Optical element

• US 10,642,167 B2
• Filed: 03/06/2018
• Issued: 05/05/2020
• Est. Priority Date: 10/26/2011
• Status: Active Grant

• Current Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Shklover, Vitaliy, Schall, Michael, Kraus, Johannes, Gloeckl, Oliver, Erxmeyer, Jeffrey, Feldermann, Horst, Forcht, Konstantin, Heinemeyer, Ute
• Primary Examiner(s): Riddle, Christina A
• Application Number:
  US15/912,722
• Publication Number:
  US 20180196362A1
• Time in Patent Office: 791 Days
• Field of Search: 355 30, 355 52, 355 53, 355 55, 355 60, 355 66- 71, 355 77, 359350, 359355, 359884, 359850, 2504921, 2504922, 25049222, 2504931, 2505031, 250504 R
• CPC Class Codes: G02B 1/115 Multilayers
• CPC Class Codes: G03F 7/7015 Details of optical elements
• CPC Class Codes: G03F 7/70191 Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
• CPC Class Codes: G03F 7/70316 Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
• CPC Class Codes: G03F 7/70958 Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

Abstract

In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein

• • a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate,
  • a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and
  • at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.

Claims

1. An optical element, comprising:

a substrate comprising calcium fluoride; and

a coating supported by the substrate,

wherein;

the coating consists of, in order moving away from the substrate, a first layer, a second layer, a third layer, and a fourth layer;

the first layer comprises magnesium fluoride;

the second layer comprises an inorganic oxide;

the third layer comprises an inorganic fluoride;

the fourth layer comprises an inorganic oxide;

the first layer is in contact with the substrate;

the fourth layer is in contact with the surroundings of the optical element; and

the coating is an anti-reflection coating.

2. The optical element of claim 1, wherein the inorganic oxide of the fourth layer has a refractive index at a wavelength in the ultraviolet wavelength range that is greater than the refractive index of magnesium fluoride at the wavelength in the ultraviolet range.

3. The optical element of claim 2, wherein the inorganic oxide of the fourth layer has a refractive index at the wavelength in the ultraviolet range that is greater than a refractive index of the inorganic fluoride of the third layer at the wavelength in the ultraviolet range.

4. The optical element of claim 1, wherein the inorganic oxide of the fourth layer has a refractive index at a wavelength in the ultraviolet range that is greater than the refractive index of calcium fluoride at the wavelength in the ultraviolet range.

5. The optical element of claim 4, wherein the inorganic oxide of the second layer has a refractive index at the wavelength in the ultraviolet range that is greater than the refractive index of calcium fluoride at the wavelength in the ultraviolet range.

6. The optical element of claim 1, wherein the inorganic oxide of the fourth layer comprises at least one material selected from the group consisting of an oxyfluoride and an oxynitride.

7. The optical element of claim 1, wherein the inorganic oxide of the fourth layer comprises at least one material selected from the group consisting of silicon dioxide, aluminum oxide, fluorine-doped silicon dioxide, and nitrogen-doped silicon dioxide.

8. The optical element of claim 1, wherein the third layer comprises magnesium fluoride.

9. The optical element of claim 1, wherein the inorganic oxide of the fourth layer is the same as the inorganic oxide of the second layer.

10. The optical element of claim 1, wherein the coating is configured so that, when exposed to ultraviolet radiation, a maximum transmission is achieved at angles of incidence between 20°

and 40°

.

11. The optical element of claim 1, wherein the coating is configured so that, when exposed to ultraviolet radiation, a maximum transmission is achieved at angles of incidence between 60°

and 80°

.

12. A system, comprising:

an optical element according to claim 1,

wherein the system is selected from the group consisting of an ultraviolet lithography illumination system and an ultraviolet projection system.

13. An apparatus, comprising:

an illumination system; and

a projection system,

wherein the apparatus is an ultraviolet lithography apparatus, a system comprises an optical element according to claim 1, and the system is selected from the group consisting of the illumination system and the projection system.