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Nano-featured porous silicon materials

  • US 10,763,501 B2
  • Filed: 08/12/2016
  • Issued: 09/01/2020
  • Est. Priority Date: 08/14/2015
  • Status: Active Grant
First Claim
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1. A method for producing nano-featured porous silicon particles comprising:

  • a) heating particles of a silicon metal alloy at a temperature between 350 and 850°

    C. in the presence of nitrogen;

    b) holding a mixture of an etching gas comprising chlorine, hydrochloric acid, fluorine, or combinations thereof, and the particles of the silicon metal alloy at a temperature between 350 and 850°

    C., to allow for creation of a metal chloride, metal fluoride, or combinations thereof; and

    c) cooling the mixture, and removing the metal chloride, metal fluoride, or combinations thereof, to yield the nano-featured porous silicon particles.

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