Nano-featured porous silicon materials
First Claim
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1. A method for producing nano-featured porous silicon particles comprising:
- a) heating particles of a silicon metal alloy at a temperature between 350 and 850°
C. in the presence of nitrogen;
b) holding a mixture of an etching gas comprising chlorine, hydrochloric acid, fluorine, or combinations thereof, and the particles of the silicon metal alloy at a temperature between 350 and 850°
C., to allow for creation of a metal chloride, metal fluoride, or combinations thereof; and
c) cooling the mixture, and removing the metal chloride, metal fluoride, or combinations thereof, to yield the nano-featured porous silicon particles.
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Abstract
Porous silicon and methods for preparation and use of the same are disclosed. The porous silicon materials have utility either alone or in combination with other materials, for example, combined with carbon particles for energy storage applications.
297 Citations
24 Claims
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1. A method for producing nano-featured porous silicon particles comprising:
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a) heating particles of a silicon metal alloy at a temperature between 350 and 850°
C. in the presence of nitrogen;b) holding a mixture of an etching gas comprising chlorine, hydrochloric acid, fluorine, or combinations thereof, and the particles of the silicon metal alloy at a temperature between 350 and 850°
C., to allow for creation of a metal chloride, metal fluoride, or combinations thereof; andc) cooling the mixture, and removing the metal chloride, metal fluoride, or combinations thereof, to yield the nano-featured porous silicon particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification