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Hydrogen sensor

  • US 10,690,606 B2
  • Filed: 09/16/2016
  • Issued: 06/23/2020
  • Est. Priority Date: 09/16/2015
  • Status: Active Grant
First Claim
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1. A hydrogen sensor comprising:

  • at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate;

    a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and

    a hydrogen non-reactive layer formed in the second quartz vibrator,wherein an average film thickness of the platinum film is in a range of greater than or equal to 70 nm and less than or equal to 150 nm, andwherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.

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