Gate contact over active enabled by alternative spacer scheme and claw-shaped cap
First Claim
1. A method for forming a gate contact over active device, the method comprising the steps of:
- forming a device comprising metal gates over an active area of a wafer, and sources and drains on opposite sides of the gates offset from the gates by gate spacers;
recessing the metal gates and the gate spacers;
forming etch-selective spacers on top of the recessed gate spacers;
forming gate caps on top of the recessed metal gates in between the etch-selective spacers;
forming source and drain contacts on the sources and drains;
forming source and drain caps on top of the source and drain contacts, wherein the etch-selective spacers are present between the gate caps and the source and drain caps and provide etch selectivity to both the gate caps and the source and drain caps; and
forming a metal gate contact that extends through a given one of the gate caps, wherein the etch-selective spacers prevent gate-to-source drain shorting by the metal gate contact.
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Accused Products
Abstract
Gate contact over active layout designs are provided. In one aspect, a method for forming a gate contact over active device includes: forming a device including metal gates over an active area of a wafer, and source/drains on opposite sides of the metal gates offset by gate spacers; recessing the metal gates/gate spacers; forming etch-selective spacers on top of the recessed gate spacers; forming gate caps on top of the recessed metal gates; forming source/drain contacts on the source/drains; forming source/drain caps on top of the source/drain contacts, wherein the etch-selective spacers provide etch selectivity to the gate caps and source/drain caps; and forming a metal gate contact that extends through one of the gate caps, wherein the etch-selective spacers prevent gate-to-source drain shorting by the metal gate contact. Alternate etch-selective configurations are also provided including a claw-shaped source/drain cap design. A gate contact over active device is also provided.
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Citations
15 Claims
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1. A method for forming a gate contact over active device, the method comprising the steps of:
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forming a device comprising metal gates over an active area of a wafer, and sources and drains on opposite sides of the gates offset from the gates by gate spacers; recessing the metal gates and the gate spacers; forming etch-selective spacers on top of the recessed gate spacers; forming gate caps on top of the recessed metal gates in between the etch-selective spacers; forming source and drain contacts on the sources and drains; forming source and drain caps on top of the source and drain contacts, wherein the etch-selective spacers are present between the gate caps and the source and drain caps and provide etch selectivity to both the gate caps and the source and drain caps; and forming a metal gate contact that extends through a given one of the gate caps, wherein the etch-selective spacers prevent gate-to-source drain shorting by the metal gate contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A gate contact over active device, comprising:
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metal gates over an active area of a wafer; sources and drains on opposite sides of the metal gates offset from the metal gates by gate spacers; gate caps on top of the metal gates; an etch-selective material directly contacting a top surface of the gate spacers alongside the gate caps which provides etch selectivity to the gate caps; source and drain contacts on the sources and drains; source and drain caps on top of the source and drain contacts; and a metal gate contact that extends through a given one of the gate caps, wherein the etch-selective material prevents gate-to-source drain shorting by the metal gate contact. - View Dependent Claims (14, 15)
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Specification