Capacitive bending sensors
First Claim
1. A sensor unit for detecting bending of the sensor unit, the sensor unit comprising:
- a capacitive upper sensor having an upper capacitance (Cupper) and comprising first and second deformable upper electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second upper shapes;
a capacitive lower sensor having a lower capacitance (Clower), spaced apart from the upper sensor in a Z direction and comprising first and second deformable lower electrodes spaced apart from one another in the Z direction, the first and second lower electrodes respectively having first and second lower shapes; and
wherein, for a bend of the sensor unit in a first direction about a Y-axis orthogonal to the Z direction, the first and second upper shapes change such that the upper capacitance (Cupper) decreases and the lower shapes change such that the lower capacitance (Clower) increases, and, for a bend of the sensor unit in a second direction about the Y-axis and opposed to the first direction, the first and second upper shapes change such that the upper capacitance (Cupper) increases and the lower shapes change such that the lower capacitance (Clower) decreases.
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Accused Products
Abstract
A sensor unit for detecting bending of the sensor unit comprises: a capacitive upper sensor having an upper capacitance and comprising first and second deformable upper electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second upper shapes; and a capacitive lower sensor having a lower capacitance, spaced apart from the upper sensor in a Z direction and comprising first and second deformable lower electrodes spaced apart from one another in the Z direction, the first and second lower electrodes respectively having first and second lower shapes. For a bend of the sensor unit in a first direction, the first and second upper shapes change such that the upper capacitance decreases and the lower shapes change such that the lower capacitance increases. For a bend of the sensor unit in a second direction opposed to the first direction, the first and second upper shapes change such that the upper capacitance increases and the lower shapes change such that the lower capacitance decreases.
55 Citations
22 Claims
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1. A sensor unit for detecting bending of the sensor unit, the sensor unit comprising:
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a capacitive upper sensor having an upper capacitance (Cupper) and comprising first and second deformable upper electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second upper shapes; a capacitive lower sensor having a lower capacitance (Clower), spaced apart from the upper sensor in a Z direction and comprising first and second deformable lower electrodes spaced apart from one another in the Z direction, the first and second lower electrodes respectively having first and second lower shapes; and wherein, for a bend of the sensor unit in a first direction about a Y-axis orthogonal to the Z direction, the first and second upper shapes change such that the upper capacitance (Cupper) decreases and the lower shapes change such that the lower capacitance (Clower) increases, and, for a bend of the sensor unit in a second direction about the Y-axis and opposed to the first direction, the first and second upper shapes change such that the upper capacitance (Cupper) increases and the lower shapes change such that the lower capacitance (Clower) decreases. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A sensor unit for detecting bending of the sensor unit, the sensor unit comprising:
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a capacitive sensor having a capacitance (C) and comprising first and second deformable electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second shapes; wherein, for a bend of the sensor unit in a first direction about a Y-axis orthogonal to the Z direction, at least one of the first and second shapes change such that the capacitance (C) increases, and, for a bend of the sensor unit in a second direction about the Y-axis and opposed to the first direction, at least one of the first and second shapes change such that the capacitance (C) decreases.
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20. A sensor array comprising
a plurality of Y direction oriented sensor unit columns, each sensor unit column comprising a plurality of sensor units generally aligned with one another in the Y direction and each sensor unit column oriented such that the plurality of sensor units form a plurality of X direction oriented sensor unit rows, each sensor unit row comprising a subset of the plurality of sensor units generally aligned with one another in an X direction; - and
wherein each of the plurality of sensor units comprises a sensor unit comprising; a capacitive upper sensor having an upper capacitance (Cupper) and comprising first and second deformable upper electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second upper shapes; a capacitive lower sensor having a lower capacitance (Clower), spaced apart from the upper sensor in a Z direction and comprising first and second deformable lower electrodes spaced apart from one another in the Z direction, the first and second lower electrodes respectively having first and second lower shapes; and wherein, for a bend of the sensor unit in a first direction about a Y-axis orthogonal to the Z direction, the first and second upper shapes change such that the upper capacitance (Cupper) decreases and the lower shapes change such that the lower capacitance (Clower) increases, and, for a bend of the sensor unit in a second direction about the Y-axis and opposed to the first direction, the first and second upper shapes change such that the upper capacitance (Cupper) increases and the lower shapes change such that the lower capacitance (Clower) decreases.
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21. A method for fabricating a sensor unit, the method comprising:
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embedding a capacitive upper sensor within a dielectric material of the sensor unit at a first location spaced apart from a neutral bending plane of the sensor unit in a positive-Z direction; and embedding a capacitive lower sensor within the dielectric material of the sensor unit at a second location spaced apart from the neutral bending plane of the sensor unit in a negative-Z direction. - View Dependent Claims (22)
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Specification