Array substrate and manufacturing method thereof, touch display panel, touch display apparatus

• US 10,788,913 B2
• Filed: 12/19/2018
• Issued: 09/29/2020
• Est. Priority Date: 01/11/2018
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd. (BOE Technology Group Co., Ltd.)
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Ma, Mingchao, Fan, Jun, Li, Fuqiang
• Primary Examiner(s): Karimi, Pegeman
• Application Number:
  US16/225,320
• Publication Number:
  US 20190212853A1
• Time in Patent Office: 650 Days
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/04164 Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
• CPC Class Codes: G06F 3/044 by capacitive means
• CPC Class Codes: G06F 3/0443 using a single layer of sensing electrodes
• CPC Class Codes: G06F 3/047 using sets of wires, e.g. crossed wires
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/127 with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement

Abstract

An array substrate includes: thin film transistors disposed on a base substrate; pixel electrodes disposed on a side of the thin film transistors facing away from the base substrate, each pixel electrode being coupled with a drain of a corresponding thin film transistor; common electrodes disposed on a side of the pixel electrodes facing away from the thin film transistors; and touch electrodes disposed on a side of the common electrodes facing away from the pixel electrodes, each touch electrode being coupled with a corresponding common electrode.

Claims

1. An array substrate, comprising:

thin film transistors disposed on a base substrate;

pixel electrodes disposed on a side of the thin film transistors facing away from the base substrate, each pixel electrode being coupled with a drain of a corresponding thin film transistor;

common electrodes disposed on a side of the pixel electrodes facing away from the thin film transistors;

touch electrodes disposed on a side of the common electrodes facing away from the pixel electrodes, each touch electrode being coupled with a corresponding common electrode;

at least one insulating planarization layer disposed between the thin film transistors and the pixel electrodes, wherein the at least one insulating planarization layer has via holes therein which correspond to drains of the thin film transistors respectively, and each pixel electrode is coupled with a drain of a corresponding thin film transistor through a corresponding via hole;

a first dielectric layer disposed between the pixel electrodes and the common electrodes; and

a second dielectric layer disposed between the common electrodes and the touch electrodes.

2. The array substrate according to claim 1, wherein

the at least one insulating planarization layer comprises a single insulating planarization layer, and a thickness of the insulating planarization layer is greater than or equal to 6 μ

m;

or

the at least one insulating planarization layer comprises a plurality of insulating planarization layers, and a total thickness of the plurality of insulating planarization layers is greater than or equal to 6 μ

m;

or

the at least one insulating planarization layer comprises a single insulating planarization layer, and a thickness of the insulating planarization layer is substantially greater than or equal to 6 μ

m;

or

the at least one insulating planarization layer comprises a plurality of insulating planarization layers, and a total thickness of the plurality of insulating planarization layers is substantially greater than or equal to 6 μ

m.

3. The array substrate according to claim 1, wherein

the at least one insulating planarization layer comprises a single insulating planarization layer, and a surface of the insulating planarization layer facing away from the base substrate is substantially flat;

or

the at least one insulating planarization layer comprises a plurality of insulating planarization layers, and a surface, which is facing away from the base substrate, of a first insulating planarization layer closest to the thin film transistors among the plurality of insulating planarization layers is substantially flat.

4. The array substrate according to claim 1, wherein, the at least one insulating planarization layer comprises two insulating planarization layers, a thickness of one of the two insulating planarization layers close to the thin film transistors is greater than or equal to 4 μ

m, and a thickness of another one of the two insulating planarization layers away from the thin film transistors ranges from 2 μ

m to 4 μ

m;

or

the at least one insulating planarization layer comprises two insulating planarization layers, a thickness of one of the two insulating planarization layers close to the thin film transistors is substantially greater than or equal to 4 μ

m, and a thickness of another one of the two insulating planarization layers away from the thin film transistors substantially ranges from 2 μ

m to 4 μ

m.

5. The array substrate according to claim 1, wherein, a material of the at least one insulating planarization layer is acrylic.

6. The array substrate according to claim 1, further comprising a protective layer disposed on a side of the touch electrodes facing away from the base substrate.

7. The array substrate according to claim 1, further comprising data lines disposed on the base substrate, wherein a source of each thin film transistor is coupled with a corresponding data line, and an orthogonal projection of each touch electrode on the base substrate is at least partially overlapped with an orthogonal projection of a corresponding data line on the base substrate.

8. The array substrate according to claim 7, wherein, except for a portion of each common electrode and a portion of a corresponding touch electrode that are coupled with each other, an orthogonal projection of the common electrode on the base substrate and an orthogonal projection of the touch electrode on the base substrate are non-overlapped.

9. The array substrate according to claim 1, wherein, the thin film transistors are low temperature poly-silicon thin film transistors.

10. The array substrate according to claim 1, wherein, a surface of the first dielectric layer facing away from the base substrate is substantially flat.

11. The array substrate according to claim 1, wherein, materials of the first dielectric layer and the second dielectric layer are inorganic.

12. A touch display panel, comprising the array substrate according to claim 1.

13. A touch display apparatus, comprising the touch display panel according to claim 12.

14. A manufacturing method of the array substrate according to claim 1, comprising:

providing a base substrate;

forming thin film transistors on the base substrate;

forming at least one insulating planarization layer and via holes in the at least one insulating planarization layer, wherein, the at least one insulating planarization layer is located on the thin film transistors, drains of the thin film transistors are exposed through the via holes formed in the at least one insulating planarization layer respectively;

forming pixel electrodes, each pixel electrodes being coupled with a drain of a corresponding thin film transistor through a corresponding via hole formed in the at least one insulating planarization layer;

forming a first dielectric layer;

forming common electrodes;

forming a second dielectric layer; and

forming touch electrodes, each touch electrode being coupled with a corresponding common electrode.

15. The manufacturing method of the array substrate according to claim 14, wherein the at least one the insulating planarization layer includes a plurality of insulating planarization layers, and forming at least one insulating planarization layer and via holes in the at least one insulating planarization layer, comprises:

depositing an insulating planarization layer;

forming via holes in the insulating planarization layer to expose drains respectively; and

repeating steps of depositing the insulating planarization layer and forming the via holes in the insulating planarization layer a plurality of times, wherein via holes formed in a latter insulating planarization layer are communicated with via holes formed in a previous insulating planarization layer respectively.

16. The manufacturing method of the array substrate according to claim 14, further comprising:

after forming the pixel electrodes, and before forming the common electrodes;

forming a first dielectric layer; and

after forming the common electrodes, and before forming the touch electrodes;

forming a second dielectric layer; and

after forming the touch electrodes;

forming a protective layer.