Hydrogen sensor
First Claim
1. A hydrogen sensor comprising:
- at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate;
a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and
a hydrogen non-reactive layer formed in the second quartz vibrator,wherein an average film thickness of the platinum film is in a range of greater than or equal to 70 nm and less than or equal to 150 nm, andwherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.
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Accused Products
Abstract
In order to provide a hydrogen sensor for measuring a hydrogen concentration with high sensitivity and excellent mass-productivity, the hydrogen sensor includes: at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increasing by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.
20 Citations
4 Claims
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1. A hydrogen sensor comprising:
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at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein an average film thickness of the platinum film is in a range of greater than or equal to 70 nm and less than or equal to 150 nm, and wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator. - View Dependent Claims (2, 3)
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4. A hydrogen sensor comprising:
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at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer that is formed on both sides of the first quartz vibrator and includes a platinum film having a plurality of protrusions on its surface, the protrusions having a particulate shape in surface observation or having a dendritic shape, a needle-like shape, or a columnar shape in cross-sectional observation; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein an average film thickness of the platinum film is in a range of greater than or equal to 70 nm and less than or equal to 150 nm, and wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen in the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.
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Specification