Cantilever microprobes for contacting electronic components

• US 10,788,512 B2
• Filed: 04/02/2019
• Issued: 09/29/2020
• Est. Priority Date: 02/04/2003
• Status: Active Grant

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Chen, Richard T., Kruglick, Ezekiel J. J., Bang, Christopher A., Smalley, Dennis R., Lembrikov, Pavel B.
• Primary Examiner(s): Tang, Minh N
• Application Number:
  US16/373,500
• Publication Number:
  US 20190227099A1
• Time in Patent Office: 546 Days
• CPC Class Codes: G01R 1/06727 Cantilever beams
• CPC Class Codes: G01R 1/06738 related to tip portion
• CPC Class Codes: G01R 1/07357 with flexible bodies, e.g. buckling beams

Abstract

Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such probe or cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.

Claims

1. A compliant probe for making contact with an electronic circuit element, the probe comprising:

a post element having a proximal end;

a cantilever portion comprising a solid section and a plurality of beam elements, the solid section having a first thickness greater than a thickness of any of the beam elements,

wherein the plurality of beam elements connect to the post element,

wherein the solid section connects a distal end of at least a first beam element to an intermediate portion of a second beam element,

wherein a connection element connects a distal end of the second beam element to a distal end of a third beam element; and

a contact portion functionally connects to the connection element,

wherein the plurality of beam elements are spaced by gap and are laterally extending.

2. The compliant probe of claim 1 wherein the plurality of beam elements comprises at least one beam element having a first length and at least one beam element having a second length, wherein the first and second lengths are different.

3. The compliant probe of claim 1 wherein the contact portion comprises a first material and wherein the cantilever portion comprises a second material, wherein the first and second materials are different.

4. The compliant probe of claim 1 wherein the post element and the cantilever portion comprise a plurality of adhered planar layers of metal.

5. The compliant probe of claim 4 wherein the cantilever portion provides for elastic compression in a plane of primary motion when making contact with an electronic circuit element and wherein planes of the adhered planar layers are parallel to the plane of primary motion.

6. A compliant probe for making contact with an electronic circuit element, the probe comprising:

a post element having a proximal end;

a cantilever portion comprising a solid section and a plurality of beam elements, the solid section having a first thickness greater than a thickness of any beam element of the plurality of beam elements and each beam element having a proximal end and a distal end, and the solid section connecting to the post element

wherein at least two beam elements of the plurality of beam elements functionally connect to the post element directly or via the solid section,

wherein a connection element connects to distal ends of the at least two beam elements of the plurality of beam elements,

wherein the solid section is spaced from the connection element by at least a a beam length and connects a proximal end of at least a plurality of beam elements; and

a contact portion functionally connects to the connection element,

wherein the plurality of beam elements are spaced by a gap and are laterally extending.

7. The compliant probe of claim 6 wherein at least one beam element of the plurality of beam elements comprises a first length and another of the at least two beam elements comprises a second length, wherein the first and second lengths are different.

8. The compliant probe of claim 6 wherein the contact portion comprises a first material and wherein the cantilever portion comprises a second material, wherein the first and second materials are different.

9. The compliant probe of claim 8 wherein the post element and the cantilever portion comprise a plurality of adhered planar layers of metal.

10. The compliant probe of claim 9 wherein the cantilever portion provides for elastic compression in a plane of primary motion when making contact with an electronic circuit element and wherein planes of the adhered planar layers are parallel to the plane of primary motion.