Dual zone common catch heat exchanger/chiller

• US 10,928,145 B2
• Filed: 03/08/2019
• Issued: 02/23/2021
• Est. Priority Date: 10/27/2011
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Silveira, Fernando, Mays, Brad L.
• Primary Examiner(s): Lu, Jiong-Ping
• Application Number:
  US16/297,474
• Publication Number:
  US 20190204032A1
• Time in Patent Office: 718 Days
• Field of Search: None
• CPC Class Codes: F28D 2021/0077 for tempering, e.g. with cooling or heating circuits for temperature control of elements
• CPC Class Codes: F28F 27/02 for controlling the distribution of heat-exchange media between different channels static flow control means in header boxes F28F9/026; arrangements of guide plates or guide vanes F28F9/22, F28F25/12
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 37/32724 Temperature

Abstract

Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a coupling each of the reservoirs to a common secondary reservoir. Heat transfer fluid is pumped from the secondary reservoir to either the hot or cold reservoir in response to a low level sensed in the reservoir. In an embodiment, both the hot and cold reservoirs are contained in a same platform as the secondary reservoir with the hot and cold reservoirs disposed above the secondary reservoir to permit the secondary reservoir to catch gravity driven overflow from either the hot or cold reservoir.

Claims

1. A method of controlling a temperature of a chuck in a plasma processing apparatus, the method comprising:

circulating a first heat transfer fluid at a first temperature through the chuck via a first supply line and a first return line coupling the chuck to a first primary heat transfer fluid reservoir;

circulating a second heat transfer fluid at a second temperature through the chuck via a second supply line and a second return line coupling the chuck to a second primary heat transfer fluid reservoir;

controlling a first valve disposed in-line with the first supply line and controlling a second valve disposed in-line with the second supply line; and

maintaining a level of the first primary heat transfer fluid reservoir by catching overflow by gravity from the first primary heat transfer fluid reservoir in a secondary reservoir, the overflow from gravity from above and directly over the secondary reservoir, and dispensing heat transfer fluid from the secondary reservoir to the first primary heat transfer fluid reservoir by a first replenish conduit separate from the first supply line and first return line in response to sensing a low level in the first primary heat transfer fluid reservoir.

2. The method of claim 1, wherein controlling the first valve further comprises modulating a pulse width modulation duty cycle driving the first valve between a fully open state and a fully closed state.

3. The method of claim 1, wherein controlling the second valve further comprises modulating a pulse width modulation duty cycle driving the second valve between a fully open state and a fully closed state, and wherein the first valve is to be in the off state when the second valve is in the on state.

4. The method of claim 1, further comprising maintaining a level of the second primary heat transfer fluid reservoir by catching overflow by gravity from the second primary heat transfer fluid reservoir in the secondary reservoir, the overflow from gravity from above and directly over the secondary reservoir, and dispensing heat transfer fluid from the secondary reservoir to the second primary heat transfer fluid reservoir by a second replenish conduit separate from the second supply line and second return line in response to sensing a low level in the second primary heat transfer fluid reservoir.

5. The method of claim 4, wherein catching overflow from the first primary heat transfer fluid reservoir in the secondary reservoir further comprises collecting gravity fed runoff from a drain disposed within the first primary heat transfer fluid reservoir, and wherein catching overflow from the second primary heat transfer fluid reservoir in the secondary reservoir further comprises collecting gravity fed runoff from a drain disposed within the second primary heat transfer fluid reservoir.

6. The method of claim 5, further comprising allowing the overflow from the first and second primary heat transfer fluid reservoirs to mix within the secondary reservoir.

7. The method of claim 4, wherein dispensing heat transfer fluid from the secondary reservoir to the first primary heat transfer fluid reservoir further comprises pumping the heat transfer fluid through the first replenish conduit coupling the secondary reservoir to the first primary heat transfer fluid reservoir.

8. The method of claim 7, wherein dispensing heat transfer fluid from the secondary reservoir to the second primary heat transfer fluid reservoir further comprises pumping the heat transfer fluid through the second replenish conduit coupling the secondary reservoir to the second primary heat transfer fluid reservoir.

9. The method of claim 8, wherein the pumping is performed by first and second pumps, the first pump coupled to the first replenish conduit and the second pump coupled to the second replenish conduit.

10. The method of claim 1, wherein dispensing heat transfer fluid from the secondary reservoir to the first primary heat transfer fluid reservoir further comprises pumping the heat transfer fluid through the first replenish conduit coupling the secondary reservoir to the first primary heat transfer fluid reservoir.

11. The method of claim 10, wherein the pumping is performed by a first pump.