Sensor device, electronic equipment, and vehicle

• US 10,830,788 B2
• Filed: 02/16/2017
• Issued: 11/10/2020
• Est. Priority Date: 03/03/2016
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Matsuura, Yoshiyuki
• Primary Examiner(s): Zhong, Xin Y
• Application Number:
  US16/081,361
• Publication Number:
  US 20190025338A1
• Time in Patent Office: 1,363 Days
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure

Abstract

An acceleration sensor (sensor device) includes a substrate that includes a recessed portion (second recessed portion), a fixed electrode, and a dummy electrode juxtaposed with an insulating portion, and a movable body that is supported to be rockable by the substrate, in which the movable body includes a first region facing the fixed electrode, a second region facing a part of the dummy electrode, and a connecting portion connecting the first region and the second region to each other, the fixed electrode is provided with an extension electrode portion extending to a position facing the connecting portion, in a plan view of the movable body, at least a part of the extension electrode portion faces the connecting portion, and the insulating portion between the extension electrode portion and the dummy electrode faces the connecting portion inside the recessed portion.

Claims

1. A sensor device comprising:

a substrate that includes a first surface;

a recess that is provided in the first surface, the recess extending along a first direction;

a fixed electrode that is provided on the first surface;

a dummy electrode that is provided on the first surface, the dummy electrode being adjacent to the fixed electrode, the fixed electrode and the dummy electrode being arranged along a second direction perpendicular to the first direction;

an insulating portion that is provided on the first surface between the fixed electrode and the dummy electrode; and

a movable body that is spaced apart from the substrate and faces the first surface of the substrate, the movable body being configured with;

a support fixing the movable body to the substrate, the movable body being movable with respect to the substrate with the support as a fulcrum;

a first region facing the fixed electrode;

a second region partially facing the dummy electrode; and

a connector connecting between the first region and the second region,

wherein the fixed electrode is provided with an extension electrode, and the extension electrode extends from only an edge of the fixed electrode toward the dummy electrode along the second direction,

an end of the extension electrode and an end of the dummy electrode are spaced apart from each other via the insulating portion in a plan view,

the extension electrode partially faces the connector in the plan view, and the insulating portion that is located between the extension electrode and the dummy electrode faces the connector in the recess in the plan view, and

a center portion of the end of the dummy electrode along the first direction extends toward the edge of the fixed electrode and overlaps with the recess in the plan view.

2. The sensor device according to claim 1,

wherein a width in the first direction of the connector is narrower than widths in the first direction of the first region and the second region.

3. The sensor device according to claim 2,

wherein a plurality of the connectors are provided.

4. The sensor device according to claim 3,

wherein the connectors are respectively provided in both ends of the movable body in the first direction.

5. The sensor device according to claim 1,

wherein the movable body further has a groove,

the groove is provided at a position that is surrounded by edges of the first region, the second region, and the connector, and

wherein the groove overlaps with the insulating portion in the plan view.

6. The sensor device according to claim 5,

wherein the groove is by configured by one of a through hole penetrating from one surface to the other surface of the movable body or a bottomed groove in which an opening of the bottomed groove faces the first surface of the substrate.

7. An electronic apparatus comprising:

a display displaying an image;

a sensor device configured to detect a value corresponding to an external force applied to the electronic apparatus, the sensor device including;

a substrate that includes a first surface

a recess that is provided in the first surface, the recess extending along a first direction;

a fixed electrode that is provided on the first surface,

a dummy electrode that is provided on the first surface, the dummy electrode being adjacent to the fixed electrode, the fixed electrode and the dummy electrode being arranged along a second direction perpendicular to the first direction;

an insulating portion that is provided on the first surface between the fixed electrode and the dummy electrode; and

a movable body that is spaced apart from the substrate and faces the first surface of the substrate, the movable body being configured with;

a support fixing the movable body to the substrate, the movable body being movable with respect to the substrate with the support as a fulcrum;

a first region facing the fixed electrode;

a second region partially facing the dummy electrode; and

a connector connecting between the first region and the second region; and

a housing that houses the display and the sensor device,

wherein the fixed electrode is provided with an extension electrode, and the extension electrode extends from only an edge of the fixed electrode toward the dummy electrode along the second direction,

an end of the extension electrode and an end of the dummy electrode are spaced apart from each other via the insulating portion in a plan view,

the extension electrode partially faces the connector in the plan view, and the insulating portion that is located between the extension electrode and the dummy electrode faces the connector in the recess in the plan view, and

a center portion of the end of the dummy electrode along the first direction extends toward the edge of the fixed electrode and overlaps with the recess in the plan view.

8. A vehicle comprising:

a body;

an electronic control unit housed in the body; and

a sensor device disposed in the electronic control unit, the sensor device including;

a substrate that includes a first surface

a recess that is provided in the first surface, the recess extending along a first direction;

a fixed electrode that is provided on the first surface;

a dummy electrode that is provided on the first surface, the dummy electrode being adjacent to the fixed electrode, the fixed electrode and the dummy electrode being arranged along a second direction perpendicular to the first direction,

an insulating portion that is provided on the first surface between the fixed electrode and the dummy electrode; and

a movable body that is spaced apart from the substrate and faces the first surface of the substrate, the movable body being configured with;

a support fixing the movable body to the substrate, the movable body being movable with respect to the substrate with the support as a fulcrum;

a first region facing the fixed electrode;

a second region partially facing the dummy electrode; and

a connector connecting between the first region and the second region,

wherein the fixed electrode is provided with an extension electrode, and the extension electrode extends from only an edge of the fixed electrode toward the dummy electrode along the second direction,

an end of the extension electrode and an end of the dummy electrode are spaced apart from each other via the insulating portion in a plan view,

the extension electrode partially faces the connector in the plan view, and the insulating portion that is located between the extension electrode and the dummy electrode faces the connector in the recess in the plan view, and

a center portion of the end of the dummy electrode along the first direction extends toward the edge of the fixed electrode and overlaps with the recess in the plan view.