Photoacoustic measurement systems and methods using the photoacoustic effect to measure emission intensities, gas concentrations, and distances

• US 10,996,201 B2
• Filed: 12/20/2018
• Issued: 05/04/2021
• Est. Priority Date: 12/21/2017
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Eberl, Matthias, Jost, Franz
• Primary Examiner(s): Caputo, Lisa M
• Assistant Examiner(s): Plumb, Nigel H
• Application Number:
  US16/227,950
• Publication Number:
  US 20190195834A1
• Time in Patent Office: 866 Days
• Field of Search: None
• CPC Class Codes: G01J 1/1626 Arrangements with two photodetectors, the signals of which are compared
• CPC Class Codes: G01J 1/42 using electric radiation detectors optical or mechanical part G01J1/04; by comparison with a reference light or electric value G01J1/10
• CPC Class Codes: G01J 2001/4242 Modulated light, e.g. for synchronizing source and detector circuit
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 2291/021 Gases
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 29/2425 optoacoustic fluid cells therefor
• CPC Class Codes: G01N 29/46 by spectral analysis, e.g. Fourier analysis or wavelet analysis spectral signal processing per se G06F17/14

Abstract

An apparatus containing an optical emitter configured to emit optical radiation is provided. Further, the apparatus includes a first hermetically sealed measurement cell filled with a first gas. The first gas is configured to absorb the optical radiation at least partially at one or more predetermined wavelengths. Additionally, the apparatus includes a first microphone arranged in the measurement cell and configured to generate a first microphone signal on a basis of a photoacoustic excitation of the first gas by the optical radiation. The apparatus moreover includes an evaluation circuit configured to take the first microphone signal as a basis for generating a first measurement signal indicating an emission intensity of the optical emitter at the one or more predetermined wavelengths.

Claims

1. An apparatus, comprising:

an optical emitter configured to emit optical radiation;

a first hermetically sealed measurement cell filled with a first gas, the first gas configured to absorb the optical radiation at least partially at one or more predetermined wavelengths;

a first microphone arranged in the first measurement cell and configured to generate a first microphone signal on a basis of a photoacoustic excitation of the first gas by the optical radiation; and

an evaluation circuit configured to take the first microphone signal as a basis for generating a first measurement signal indicating an emission intensity of the optical emitter at the one or more predetermined wavelengths.

2. The apparatus as claimed in claim 1, wherein:

the optical radiation comprises infrared radiation, and

the first gas is configured to absorb the infrared radiation at least partially.

3. The apparatus as claimed in claim 1, wherein a vacuum or a gaseous atmosphere that does not absorb the optical radiation at the one or more predetermined wavelengths prevails in a space between the optical emitter and the first measurement cell.

4. The apparatus as claimed in claim 1, wherein the optical emitter is arranged in the first measurement cell.

5. The apparatus as claimed in claim 1, further comprising:

a second hermetically sealed measurement cell filled with a second gas, the second gas being configured to absorb the optical radiation at the one or more predetermined wavelengths;

a first area, filled with a gas to be examined, that is arranged between the optical emitter and the second measurement cell; and

a second microphone arranged in the second measurement cell and configured to generate a second microphone signal on the basis of a photoacoustic excitation of the second gas by the optical radiation,

wherein the evaluation circuit is further configured to take the second microphone signal and the first microphone signal as a basis for generating a second measurement signal indicating a concentration of the gas to be examined in the first area.

6. The apparatus as claimed in claim 5, wherein the first measurement cell is arranged between the optical emitter and the first area filled with the gas to be examined.

7. The apparatus as claimed in claim 5, wherein the first measurement cell is arranged in a first spatial direction as seen from the optical emitter and the second measurement cell is arranged in a second spatial direction, which is different than the first spatial direction, as seen from the optical emitter.

8. The apparatus as claimed in claim 5, wherein the first gas and the second gas have a same chemical composition.

9. The apparatus as claimed in claim 5, wherein a concentration of the first gas in the first measurement cell is lower than a concentration of the second gas in the second measurement cell.

10. The apparatus as claimed in claim 5, further comprising:

a third hermetically sealed measurement cell filled with a third gas, the third gas being configured to absorb the optical radiation at the one or more predetermined wavelengths;

a second area, filled with the gas to be examined, that is arranged between the second measurement cell and the third measurement cell; and

a third microphone arranged in the third measurement cell and configured to generate a third microphone signal on the basis of a photoacoustic excitation of the third gas by the optical radiation,

wherein the evaluation circuit is further configured to take the third microphone signal and the second measurement signal as a basis for generating a third measurement signal indicating a distance between the second measurement cell and the third measurement cell.

11. The apparatus as claimed in claim 10, wherein the evaluation circuit is further configured to take the second microphone signal and the third measurement signal as a basis for generating a fourth measurement signal indicating a concentration of the gas to be examined in the second area.

