Lithium-containing transition metal oxide target
First Claim
1. A lithium-containing transition metal oxide-based cylindrical hollow target body adapted for use in a sputtering target assembly, said cylindrical hollow target body being suitable for bonding on a backing tube so to form said sputtering target assembly, said cylindrical hollow target body having a relative density value ≥
- 90.0%, and wherein said lithium-containing transition metal oxide consists of a metal oxide microstructure that contains a bimodal grain size distribution.
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Accused Products
Abstract
A process for the formation of an LiM02 (e.g., LiCoO2) sputtering target with a bi-modal grain size distribution (as in a hollow cylinder target body) that includes a CIP-based process involving, for example, forming or sourcing an LiMO2 (e.g., Li—CoO2) powder; dispersion and milling (e.g., wet milling); binder introduction; drying (e.g., spray drying) to form a granulate; CIP processing of the granulate into a molded shape; and a heating cycle for debinding and sintering to form a densified sintered shape. The target body produced is suited for inclusion on a sputtering target assembly (as in a rotary sputtering target assembly with a plurality of cylindrical target bodies attached to a backing support). The invention is inclusive of the resultant target bodies formed under the CIP based process as well as an induction heater based process for attachment (e.g., metal solder bonding) of the low conductivity target body(ies) of LiMO2 (e.g., LiCoO2) to a common backing support through use of an added conductive wrap or layer provided to the target body and heated with the induction heater during the attachment process.
13 Citations
43 Claims
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1. A lithium-containing transition metal oxide-based cylindrical hollow target body adapted for use in a sputtering target assembly, said cylindrical hollow target body being suitable for bonding on a backing tube so to form said sputtering target assembly, said cylindrical hollow target body having a relative density value ≥
- 90.0%, and wherein said lithium-containing transition metal oxide consists of a metal oxide microstructure that contains a bimodal grain size distribution.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 43)
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18. A process for manufacturing a lithium-containing transition metal oxide-based cylindrical hollow target body, comprising the following steps:
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providing a lithium-containing transition metal oxide material; providing an aqueous solution; contacting said lithium-containing transition metal oxide material and said aqueous solution under agitation so to form a slurry wherein said lithium-containing transition metal oxide material is dispersed in said aqueous solution; wet-milling said slurry; adding under agitation at least one binder in said slurry resulting in a homogenous slurry comprising said at least one binder; spray-drying said slurry comprising said at least one binder so to form a lithium-containing transition metal oxide-based granulate; and molding said lithium-containing transition metal oxide-based granulate in a hollow cylindrical-shaped mold under cold isostatic pressure (CIP) conditions so to form a molded body; heating said molded body so as to remove said at least one binder; and sintering, after said heating step, said molded body so to obtain the lithium-containing transition metal oxide cylindrical hollow target body consisting in a lithium transition metal oxide microstructure that contains a bimodal grain size distribution. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification