Fabrication of low defectivity electrochromic devices

• US 10,663,830 B2
• Filed: 02/25/2019
• Issued: 05/26/2020
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: View Incorporated
• Original Assignee: View Incorporated
• Inventors: Pradhan, Anshu A., Rozbicki, Robert T., Gillaspie, Dane, Kailasam, Sridhar K.
• Primary Examiner(s): Pinkney, Dawayne
• Application Number:
  US16/284,876
• Publication Number:
  US 20190187531A1
• Time in Patent Office: 456 Days
• Field of Search: 359296, 359253-254, 359245-247, 359290-291, 359298, 359265-275, 359277, 359242, 349 33, 345 49, 345105, 345107, 430 31- 32
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C23C 10/28 using solids, e.g. powders, pastes
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/185 by cathodic sputtering
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: C23C 14/5853 Oxidation
• CPC Class Codes: G02F 1/1523 comprising inorganic material
• CPC Class Codes: G02F 1/1524 Transition metal compounds

Abstract

Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition. In certain embodiments, the device includes a counter electrode having an anodically coloring electrochromic material in combination with an additive.

Claims

1. An electrochromic device, comprising:

a first conductive layer;

a cathodically coloring layer comprising a cathodically coloring electrochromic material; and

an anodically coloring layer comprising an anodically coloring electrochromic material and one or more additives,

wherein the anodically coloring electrochromic material comprises at least one metal selected from the group consisting of chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), rhodium (Rh), ruthenium (Ru), vanadium (V), and iridium (Ir), and

wherein at least one of the one or more additives comprises a material selected from the group consisting of silver (Ag), arsenic (As), gold (Au), cadmium (Cd), cesium (Cs), copper (Cu), europium (Eu), mercury (Hg), osmium (Os), lead (Pb), palladium (Pd), promethium (Pm), polonium (Po), platinum (Pt), radium (Ra), rubidium (Rb), terbium (Tb), technetium (Tc), thorium (Th), thallium (Tl), and combinations thereof; and

a second conductive layer, wherein the cathodically coloring layer and the anodically coloring layer are positioned between the first and second conductive layers.

2. The electrochromic device of claim 1, wherein the metal in the anodically coloring electrochromic material is in the form of a metal oxide.

3. The electrochromic device of claim 1, wherein the at least one of the one or more additives is a metal oxide.

4. The electrochromic device of claim 1, wherein the electrochromic device is fabricated by depositing the cathodically coloring layer and the anodically coloring layer in direct contact with one another, without an ion conducting layer between the cathodically coloring layer and the anodically coloring layer.

5. The electrochromic device of claim 4, wherein at least one of the cathodically coloring layer and the anodically coloring layer are deposited to include an oxygen-rich portion, the oxygen-rich portion having a higher concentration of oxygen compared to a remaining portion of the cathodically coloring layer or anodically coloring layer, respectively.

6. The electrochromic device of claim 1, wherein the anodically coloring electrochromic material comprises nickel oxide.

7. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Ag.

8. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises As.

9. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Au.

10. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Cd.

11. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Cs.

12. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Cu.

13. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Eu.

14. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Hg.

15. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Os.

16. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Pb.

17. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Pd.

18. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Pm.

19. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Po.

20. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Pt.

21. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Ra.

22. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Rb.

23. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Tb.

24. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Tc.

25. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Th.

26. The electrochromic device of claim 6, wherein the at least one of the one or more additives comprises Tl.

27. The electrochromic device of claim 1, wherein the cathodically coloring electrochromic material comprises tungsten oxide doped with lithium, sodium, potassium, molybdenum, vanadium, or titanium.