Rare-earth oxide based erosion resistant coatings for semiconductor application

• US 10,734,202 B2
• Filed: 06/03/2015
• Issued: 08/04/2020
• Est. Priority Date: 06/05/2013
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Sun, Jennifer, Kanungo, Biraja P., Cho, Tom
• Primary Examiner(s): Patterson, Marc A
• Application Number:
  US14/729,950
• Publication Number:
  US 20150270108A1
• Time in Patent Office: 1,889 Days
• CPC Class Codes: C04B 35/00 Shaped ceramic products characterised by their composition porous ceramic products C04B38/00; ceramic articles characterised by particular shape, see the relevant classes, e.g. linings for casting ladles, tundishes, cups or the like B22D41/02; ceramic substrates for microelectronic semi-conductors H01L23/15; Ceramics compositions containing free metal bonded to carbides, diamond, oxides, borides, nitrides, silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides or sulfides other than as macroscopic reinforcing agents C22C; shaping of ceramics B28B; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products chemical preparation of powders of inorganic compounds C01; infiltration of sintered ceramic preforms with molten metal C04B41/51
• CPC Class Codes: C04B 35/10 based on aluminium oxide
• CPC Class Codes: C04B 35/581 based on aluminium nitride
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/4527 Plasma spraying deposition from the gas phase using plasma C04B41/4533
• CPC Class Codes: C04B 41/5031 Alumina
• CPC Class Codes: C04B 41/5042 Zirconium oxides or zirconates; Hafnium oxides or hafnates
• CPC Class Codes: C04B 41/5045 Rare-earth oxides
• CPC Class Codes: C04B 41/87 Ceramics
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 4/11 Oxides
• CPC Class Codes: C23C 4/134 Plasma spraying
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/26 Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Abstract

An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y₂O₃ in a range between about 45 mol % to about 99 mol %, ZrO₂ in a range between about 1 mol % to about 55 mol %, and Al₂O₃ in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y₂O₃ in a range between about 45 mol % to about 99 mol % and Al₂O₃ in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y₂O₃ in a range between about 45 mol % to about 99 mol % and ZrO₂ in a range between about 1 mol % to about 55 mol %.

Claims

1. A component for a processing chamber comprising:

a body of the component for the processing chamber, the body comprising an approximately planar surface area comprising an unroughened surface region and a roughened surface region on the approximately planar surface area, the roughened surface region having a first surface roughness of about 120-240 μ

in and the unroughened surface region having a second surface roughness that is lower than the first surface roughness; and

a plasma resistant ceramic coating on the roughened surface region of the approximately planar surface area of the body and not on the unroughened surface region of the approximately planar surface area of the body,

wherein the plasma resistant ceramic coating is a plasma sprayed coating that consists essentially of Y₂O₃ in a range between about 45 mol % to about 73 mol % and ZrO₂ in a range from about 27 mol % to about 55 mol %,

the plasma resistant ceramic coating comprising a post-polished surface roughness of about 6 μ

m to about 12 μ

m and a post-polished thickness of about 5 mil to about 25 mil,

wherein the plasma resistant ceramic coating comprises at least one of a tapered edge or a chamfered edge at an interface between the roughened surface region and the unroughened surface region.

2. The component of claim 1, wherein the plasma resistant ceramic coating consists essentially of about 73 mol % of Y₂O₃ and about 27 mol % of ZrO₂.

3. The component of claim 1, wherein the body comprises at least one of aluminum, copper, or magnesium, and wherein the roughened surface region of the body has a surface roughness of approximately 120-180 μ

in.

4. The component of claim 1, wherein the body comprises a ceramic.

5. The component of claim 1, wherein the plasma resistant ceramic coating has a porosity of less than about 5%, a hardness of greater than about 4 GPa, a thermal shock resistance of greater than about 10 MPa, and an adhesion strength of greater than about 14 MPa.

6. The component of claim 1, wherein the plasma resistant ceramic coating is a plasma sprayed coating having a post-polished thickness of about 8 mil to about 10 mil.

7. The component of claim 1, wherein the plasma resistant ceramic coating consists essentially of 73.1 mol % of Y₂O₃ and 26.9 mol % of ZrO₂.

8. The component of claim 1, wherein the body comprises a ceramic selected from a group consisting of Y₂O₃ (yttria), Y₄Al₂O₉ (YAM), Al₂O₃ (alumina), Y₃Al₅O₁₂ (YAG), Quartz, YAlO₃ (YAP), SiC (silicon carbide), Si₃N₄ (silicon nitride), AlN (aluminum nitride), ZrO₂ (zirconia), Al₂O₃ (alumina), AlON (aluminum oxynitride), TiO₂ (titania), TiC (titanium carbide), ZrC (zirconium carbide), TiN (titanium nitride), TiCN (titanium carbon nitride), and Y₂O₃ stabilized ZrO₂ (YSZ).

9. The component of claim 1, wherein the plasma resistant ceramic coating is usable at operating temperatures of up to approximately 150°

C.

10. The component of claim 1, wherein the plasma resistant ceramic coating has impurities of less than or equal to 5.1 parts per million (ppm) of Ca, 0.24 ppm of Cr, 0.2 ppm of Cu, 1.1 ppm of Fe, 1.4 ppm of Mg, 0.1 ppm of Mn, 0.1 ppm of Ni, 3.1 ppm of K, 19 ppm of Na, 0.5 ppm of Sr, 0.8 ppm of Ti and or 5 ppm of Zn.

11. The component of claim 2, wherein in the plasma resistant ceramic coating has impurities of Ca, Cr, Fe, Mg, K, Na or Ti.

12. The component of claim 2, wherein the plasma resistant ceramic coating has at least one of an impurity of about 0.24 ppm of Cr or an impurity of about 1.1 ppm of Fe.

13. The component of claim 1, wherein the plasma resistant ceramic coating has impurities of at least one of 5.1 parts per million (ppm) of Ca, 0.24 ppm of Cr, less than 0.2 ppm of Cu, 1.1 ppm of Fe, 1.4 ppm of Mg, less than 0.1 ppm of Mn, less than 0.1 ppm of Ni, 3.1 ppm of K, 19 ppm of Na, less than 0.5 ppm of Sr, 0.8 ppm of Ti and or less than 5 ppm of Zn.

14. The component of claim 1, wherein the body comprises Al₂O₃.

15. The component of claim 1, wherein the body comprises a yttrium oxide containing solid solution.

16. The component of claim 1, wherein the component comprising the plasma resistant ceramic coating has a lifespan of at least about 2 years of usage in a plasma environment.

17. The component of claim 1, wherein the plasma resistant ceramic coating has an adhesion strength of about 4 MPa to about 20 MPa.

18. The component of claim 1, wherein the processing chamber is a plasma etch reactor and the component is a ceramic lid of the plasma etch reactor.

19. The component of claim 1, wherein the post-polish thickness is less than an unpolished thickness.

20. The component of claim 19, wherein the plasma resistant ceramic coating has a post-polished thickness of about 8 mil to about 12 mil.