Method for preparing invisible anodic aluminum oxide pattern

• US 10,947,634 B2
• Filed: 10/24/2018
• Issued: 03/16/2021
• Est. Priority Date: 10/24/2018
• Status: Active Grant

• Current Assignee: National Cheng KUNG University (Government of The Republic of China)
• Original Assignee: National Cheng KUNG University (Government of The Republic of China)
• Inventors: Chung, Chen-Kuei, Chen, Yun, Yu, Chung-Yu
• Primary Examiner(s): Wittenberg, Stefanie S
• Application Number:
  US16/169,051
• Publication Number:
  US 20200131659A1
• Time in Patent Office: 874 Days
• Field of Search: None
• CPC Class Codes: B01D 67/0065 by anodic oxidation
• CPC Class Codes: B01D 71/025 Aluminium oxide
• CPC Class Codes: C25D 11/022 Anodisation on selected surface areas
• CPC Class Codes: C25D 11/024 Anodisation under pulsed or modulated current or potential
• CPC Class Codes: C25D 11/045 for forming AAO templates
• CPC Class Codes: C25D 11/06 characterised by the electrolytes used
• CPC Class Codes: C25D 11/10 containing organic acids
• CPC Class Codes: C25D 11/12 Anodising more than once, e.g. in different baths
• CPC Class Codes: C25D 11/18 After-treatment, e.g. pore-sealing
• CPC Class Codes: C25D 11/24 Chemical after-treatment

Abstract

A method for preparing invisible anodic aluminum oxide (AAO) patterns is revealed. The method includes a plurality of steps. First take an aluminum substrate. Then anodize the aluminum substrate for the first time to get a first anodic aluminum oxide (AAO). Next perform photolithography so that a photoresist forms a pattern on the aluminum substrate with the first AAO. Lastly anodize the aluminum substrate for the second time so that a second AAO is formed on the pattern and the pattern becomes invisible.

Claims

1. A method for preparing invisible anodic aluminum oxide patterns comprising:

providing an aluminum substrate;

performing a first anodizing of the aluminum substrate to form a first anodic aluminum oxide (AAO) on a surface of the aluminum substrate, said first AAO having a first anodized surface;

defining a pattern on the first AAO by performing photolithography, said pattern having a first portion of the first AAO covered with a photoresist and a second portion of the first AAO free of the photoresist;

performing a second anodizing of the second portion of the first AAO free of the photoresist on the aluminum substrate to form a second AAO on the first AAO, said second AAO having a second anodized surface;

removing the photoresist from and exposing said first portion of the first AAO, thus establishing a first operational mode having said second anodized surface of the second AAO forming an invisible pattern with said first portion of the first AAO exposed upon removal of the photoresist; and

transferring said first operational mode into a second operational mode wherein the invisible pattern is rendered visible by at least one operational process selected from a group consisting of;

(a) annealing said invisible pattern, and subsequently exposing the annealed invisible pattern, to ultraviolet (UV) light;

or

(b) treating said invisible pattern by pore-widening, and subsequently performing droplet addition on the pore-widened invisible pattern.

2. The method as claimed in claim 1, further comprising:

performing the annealing of said invisible pattern in an annealing furnace at a temperature ranging between 200 degrees Celsius (°

C.) and 500°

C. for a duration of 3-6 hours.

3. The method as claimed in claim 2, further comprising:

performing the annealing of said invisible pattern at the temperature of 400°

C. for a duration of 3 hours.

4. The method as claimed in claim 1, further comprising:

during the pore-widening, immersing the aluminum substrate in a phosphoric acid solution.

5. The method as claimed in claim 4, wherein, during the pore-widening, the concentration of the phosphoric acid solution ranges from 1 wt % to 20 wt %, and the temperature of the phosphoric acid solution ranges from 10°

C. to 45°

C., and

the duration of the pore-widening of the invisible pattern ranges between 30 seconds and 1800 seconds.

6. The method as claimed in claim 1, further comprising:

electroplating a layer of a metal on the surface of the aluminum substrate after the pore-widening, wherein the metal is selected from the group consisting of platinum (Pt), aluminum (Al), silver (Ag), gold (Au), iron (Fe), nickel (Ni), cobalt (Co), chromium (Cr), titanium (Ti), tantalum, (Ta), copper (Cu), or a combination thereof.

7. The method as claimed in claim 1, further comprising:

electroplating a layer of metal or alloy with a reflectivity higher than 70% is on the surface of the aluminum substrate, wherein the thickness of the layer ranges from 5 nm to 25 nm.

8. The method as claimed in claim 1, wherein the aluminum substrate is selected from the group consisting of a pure aluminum substrate, an aluminized substrate and an aluminum alloy substrate.

9. The method as claimed in claim 1, further comprising:

applying a pulse voltage to the aluminum substrate for 30-500 seconds during the first anodizing, the pulse voltage being selected from a group consisting of a positive voltage ranging from 30 V to 120 V or a negative voltage ranging from −

2 V to −

4 V.

10. The method as claimed in claim 1, wherein the performance of the photolithography includes:

coating the photoresist on the aluminum substrate;

soft baking the photoresist at 70°

C. for 1 minute;

applying a photomask to the photoresist to define exposed and unexposed areas of the photoresist;

hard baking the photoresist at 120°

C. for 1 minute; and

applying a developer solution to wash away one of the exposed area of a positive photoresist or the unexposed area of a negative photoresist.

11. The method as claimed in claim 1, further comprising:

applying a pulse voltage to the aluminum substrate for 30-500 seconds during the second anodizing, the pulse voltage being selected from a group consisting of a positive voltage ranging from 30 V to 120 V or a negative voltage ranging from −

2 V to −

4 V.