Removable compartments for workpiece stocker

• US 10,672,633 B2
• Filed: 06/16/2014
• Issued: 06/02/2020
• Est. Priority Date: 11/15/2006
• Status: Active Grant

• Current Assignee: Dynamic Micro Systems Semiconductor Equipment (Azenta, Inc.)
• Original Assignee: Dynamic Micro Systems Semiconductor Equipment (Azenta, Inc.)
• Inventors: Rebstock, Lutz
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): Berry, Jr., Willie
• Application Number:
  US14/304,996
• Publication Number:
  US 20140294544A1
• Time in Patent Office: 2,178 Days
• Field of Search: None
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Claims

1. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces, the chamber including an IO station port;

a robotic mechanism for transferring the plurality of workpieces from the chamber to an IO station through the IO station port;

an emergency access port distinct from the IO station port and both the IO station port and the emergency access port extend through and are defined by a common housing forming the chamber, for accessing the plurality of workpieces in an event of a failure of the workpiece stocker,

wherein the emergency access port comprises a mating interface,

wherein the mating interface is configured to be selectively coupled to a portable workpiece removal enclosure so as to be hermetically mated to the portable workpiece removal enclosure,

wherein the mating interface forms a decoupleable engagement between the portable workpiece removal enclosure and the common housing and links the portable workpiece removal enclosure to the common housing of the workpiece stocker so that coupling engagement of the mating interface between the portable workpiece removal enclosure and the common housing effects coupling of the portable workpiece removal enclosure and the common housing and decoupling engagement of the mating interface between the portable workpiece removal enclosure to the common housing effects decoupling of the portable workpiece removal enclosure and the common housing, wherein the portable workpiece removal enclosure accepts workpieces removed from the workpiece stocker through the emergency port so that other workpieces in the workpiece stocker are isolated from an outside ambient.

2. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure comprises a portable clean room for linking with the workpiece stocker.

3. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure comprises a load lock for the emergency access port.

4. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure is configured for an operator to stay outside the portable workpiece removal enclosure while handling the workpieces.

5. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure comprises a portable glove box for accessing the workpieces.

6. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure is configured for an operator to enter the workpiece stocker through the emergency access port to handle the workpieces.

7. A workpiece stocker as in claim 1 wherein the workpieces are stored in carrier boxes in the workpiece stocker.

8. A workpiece stocker as in claim 1 wherein the workpieces are stored bare in the workpiece stocker.

9. A workpiece stocker as in claim 1 wherein the portable workpiece removal enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.

10. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces, the chamber including an IO station port;

a robotic mechanism for transferring the plurality of workpieces from the chamber to an IO station through the IO station port;

an emergency access port distinct from the IO station port and both the IO station port and the emergency access port extend through and are defined by a common housing forming the chamber,

wherein the emergency access port is configured for accessing the plurality workpieces in an event of a failure of the workpiece stocker,

wherein the emergency access port is configured to be selectively coupled to a portable workpiece removal enclosure so as to be hermetically coupled to the portable workpiece removal enclosure,

wherein the emergency access port forms a decoupleable engagement between the portable workpiece removal enclosure and the common housing and links the portable workpiece removal enclosure to the common housing of the workpiece stocker so that coupling engagement of the mating interface between the portable workpiece removal enclosure and the common housing effects coupling of the portable workpiece removal enclosure and the common housing and decoupling engagement of the mating interface between the portable workpiece removal enclosure to the common housing effects decoupling of the portable workpiece removal enclosure and the common housing, wherein the portable workpiece removal enclosure allows removing workpieces from the workpiece stocker through the emergency access port so that other workpieces in the workpiece stocker are isolated from an outside ambient.

11. A workpiece stocker as in claim 10 wherein the portable workpiece removal enclosure comprises a portable clean room for linking with the workpiece stocker.

12. A workpiece stocker as in claim 10 wherein the portable workpiece removal enclosure comprises a load lock for the emergency access port.

13. A workpiece stocker as in claim 10 wherein the portable workpiece removal enclosure is configured for an operator to stay outside the portable workpiece removal enclosure while handling the workpieces.

14. A workpiece stocker as in claim 10 wherein the portable workpiece removal enclosure comprises a portable glove box for accessing the workpieces.

15. A workpiece stocker as in claim 10 wherein the portable workpiece removal enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.

16. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces, the chamber including an IO station port;

a robotic mechanism for transferring the workpieces from the chamber to an IO station through the IO station port;

a mating interface having an opening distinct from the IO station port and both the IO station port and the opening extend through and are defined by a common housing forming the chamber,

wherein the mating interface is configured to be selectively coupled to a portable workpiece removal enclosure so as to be hermetically mated to the portable workpiece removal enclosure,

wherein the mating interface forms a decoupleable engagement between the portable workpiece removal enclosure and the common housing so that coupling engagement of the mating interface between the portable workpiece removal enclosure and the common housing effects coupling of the portable workpiece removal enclosure and the common housing and decoupling engagement of the mating interface between the portable workpiece removal enclosure to the common housing effects decoupling of the portable workpiece removal enclosure and the common housing, and links the portable workpiece removal enclosure to the common housing of the workpiece stocker through the opening of the mating interface for accessing the workpiece in the event of a failure of the stocker,

wherein accessing the workpiece comprises removing the workpieces from the workpiece stocker through the opening of the mating interface so that other workpieces in the workpiece stocker are isolated from an outside ambient.

17. A workpiece stocker as in claim 16 wherein the portable workpiece removal enclosure comprises a portable clean room for linking with the workpiece stocker.

18. A workpiece stocker as in claim 16 wherein the portable workpiece removal enclosure comprises a load lock for the emergency access port.

19. A workpiece stocker as in claim 16 wherein the portable workpiece removal enclosure comprises a portable glove box for accessing the workpieces.

20. A workpiece stocker as in claim 16 wherein the portable workpiece removal enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.