Device for detecting acoustic waves

• US 10,880,629 B2
• Filed: 12/14/2018
• Issued: 12/29/2020
• Est. Priority Date: 05/06/2016
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Dehe, Alfons, Tumpold, David, Onaran, Gueclue
• Primary Examiner(s): Ojo, Oyesola C
• Application Number:
  US16/219,992
• Publication Number:
  US 20190132661A1
• Time in Patent Office: 746 Days
• CPC Class Codes: G01N 29/02 Analysing fluids using acoustic emission techniques G01N29/14 ; constructional or flow details for analysing fluids G01N29/222; optoacoustic fluid cells G01N29/2425
• CPC Class Codes: G01N 29/2418 using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046
• CPC Class Codes: H04R 1/04 Structural association of microphone with electric circuitry therefor in deaf-aid sets H04R25/00
• CPC Class Codes: H04R 1/08 Mouthpieces; Microphones; Attachments therefor
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005
• CPC Class Codes: H04R 2201/029 Manufacturing aspects of enclosures transducers
• CPC Class Codes: H04R 2410/03 Reduction of intrinsic noise in microphones
• CPC Class Codes: H04R 2499/11 Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
• CPC Class Codes: H04R 29/004 for microphones H04R29/007 takes precedence
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182

Abstract

A device for detecting acoustic waves may include a housing having a housing wall with an inner surface, and an acoustic wave sensor provided at least partially inside the housing and configured to detect acoustic waves. The inner surface of the housing wall is made in at least half of its entire area of a thermally insulating material.

Claims

1. A device for detecting acoustic waves, comprising:

a housing including a housing wall, a substrate, and a lid opposite to the substrate, wherein the housing wall, the substrate, and the lid define an interior of the housing; and

an acoustic wave sensor mounted at least partially on an inner surface of the lid, the inner surface of the lid facing the substrate;

wherein the acoustic wave sensor is configured to detect acoustic waves,

wherein the housing wall comprises a layered portion comprising a plurality of layers stacked in a thickness direction of the housing wall, and

wherein the layered portion comprises an inner layer forming at least a part of an inner surface of the housing wall, and at least one outer layer positioned closer to an outer surface of the housing wall than the inner layer, and wherein the inner layer is made at least in part of a material which is optically transparent.

2. The device of claim 1, wherein the inner surface of the housing wall is made in at least half of its entire area of a thermally insulating material.

3. The device of claim 2,

wherein the thermal conductivity of the thermally insulating material is less than 20 W/(m·

K).

4. The device of claim 2,

wherein the inner surface of the housing wall is made in at least 70% of its entire area of the thermally insulating material.

5. The device of claim 1,

wherein at least one outer layer is made at least in part of a material having a higher thermal conductivity than the material of the inner layer;

wherein one outer layer forming at least a part of the outer surface of the housing wall has a higher thermal conductivity than the inner layer.

6. The device of claim 5,

wherein at least one outer layer is made at least in part of a metal.

7. The device of claim 1,

wherein the optically transparent material is optically transparent in at least one of the following frequency ranges:

the infrared frequency range;

the visible frequency range;

the ultraviolet frequency range.

8. The device of claim 7,

wherein the optically transparent material has a transmittance of at least 80% in at least one of the following frequency ranges:

the infrared frequency range;

the visible frequency range;

the ultraviolet frequency range.

9. The device of claim 1,

wherein the at least one outer layer is made at least in part of a material which is optically opaque.

10. The device of claim 9,

wherein the optically opaque material is optically opaque in at least one of the following frequency ranges:

the infrared frequency range;

the visible frequency range;

the ultraviolet frequency range.

11. The device of claim 10,

wherein the optically opaque material has a reflectance of at least 80% in at least one of the following frequency ranges:

the infrared frequency range;

the visible frequency range;

the ultraviolet frequency range.

12. The device of claim 1 further comprising:

an acoustic port provided in the lid.

13. The device of claim 12, wherein the acoustic sensor is mounted over the acoustic port.

14. The device of claim 1 further comprising:

an electronic circuit mounted on the inner surface of the lid,

wherein the electronic circuit is at least in part coated with a second thermally insulating substrate material.

15. The device of claim 1,

wherein the acoustic wave sensor is configured as a microphone.

16. The device of claim 1,

wherein the housing wall comprises an optically transparent window portion providing an optical port to the inside of the housing.

19. The device of claim 1, wherein the housing is configured to hold a gas in the interior of the housing.

17. A device for detecting acoustic waves, comprising:

a housing including a housing wall, a substrate, and a lid opposite to the substrate, wherein the housing wall, the substrate, and the lid define an interior of the housing; and

an acoustic wave sensor provided at least partially inside the housing and configured to detect acoustic waves, the acoustic wave sensor mounted on a first surface of the substrate facing the lid;

an acoustic port provided in the lid;

wherein the housing wall comprises a layered portion comprising a plurality of layers stacked in a thickness direction of the housing wall;

wherein the layered portion comprises an inner layer forming at least a part of the inner surface of the housing wall, and at least one outer layer positioned closer to an outer surface of the housing wall than the inner layer with the inner layer is made at least in part of a material which is optically transparent, and

wherein the lid comprises a layered portion.

18. The device of claim 17, wherein the housing is configured to hold a gas in the interior of the housing.