Electrostatic detecting system and method

• US 10,656,193 B2
• Filed: 12/29/2016
• Issued: 05/19/2020
• Est. Priority Date: 12/21/2016
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Tung, Mean-Jue, Tong, Shi-Yuan, Huang, Yu-Ting, Yang, Ming-Da
• Primary Examiner(s): Zakaria, Akm
• Application Number:
  US15/393,271
• Publication Number:
  US 20180172748A1
• Time in Patent Office: 1,237 Days
• CPC Class Codes: G01R 29/12 Measuring electrostatic fields or voltage-potential
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like

Abstract

An electrostatic detecting system and an electrostatic detecting method for detecting the static electricity generated at an active surface of a substrate are provided. The electrostatic detecting system includes a sensing apparatus and a signal processing apparatus. The sensing apparatus is disposed at least adjacent to a back surface opposite to the active surface of the substrate, for measuring the static electricity generated at the active surface and generating an initial electric signal. The signal processing apparatus is electrically connected to the sensing apparatus, for receiving the initial electric signal and correcting the initial electric signal based on a voltage compensation value to obtain a final electric signal.

Claims

1. An electrostatic detecting system adapted to detect static electricity generated at an active surface of a substrate on which device is formed, the electrostatic detecting system comprising:

a sensing apparatus, disposed at least adjacent to a back surface opposite to the active surface of the substrate, for measuring the static electricity generated at the active surface and generating an initial electric signal; and

a signal processing apparatus, electrically connected to the sensing apparatus, for receiving the initial electric signal and correcting the initial electric signal based on a voltage compensation value to obtain a final electric signal so as to compensate for a difference value present in the static electricity measured from the back surface and the active surface of the substrate, and outputting the final electric signal to obtain a voltage distribution on the active surface of the substrate,

wherein the voltage compensation value is determined at least by a thickness and a dielectric constant of the substrate, and a distance between the sensing apparatus and the back surface.

2. The electrostatic detecting system according to claim 1, wherein the sensing apparatus contacts the back surface of the substrate.

3. The electrostatic detecting system according to claim 1, wherein the back surface of the substrate is disposed on a substrate carrying apparatus, and the sensing apparatus is located between the back surface and the substrate carrying apparatus.

4. The electrostatic detecting system according to claim 1, wherein the back surface of the substrate is disposed on a substrate carrying apparatus, and the substrate carrying apparatus is located between the back surface and the sensing apparatus.

5. The electrostatic detecting system according to claim 1, wherein the sensing apparatus comprises a plurality of sensing devices.

6. The electrostatic detecting system according to claim 5, wherein the sensing devices are arranged in an array.

7. The electrostatic detecting system according to claim 1, wherein the initial electric signal and the final electric signal are voltage signals.

8. The electrostatic detecting system according to claim 1, wherein a distance between the sensing apparatus and the back surface is 10 cm or less.

9. An electrostatic detecting method, comprising:

disposing a sensing apparatus at least adjacent to a back surface opposite to an active surface of a substrate on which a device is formed;

by the sensing apparatus, measuring static electricity generated at the active surface and generating an initial electric signal; and

by a signal processing apparatus, receiving the initial electric signal and correcting the initial electric signal based on a voltage compensation value to obtain a final electric signal so as to compensate for a difference value present in the static electricity measured from the back surface and the active surface of the substrate, and outputting the final electric signal to obtain a voltage distribution on the active surface of the substrate,

wherein the voltage compensation value is determined at least by a thickness and a dielectric constant of the substrate, and a distance between the sensing apparatus and the back surface.

10. The electrostatic detecting method according to claim 9, wherein the sensing apparatus contacts the back surface of the substrate.

11. The electrostatic detecting method according to claim 9, further comprising disposing the back surface of the substrate on a substrate carrying apparatus, wherein the sensing apparatus is located between the back surface and the substrate carrying apparatus.

12. The electrostatic detecting method according to claim 9, further comprising disposing the back surface of the substrate on a substrate carrying apparatus, wherein the substrate carrying apparatus is located between the back surface and the sensing apparatus.

13. The electrostatic detecting method according to claim 9, wherein the sensing apparatus comprises a plurality of sensing devices.

14. The electrostatic detecting method according to claim 13, wherein the sensing devices are arranged in an array.

15. The electrostatic detecting method according to claim 9, wherein the initial electric signal and the final electric signal are voltage signals.

16. The electrostatic detecting method according to claim 9, wherein a distance between the sensing apparatus and the back surface is 10 cm or less.