12. The apparatus as claimed in claim 10, wherein the first gas and the third gas have a same chemical composition.

13. The apparatus as claimed in claim 1, wherein the first microphone signal is representative of an absorption by only the first gas such that it is directly correlated to the absorption by the first gas.

14. An apparatus, comprising:

a first optical emitter configured to emit first optical radiation at a first time;

a second optical emitter configured to emit second optical radiation at a second time;

at least two hermetically sealed measurement cells arranged in series between the first and the second optical emitters and each filled with a gas configured to absorb the first optical radiation and the second optical radiation at one or more predetermined wavelengths in each case, each of the at least two hermetically sealed measurement cells having a respective microphone arranged therein that is configured to generate a respective microphone signal of a plurality of microphone signals on the basis of a photoacoustic excitation of the gas in the respective measurement cell by the first optical radiation or the second optical radiation;

at least one area, filled with a gas to be examined, that is arranged between the at least two hermetically sealed measurement cells; and

an evaluation circuit configured to determine an emission intensity of the first optical emitter at the one or more predetermined wavelengths based on a change in a first microphone signal of the plurality of microphone signals after the first time and to determine an emission intensity of the second optical emitter at the one or more predetermined wavelengths based on a change in a second microphone signal of the plurality of microphone signals after the second time.

15. The apparatus as claimed in claim 14, wherein the evaluation circuit is further configured to determine a concentration of the gas to be examined in the at least one area based on changes in the plurality of microphone signals after the first time and changes in the plurality of microphone signals after the second time.

16. The apparatus as claimed in claim 14, wherein:

the at least two hermetically sealed measurement cells includes three hermetically sealed measurement cells arranged in series between the first and the second optical emitters,

the at least one area includes two areas filled with the gas to be examined that are arranged between different pairs of the three hermetically sealed measurement cells, and

the evaluation circuit is further configured to determine at least one interval between successive measurement cells of the three hermetically sealed measurement cells based on changes in the plurality of microphone signals after the first time and changes in the plurality of microphone signals after the second time.

17. A method, comprising:

emitting optical radiation by means of an optical emitter;

absorbing the optical radiation at one or more predetermined wavelengths by a first gas in a first hermetically sealed measurement cell;

generating a first microphone signal on a basis of a photoacoustic excitation of the first gas by the optical radiation by a first microphone arranged in the first hermetically sealed measurement cell; and

generating a first measurement signal, indicating an emission intensity of the optical emitter at the one or more predetermined wavelengths, based on the first microphone signal.

18. The method as claimed in claim 17, further comprising:

absorbing the optical radiation at the one or more predetermined wavelengths by a second gas in a second hermetically sealed measurement cell, a first area filled with a gas to be examined being arranged between the optical emitter and the second hermetically sealed measurement cell;

generating a second microphone signal on a basis of a photoacoustic excitation of the second gas by the optical radiation by a second microphone arranged in the second measurement cell; and

generating a second measurement signal, indicating a concentration of the gas to be examined in the first area, based on the second microphone signal and the first microphone signal.

19. The method as claimed in claim 18, further comprising:

absorbing the optical radiation at the one or more predetermined wavelengths by a third gas in a third hermetically sealed measurement cell, a second area filled with the gas to be examined being arranged between the second hermetically sealed measurement cell and the third hermetically sealed measurement cell;

generating a third microphone signal on a basis of a photoacoustic excitation of the third gas by the optical radiation by a third microphone arranged in the third measurement cell; and

generating a third measurement signal, indicating a distance between the second hermetically sealed measurement cell and the third hermetically sealed measurement cell, based on the third microphone signal and the second measurement signal.

20. The method as claimed in claim 19, further comprising:

generating a fourth measurement signal, indicating a concentration of the gas to be examined in the second area, based on the second microphone signal and the third measurement signal.

21. A method, comprising:

emitting first optical radiation at a first time by a first optical emitter;

emitting second optical radiation at a second time by a second optical emitter;

absorbing the first optical radiation and the second optical radiation at one or more predetermined wavelengths by a gas in at least two hermetically sealed measurement cells, the at least two hermetically sealed measurement cells being arranged in series between the first and the second optical emitters, and at least one area filled with a gas to be examined being arranged between the at least two hermetically sealed measurement cells;

generating, for each of the at least two hermetically sealed measurement cells, a respective microphone signal on a basis of a photoacoustic excitation of the gas in a respective measurement cell of the at least two hermetically sealed measurement cells by the first optical radiation or the second optical radiation by a microphone arranged in the respective measurement cell;

determining an emission intensity of the first optical emitter at the one or more predetermined wavelengths based on a change in a first microphone signal after the first time, the first microphone signal being the respective microphone signal derived from a first one of the at least two hermetically sealed measurement cells; and

determining an emission intensity of the second optical emitter at the one or more predetermined wavelengths based on a change in a second microphone signal after the second time, the second microphone signal being the respective microphone signal derived from a second one of the at least two hermetically sealed measurement cells.