Particle removal from electrochromic films using non-aqueous fluids
First Claim
1. A method of forming an electrochromic device comprising:
- depositing a first conductive layer over a substrate;
depositing a first electrode layer over the first conductive layer, wherein the first electrode layer is one of an electrochromic layer or a counter electrode layer;
depositing an ion conductor layer over the first electrode layer, wherein a film stack includes the first conductive layer, the first electrode layer, and the ion conductor layer;
exposing the ion conductor layer to a non-aqueous liquid to remove particulate material having a size between about 0.1 μ
m and about 1000 μ
m, wherein the non-aqueous liquid is selected from the group consisting of a hydrofluorocarbon, a fluorocarbon, a polymeric fluorinated solvent, and a fluoride surfactant;
depositing a second electrode layer over the film stack after exposing the ion conductor layer to the non-aqueous liquid, wherein the second electrode layer is the other of the electrochromic layer or the counter electrode layer; and
depositing a second conductive layer on the second electrode layer, wherein the electrochromic device has a defect density of less than 1 defect/m2, and wherein the electrochromic device is configured for use in a window.
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Accused Products
Abstract
Several of the films that comprise various energy producing or control devices, for example, electrochromic devices, lithium batteries, and photovoltaic cells, are sensitive to moisture in some way. They may be especially vulnerable to moisture at particular stages during their fabrication. It may also be highly desirable during fabrication to be able to wash particulates from the surface. The particulates may be generated some aspect of the fabrication process, or they may arise from the environment in which the fabrication takes place. This invention shows ways to remove said particles from the surface without incurring the damage associated with typical washing processes, resulting in higher manufacturing yields and better device performance.
28 Citations
16 Claims
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1. A method of forming an electrochromic device comprising:
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depositing a first conductive layer over a substrate; depositing a first electrode layer over the first conductive layer, wherein the first electrode layer is one of an electrochromic layer or a counter electrode layer; depositing an ion conductor layer over the first electrode layer, wherein a film stack includes the first conductive layer, the first electrode layer, and the ion conductor layer; exposing the ion conductor layer to a non-aqueous liquid to remove particulate material having a size between about 0.1 μ
m and about 1000 μ
m, wherein the non-aqueous liquid is selected from the group consisting of a hydrofluorocarbon, a fluorocarbon, a polymeric fluorinated solvent, and a fluoride surfactant;depositing a second electrode layer over the film stack after exposing the ion conductor layer to the non-aqueous liquid, wherein the second electrode layer is the other of the electrochromic layer or the counter electrode layer; and depositing a second conductive layer on the second electrode layer, wherein the electrochromic device has a defect density of less than 1 defect/m2, and wherein the electrochromic device is configured for use in a window. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of forming an electrochromic device comprising:
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depositing a first conductive layer over a substrate; depositing a first electrode layer over the first conductive layer, wherein the first electrode layer is one of an electrochromic layer or a counter electrode layer; depositing an ion conductor layer over the first electrode layer, wherein a film stack includes the first conductive layer, the first electrode layer, and the ion conductor layer; exposing the ion conductor layer to a non-aqueous liquid to remove particulate material having a size between about 0.1 μ
m and about 1000 μ
m, wherein the non-aqueous liquid is selected from the group consisting of a hydrofluorocarbon, a fluorocarbon, a polymeric fluorinated solvent, and a fluoride surfactant;depositing a second electrode layer over the ion conductor layer after exposing the film stack to the non-aqueous liquid, wherein the second electrode layer is the other of the electrochromic layer or the counter electrode layer; and depositing a second conductive layer on the second electrode layer, wherein the electrochromic device has a defect density of less than 1 defect/m2, wherein the electrochromic device is configured to be part of an insulated glass unit, and wherein the electrochromic device is configured for use in a window.
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Specification