Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity

• US 10,775,335 B2
• Filed: 10/24/2018
• Issued: 09/15/2020
• Est. Priority Date: 01/30/2017
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Kinser, Emily R.
• Primary Examiner(s): Rufo, Louis J
• Application Number:
  US16/169,635
• Publication Number:
  US 20190056343A1
• Time in Patent Office: 692 Days
• Field of Search: None
• CPC Class Codes: B81C 1/00111 Tips, pillars, i.e. raised structures microneedles A61M37/0015
• CPC Class Codes: B81C 1/00206 Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
• CPC Class Codes: B81C 1/00246 Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
• CPC Class Codes: B81C 1/00531 Dry etching
• CPC Class Codes: B81C 1/00539 Wet etching
• CPC Class Codes: B81C 2201/0149 Forming nanoscale microstructures using auto-arranging or self-assembling material
• CPC Class Codes: B81C 99/008 separating the processed structure from a mother substrate
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C12Q 1/006 for glucose
• CPC Class Codes: C25D 1/006 Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]
• CPC Class Codes: C25D 1/20 Separation of the formed objects from the electrodes with no destruction of said electrodes
• CPC Class Codes: C25D 5/022 using masking means
• CPC Class Codes: C25D 5/48 After-treatment of electroplated surfaces
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: G01N 27/3271 Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood amperometry per se G01N27/49; aspects concerning the enzyme reagent C12Q1/001
• CPC Class Codes: G01N 27/3276 being a hybridisation with immobilised receptors using a FET type sensor G01N27/4145; concerning the hybridisation C12Q1/68

Abstract

Methods for forming an electrode structure, which can be used as a biosensor, are provided in which the electrode structure has non-random topography located on one surface of an electrode base. In some embodiments, an electrode structure is obtained that contains no interface between the non-random topography of the electrode structure and the electrode base of the electrode structure. In other embodiments, electrode structures are obtained that have an interface between the non-random topography of the electrode structure and the electrode base of the electrode structure.

Claims

1. A method of forming an electrode structure, the method comprising:

providing an electrode base having an electrode base shape on a substrate;

forming a patterned material layer on and surrounding the electrode base, wherein the patterned material layer contains openings that physically expose the electrode base and define a nanotopography shape of the electrode structure;

forming a metallic seed layer on the physically exposed surfaces of the electrode base and within the openings;

electroplating a conductive metal-containing material on the metallic seed layer and within the openings to provide the electrode structure comprising the electrode base having the electrode base shape and the conductive metal-containing material having the nanotopography shape;

removing the patterned material layer; and

attaching a biological functionalization material to the electrode structure.

2. The method of claim 1, wherein the patterned material layer is composed of a dielectric material, and the substrate is composed of a semiconductor material.

3. The method of claim 1, wherein the patterned material layer is composed of a photoresist material, and the substrate is composed of a semiconductor material.

4. The method of claim 1, further comprising:

removing the substrate, wherein the removing of the substrate is performed between the removing of the patterned material layer and the attaching of the biological functionalization material to the electrode structure.

5. The method of claim 1, wherein the metallic seed layer and the conductive metal-containing material comprise a same metal or metal alloy.

6. The method of claim 1, wherein the biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

7. The method of claim 6, wherein the biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

8. The method of claim 1, wherein an interface is present between the electrode base shape and the nanotopography shape.

9. The method of claim 1, wherein the providing of the electrode base having the electrode base shape comprises:

depositing a conductive material on the substrate; and

patterning the conductive material.

10. The method of claim 9, wherein the conductive material is a conductive metal-containing material selected from an elemental metal and an alloy containing one of more elemental metals.

11. The method of claim 10, wherein the elemental metal is platinum, copper, silver, gold, tungsten, aluminum, iron, palladium, nickel, titanium or zirconium.

12. The method of claim 1, wherein the forming of the metallic seed layer comprises a selective deposition process.

13. The method of claim 1, wherein the conductive metal-containing material has a topmost surface that is coplanar with a topmost surface of the patterned material layer.

14. The method of claim 13, wherein the electroplating of the conductive metal-containing material further comprises removing excess conductive metal-containing material that extends outside of the openings.

15. The method of claim 14, wherein the removing of the excess conductive metal-containing material comprises a planarization process or an etch back process.

16. The method of claim 1, wherein the removing of the patterned material layer comprises recessing the patterned material layer to physically expose a topmost surface of the electrode structure, while maintaining said patterned material layer along the sidewalls of the electrode structure.

17. The method of claim 1, wherein the removing of the patterned material layer comprises a reactive ion etch or a chemical wet etch.

18. A method of forming an electrode structure, the method comprising:

providing an electrode base having an electrode base shape on a substrate;

forming a patterned material layer on and surrounding the electrode base, wherein the patterned material layer contains openings that physically expose the electrode base and define a nanotopography shape of the electrode structure;

electroplating a conductive metal-containing material within the openings to provide the electrode structure comprising the electrode base having the electrode base shape and the conductive metal-containing material having the nanotopography shape;

removing the patterned material layer; and

attaching a biological functionalization material to the electrode structure.

19. The method of claim 18, further comprising:

removing the substrate, wherein the removing of the substrate is performed between the removing of the patterned material layer and the attaching of the biological functionalization material to the electrode structure.

20. The method of claim 18, wherein an interface is present between the electrode base shape and the nanotopography shape.