Tunable power amplifier with wide frequency range

• US 10,666,204 B2
• Filed: 10/29/2018
• Issued: 05/26/2020
• Est. Priority Date: 08/05/2014
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Banerjee, Aritra, Schemm, Nathan R., Hezar, Rahmi, Ding, Lei, Haroun, Baher
• Primary Examiner(s): Choe, Henry
• Application Number:
  US16/173,830
• Publication Number:
  US 20190068135A1
• Time in Patent Office: 575 Days
• Field of Search: 330302, 330305
• CPC Class Codes: B81B 2207/99 Microstructural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01G 5/38 Multiple capacitors, e.g. ganged
• CPC Class Codes: H01G 5/40 Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
• CPC Class Codes: H01L 2223/6655 Matching arrangements, e.g. arrangement of inductive and capacitive components
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H03F 1/0205 in transistor amplifiers
• CPC Class Codes: H03F 1/0294 using vector summing of two or more constant amplitude phase-modulated signals
• CPC Class Codes: H03F 1/223 with MOSFET's
• CPC Class Codes: H03F 1/42 Modifications of amplifiers to extend the bandwidth
• CPC Class Codes: H03F 1/565 using inductive elements
• CPC Class Codes: H03F 2200/111 the amplifier being a dual or triple band amplifier, e.g. 900 and 1800 MHz, e.g. switched or not switched, simultaneously or not
• CPC Class Codes: H03F 2200/378 A variable capacitor being added in the output circuit, e.g. collector, drain, of an amplifier stage
• CPC Class Codes: H03F 2200/391 the output circuit of an amplifying stage comprising an LC-network
• CPC Class Codes: H03F 2200/451 the amplifier being a radio frequency amplifier
• CPC Class Codes: H03F 2200/537 A transformer being used as coupling element between two amplifying stages
• CPC Class Codes: H03F 2200/541 Transformer coupled at the output of an amplifier
• CPC Class Codes: H03F 2200/546 A tunable capacitance being present in an amplifier circuit
• CPC Class Codes: H03F 2203/21157 A filter circuit being added at the output of a power amplifier stage
• CPC Class Codes: H03F 3/19 : with semiconductor devices only
• CPC Class Codes: H03F 3/193 : with field-effect devices H03F3/195 takes precedence
• CPC Class Codes: H03F 3/195 : in integrated circuits
• CPC Class Codes: H03F 3/21 : with semiconductor devices only H03F3/245 takes precedence
• CPC Class Codes: H03F 3/211 : using a combination of several amplifiers H03F3/60 takes precedence
• CPC Class Codes: H03F 3/245 : with semiconductor devices only

Abstract

A circuit includes an amplifier to amplify an input signal and generate an output signal. The circuit also includes a tuning network to tune frequency response of the amplifier. The tuning network includes at least one tunable capacitor, which includes at least one micro-electro mechanical system (MEMS) capacitor. The amplifier could include a first die, the at least one MEMS capacitor could include a second die, and the first die and the second die could be integrated in a single package. The at least one MEMS capacitor could include a MEMS superstructure over a control structure, which is to control the MEMS superstructure and tune the capacitance of the at least one MEMS capacitor.

Claims

1. A circuit comprising:

an amplifier having an amplifier input and an amplifier output, the amplifier having a frequency response; and

a tuning network coupled to the amplifier, the tuning network configured to tune the frequency response, the tuning network including a tunable microelectromechanical system (MEMS) capacitor having a capacitance, the tunable MEMS capacitor including a MEMS superstructure over a control structure, the control structure configured to control the MEMS superstructure and tune the capacitance, the control structure including an electrode, and the MEMS superstructure including a membrane of which at least a portion is parallel to the electrode.

2. The circuit of claim 1, wherein:

the amplifier includes a first die;

the tunable MEMS capacitor includes a second die; and

the first die and the second die are integrated in a single package.

3. The circuit of claim 1, wherein the control structure is configured to electrostatically control a position of the MEMS superstructure.

4. The circuit of claim 1, wherein the tuning network includes multiple tunable MEMS capacitors.

5. A method comprising:

amplifying an input signal and generating an output signal using an amplifier, the amplifier having a frequency response; and

tuning the frequency response using a tuning network coupled to the amplifier, the tuning network including a tunable microelectromechanical system (MEMS) capacitor having a capacitance, the tunable MEMS capacitor including a MEMS superstructure over a control structure that controls the MEMS superstructure and tunes the capacitance, the control structure including an electrode, and the MEMS superstructure including a membrane of which at least a portion is parallel to the electrode.

6. The method of claim 5, wherein:

the amplifier includes a first die;

the tunable MEMS capacitor includes a second die; and

the first die and the second die are integrated in a single package.

7. The method of claim 5, wherein the control structure electrostatically controls a position of the MEMS superstructure.

8. The method of claim 5, wherein the tuning network includes multiple tunable MEMS capacitors.