Color filter substrate, fabricating method thereof, and display device

• US 10,948,761 B2
• Filed: 12/21/2018
• Issued: 03/16/2021
• Est. Priority Date: 01/15/2018
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd. (BOE Technology Group Co., Ltd.)
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Hui, Xiang, Zhao, Baojie, Lei, Xiaoran, Wang, Li, Zhao, Yan, Wang, Xiongwei, Li, Jian, Ma, Chunhong, Ma, Qinglin
• Primary Examiner(s): Parbadia, Balram T
• Application Number:
  US16/229,732
• Publication Number:
  US 20190219868A1
• Time in Patent Office: 816 Days
• CPC Class Codes: G02F 1/133516 Methods for their manufacture, e.g. printing, electro-deposition or photolithography
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G03F 7/0007 Filters, e.g. additive colour filters; Components for display devices
• CPC Class Codes: G03F 9/7084 Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels

Abstract

The present disclosure provides a color filter substrate including: a base substrate; and a filter layer on the base substrate and including a plurality of color resist units of a plurality of colors. Orthographic projections of adjacent color resist units of different colors on the base substrate have an overlapping region. Therefore, the color filter substrate has at least one of the following advantages: the structure is simple; the production cost is reduced; the aperture ratio of the display device including the color filter substrate is improved; and the defect caused by static electricity is solved.

Claims

1. A color filter substrate, comprising:

a base substrate; and

a filter layer on the base substrate and comprising a plurality of color resist units of a plurality of colors,

wherein orthographic projections of adjacent color resist units of different colors on the base substrate have an overlapping region; and

wherein the plurality of color resist units of the plurality of colors comprise a first color resist unit having a first color and a plurality of second color resist units having a plurality of colors, light transmittance of the first color resist unit is lower than light transmittances of the second color resist units, and an alignment mark is provided between two adjacent second color resist units having different colors.

2. The color filter substrate of claim 1, wherein for two adjacent color resist units of different colors, at least a part of a sidewall of each color resist unit close to the other color resist unit is an inclined surface, and orthographic projections of the respective inclined surfaces on the base substrate completely coincide.

3. The color filter substrate of claim 1, wherein an orthographic projection of the alignment mark on the base substrate covers the overlapping region of the orthographic projections of the two adjacent second color resist units having different colors on the base substrate.

4. The color filter substrate of claim 1, wherein the alignment mark and the first color resist unit are in a same layer and made of a same material, and a height of the alignment mark is smaller than a height of the first color resist unit.

5. The color filter substrate of claim 1, wherein a width K of the alignment mark satisfies:

K=L+2 μ

m, where L is a width of the overlapping region.

6. The color filter substrate of claim 1, wherein the plurality of color resist units comprise first color resist units and second color resist units arranged in a plurality of rows, and the second color resist units comprise color resist units of two colors.

7. The color filter substrate of claim 6, wherein in a direction perpendicular to a direction in which the plurality of color resist units are arranged, a cross section of the first color resist unit is a non-inverted trapezoid, and a cross section of the second color resist unit having a first color is an inverted trapezoid, and a cross section of the second color resist unit having a second color is a parallelogram.

8. The color filter substrate of claim 1, wherein the first color resist unit is a blue color resist unit, and the second color resist units comprise a red color resist unit and a green color resist unit.

9. A display device, comprising a color filter substrate, the color filter substrate comprising:

a base substrate; and

a filter layer on the base substrate and comprising a plurality of color resist units of a plurality of colors,

wherein orthographic projections of adjacent color resist units of different colors on the base substrate have an overlapping region; and

wherein the plurality of color resist units of the plurality of colors comprise a first color resist unit having a first color and a plurality of second color resist units having a plurality of colors, light transmittance of the first color resist unit is lower than light transmittances of the second color resist units, and an alignment mark is provided between two adjacent second color resist units having different colors.

10. The display device of claim 9, further comprising:

an array substrate assembled with the color filter substrate and provided with a plurality of gate lines and a plurality of data lines,

wherein an orthographic projection, on the array substrate, of at least one of the gate line and the data line is within an orthographic projection, on the array substrate, of the alignment mark on the color filter substrate.

11. The display device of claim 9, wherein the display device is a virtual reality display device.

12. A method for fabricating a color filter substrate, wherein the color filter substrate comprises:

a base substrate; and

a filter layer on the base substrate and comprising a plurality of color resist units of a plurality of colors, wherein orthographic projections of adjacent color resist units of different colors on the base substrate have an overlapping region, and the method comprises;

sequentially forming the plurality of color resist units of the plurality of colors on the base substrate,

wherein a boundary of the color resist unit previously formed determines a starting boundary of the color resist unit that is to be formed subsequently and adjacent to the color resist unit previously formed;

wherein the plurality of color resist units comprise a first color resist unit having a first color and a plurality of second color resist units having a plurality of colors, light transmittance of the first color resist unit is lower than light transmittances of the second color resist units, and sequentially forming the plurality of color resist units of the plurality of colors on the base substrate comprises;

forming, on the base substrate, the first color resist unit by a first patterning process; and

sequentially forming the second color resist units having the plurality of colors by patterning processes based on an edge of the first color resist unit wherein color resist units having a same color among the second color resist units are simultaneously formed through a same patterning process; and

the method further comprises;

forming an alignment mark, wherein the alignment mark is disposed between adjacent second color resist units of different colors that are subsequently formed, and in a step of sequentially forming the second color resist units, an edge, away from the first color resist unit, of the second color resist unit having a first color which is first formed is determined by the alignment mark.

13. The method of claim 12, wherein the plurality of color resist units comprise first color resist units and second color resist units arranged in a plurality of rows, and the second color resist units comprises color resist units of two colors;

forming, on the base substrate, the first color resist unit by the first patterning process comprises;

forming, on the base substrate, the first color resist units arranged in parallel by the first patterning process,

sequentially forming the second color resist units having the plurality of colors by patterning processes based on the edge of the first color resist unit comprises;

forming, based on edges of the first color resist units, a plurality of second color resist units having a first color and arranged in parallel by a second patterning process; and

forming, based on edges of the second color resist units having the first color away from the respective first color resist units, a plurality of second color resist units having a second color and arranged in parallel by a third patterning process.

14. The method of claim 13, wherein an exposure precision of an exposure process in the first patterning process for forming the first color resist unit is higher than an exposure precision of an exposure process in the patterning processes for forming the second color resist units.

15. The method of claim 12, wherein an orthographic projection of the alignment mark on the base substrate covers an overlapping region of orthographic projections of two adjacent second color resist units having different colors on the base substrate.

16. The method of claim 12, wherein the alignment mark and the first color resist unit are synchronously formed by the first patterning process.

17. The method of claim 12, wherein a width K of the alignment mark satisfies:

K=L+2 μ

m, where L is a width of an overlapping region of adjacent second color resist units having different colors and on opposite sides of the alignment mark.