers in parallel.

9. The ultrasonic sensor of claim 1, wherein the beamforming space comprises a plurality of phase vectors corresponding to a one-dimensional subset of ultrasonic transducers, a phase vector identifying a signal to apply to a corresponding ultrasonic transducer during a transmit operation.

10. The ultrasonic sensor of claim 9, wherein the signal is selected from a null signal and a transmit signal of the plurality of transmit signals.

11. A method for controlling an ultrasonic sensor, the method comprising:

generating a plurality of transmit signals at a signal generator of the ultrasonic sensor, wherein each transmit signal of the plurality of transmit signals has a different phase delay relative to other transmit signals of the plurality of transmit signals;

storing control bits for applying a beamforming space to a two-dimensional array of ultrasonic transducers at a plurality of shift registers of the ultrasonic sensor, the beamforming space comprising a beamforming pattern to apply to the two-dimensional array of ultrasonic transducers, wherein the beamforming pattern identifies a transmit signal of the plurality of transmit signals that is applied to each ultrasonic transducer of the beamforming space that is activated during a transmit operation;

transmitting the plurality of transmit signals over a plurality of signal lines, wherein a signal line of the plurality of signal lines is configured to transmit one ultrasonic signal of the plurality of ultrasonic signals, wherein each ultrasonic transducer of the two-dimensional array of ultrasonic transducers is independently and selectively coupled to the plurality of signal lines for receiving any transmit signal of the plurality of transmit signals;

controlling activation of ultrasonic transducers during a transmit operation by identifying a signal line of the plurality of signal lines to drive each ultrasonic transducer according to the beamforming pattern, wherein the beamforming space is applied to the two-dimensional array of ultrasonic transducers at a plurality of positions simultaneously such that a plurality of ultrasonic beams are generated simultaneously at the plurality of positions; and

shifting a position of the beamforming space within the plurality of shift registers such that the beamforming space moves within and relative to the two-dimensional array of ultrasonic transducers.

12. The method of claim 11, wherein the two-dimensional array of ultrasonic transducers comprises a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently or jointly controllable.

13. The method of claim 12, wherein the storing a beamforming space at the plurality of shift registers of the ultrasonic sensor comprises:

storing a plurality of instances of the beamforming space at the plurality of shift registers of the ultrasonic sensor, wherein each instance of the beamforming space corresponds to a different sub-array of ultrasonic transducers, and wherein each instance of the beamforming space comprises the beamforming pattern.

14. The method of claim 13, wherein the controlling activation of ultrasonic transducers during a transmit operation according to the beamforming pattern comprises:

controlling activation of ultrasonic transducers of more than one sub-array of ultrasonic transducers during a transmit operation according to the beamforming pattern of each instance of the beamforming space, wherein the beamforming pattern is applied to the more than one sub-array of ultrasonic transducers in parallel.

15. The method of claim 13, wherein the shifting a position of the beamforming space within the plurality of shift registers comprises:

shifting a position of each instance of the beamforming space within the plurality of shift registers in parallel across the plurality of sub-arrays of ultrasonic transducers.

16. An ultrasonic sensor control system comprising:

a signal generator configured to generate a plurality of transmit signals, wherein each transmit signal of the plurality of transmit signals has a different phase delay relative to other transmit signals of the plurality of transmit signals;

a plurality of signal lines, wherein a signal line of the plurality of signal lines is configured to transmit one ultrasonic signal of the plurality of ultrasonic signals, wherein each ultrasonic transducer of a two-dimensional array of ultrasonic transducers is independently and selectively coupled to the plurality of signal lines for receiving any transmit signal of the plurality of transmit signals;

a plurality of shift registers configured to store control bits for applying a beamforming space comprising a beamforming pattern to the two-dimensional array of ultrasonic transducers, wherein the beamforming pattern identifies a transmit signal of the plurality of transmit signals that is applied to each ultrasonic transducer of the beamforming space that is activated during a transmit operation by identifying a signal line of the plurality of signal lines to drive each ultrasonic transducer identified by the beamforming pattern; and

an array controller configured to control activation of ultrasonic transducers during a transmit operation according to the beamforming pattern and configured to shift a position of the beamforming space within the plurality of shift registers such that the beamforming space moves within and relative to the two-dimensional array of ultrasonic transducers, wherein the beamforming space is applied to the two-dimensional array of ultrasonic transducers at a plurality of positions simultaneously such that a plurality of ultrasonic beams are generated simultaneously at the plurality of positions.

17. The ultrasonic sensor control system of claim 16, further comprising an alternating current ground providing a null signal, wherein the beamforming space identifies that the null signal is applied to ultrasonic sensors of the beamforming space that are not activated during the transmit operation.

18. The ultrasonic sensor control system of claim 16, wherein the two-dimensional array of ultrasonic transducers comprises a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently controllable.

19. The ultrasonic sensor control system of claim 18, wherein the plurality of shift registers is configured to store a plurality of instances of the beamforming space, wherein each instance of the beamforming space corresponds to a different sub-array of ultrasonic transducers, and wherein each instance of the beamforming space comprises the beamforming pattern.

20. The ultrasonic sensor control system of claim 19, wherein the array controller is configured to control activation of ultrasonic transducers of more than one sub-array of ultrasonic transducers during a transmit operation according to the beamforming pattern of each instance of the beamforming space, wherein the beamforming pattern is applied to the more than one sub-array of ultrasonic transducers in parallel.

21. The ultrasonic sensor control system of claim 16, wherein the beamforming space comprises a plurality of phase vectors corresponding to a one-dimensional subset of ultrasonic transducers, a phase vector identifying a signal to apply to a corresponding ultrasonic transducer during a transmit operation.

22. The ultrasonic sensor control system of claim 21, wherein the signal is selected from a null signal and a transmit signal of the plurality of transmit signals.