Method of producing layer structure, and method of forming patterns

  • US 10,663,863 B2
  • Filed: 09/14/2016
  • Issued: 05/26/2020
  • Est. Priority Date: 10/23/2015
  • Status: Active Grant
First Claim
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1. A method of producing a layer structure, the method comprising:

  • coating a first composition on a substrate that has a pattern thereon;

    curing the coated first composition to form a first organic layer;

    applying a liquid material to the first organic layer to remove a part of the first organic layer; and

    coating a second composition on remaining parts of the first organic layer such that the coating of the second composition is performed in the same manner as the coating of the first composition; and

    curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer;

    wherein the first composition and the second composition each independently include;

    a solvent, anda polymer including a structural unit represented by Chemical Formula 1,
    *private use character BrketopenstA1-B1private use character Brketclosest* 

    [Chemical Formula 1]wherein, in Chemical Formula 1,A1 is a divalent cyclic group including at least one of a substituted or unsubstituted benzene ring,B1 is a divalent organic group, and* is a linking point, andwherein the liquid material includes γ

    -butyrolactone, δ

    -valerolactone, ethyllactate, ethyl-3-ethoxypropionate, propylene glycolmonomethyl ether acetate, β

    -hydroxy β

    -methylbutyrate, methanol, ethanol, 2-butanol, ethylene glycol, propylene glycol, glycerol, 1,6-hexanediol, cyclo hexanediol, sorbitol, xylitol, 2-methyl-2,4-pentanediol, 1,3-butanediol, 1,4-butanediol, ethylene glycol monomethyl ether, diethylene glycol, dipropylene glycol, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, triethylene glycol, poly(ethylene glycol), propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, tripropylene glycol monomethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, ethylethoxy propionate, propylene glycol monomethyl ether propionate, ethylene glycol diacetate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutyrate, n-butyl acetate, formamide, monomethylformamide, dimethyl formamide, acetamide, monomethylacetamide, dimethyl acetamide, monoethylacetamide, diethylacetamide, N-methylpyrrolidone, methoxy methyl propionate, methoxy ethyl propionate, methoxy propyl propionate, methoxy butyl propionate, ethoxy methyl propionate, ethoxy ethylpropionate, ethoxy propyl propionate, ethoxy butyl propionate, dimethyl sulfone, dimethyl sulfoxide, sulfolane, acetone, acetyl acetone, methylethyl ketone, methyl isobutyl ketone, or a combination thereof.

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