Turbo molecular pump for mass spectrometer

• US 11,037,773 B2
• Filed: 07/29/2019
• Issued: 06/15/2021
• Est. Priority Date: 08/14/2018
• Status: Active Grant

• Current Assignee: Bruker Daltonik GmbH (Bruker Corporation)
• Original Assignee: Bruker Daltonik GmbH (Bruker Corporation)
• Inventors: Steiner, Urs, Franzen, Jochen
• Primary Examiner(s): Bertheaud, Peter J
• Assistant Examiner(s): Lee, Geoffrey S
• Application Number:
  US16/525,165
• Publication Number:
  US 20200058479A1
• Time in Patent Office: 687 Days
• Field of Search: None
• CPC Class Codes: B22F 5/04 of turbine blades
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: F04D 17/02 having non-centrifugal stages, e.g. centripetal
• CPC Class Codes: F04D 17/025 comprising axial flow and radial flow stages
• CPC Class Codes: F04D 19/042 Turbomolecular vacuum pumps
• CPC Class Codes: F04D 25/12 the unit being adapted for mounting in apertures
• CPC Class Codes: F04D 25/16 Combinations of two or more pumps ; Producing two or more separate gas flows
• CPC Class Codes: F04D 29/284 for compressors
• CPC Class Codes: F04D 29/321 for axial flow compressors
• CPC Class Codes: F04D 29/384 characterised by form
• CPC Class Codes: F05D 2300/121 Aluminium
• CPC Class Codes: F05D 2300/125 Magnesium
• CPC Class Codes: F05D 2300/133 Titanium
• CPC Class Codes: H01J 49/0422 for gaseous samples interfaces to gas chromatographs G01N30/7206
• CPC Class Codes: H01J 49/24 Vacuum systems, e.g. maintaining desired pressures
• CPC Class Codes: H01J 49/26 Mass spectrometers or separator tubes

Abstract

The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form factor and makes it well suited, in particular, for compact mass spectrometers and desk-top mass spectrometers.

Claims

1. A turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the at least one rotor stage is substantially accommodated within or substantially resides inside the stationary frame structure, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, wherein the central shaft receiving member, the first rotor blade portion and the second rotor blade portion are designed and configured such that there is a substantially free path between the second rotor blade portion and the central shaft receiving member for gaseous matter deflected substantially radially inwards.

2. The turbo molecular pump of claim 1, wherein the rotor blades in the first rotor blade portion are inclined in relation to a first plane perpendicular to the central shaft receiving member, and wherein the rotor blades in the second rotor blade portion are inclined in relation to a substantially hollow-cylindrical envelope contour defined by the second rotor blade portion.

3. The turbo molecular pump of claim 1, wherein adjacent rotor blades in at least one of the first rotor blade portion and second rotor blade portion substantially overlap each other such that there is no direct line of sight from inside to outside so as to prevent gaseous matter having entered the inside from escaping or otherwise leaving, except in a direction towards the high pressure output region.

4. The turbo molecular pump of claim 1, further comprising a ring-like support structure that connects the distal ends of the rotor blades in the second rotor blade portion in order to enhance mechanical stability.

5. The turbo molecular pump of claim 1, wherein the rotor blades in the second rotor blade portion comprise rounded edges at a point of connection to the rotor blades in the first rotor blade portion.

6. The turbo molecular pump of claim 1, wherein the first rotor blade portion transitions into the second rotor blade portion.

7. The turbo molecular pump of claim 1, wherein a paraxial extension of the second rotor blade portion is equal to or greater than a radial extension of the first rotor blade portion.

8. The turbo molecular pump of claim 1, wherein the central shaft receiving member comprises a hollow receptacle for accommodating a drive shaft which enables setting the central shaft receiving member in rotation.

9. The turbo molecular pump of claim 1, wherein the central shaft receiving member flares from the high pressure output region to the low pressure input region, at least section-wise, in order to impart the gaseous matter deflected substantially radially inwards from the second rotor blade portion an additional momentum in a direction toward the high pressure output region.

10. The turbo molecular pump of claim 1, wherein the rotor blades in the second rotor blade portion are helically distorted along a substantially hollow-cylindrical envelope contour defined by the second rotor blade portion in order to deflect the gaseous matter from the second rotor blade portion both substantially paraxially and radially inwards.

11. The turbo molecular pump of claim 1, wherein the rotor in the at least one rotor stage is produced from stable metals or alloys thereof.

12. The turbo molecular pump of claim 11, wherein the rotor in the at least one rotor stage is produced from aluminum, magnesium, titanium or alloys thereof.

13. The turbo molecular pump of claim 1, further comprising, in a multi-port configuration, a second rotor stage at a position spaced apart from the low pressure input region, which second rotor stage is of similar configuration as the at least one rotor stage located at the low pressure input region.

14. The turbo molecular pump of claim 1, wherein a number of rotor blades in at least one of the first rotor blade portion and second rotor blade portion is odd in order to reduce resonant vibrations.

15. A turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, further comprising a third rotor blade portion which extends substantially radially outward from the central shaft receiving member and connects to the second rotor blade portion at a position between the low pressure input region and high pressure output region axially offset from the first rotor blade portion, in order to enhance mechanical stability, wherein, during operation, the third rotor blade portion deflects gaseous matter substantially paraxially.

16. The turbo molecular pump of claim 15, wherein the rotor blades in the third rotor blade portion are inclined in relation to a second plane perpendicular to the central shaft receiving member.

17. The turbo molecular pump of claim 15, wherein a number of rotor blades in at least one of the first rotor blade portion, second rotor blade portion and third rotor blade portion is odd in order to reduce resonant vibrations.

18. The turbo molecular pump of claim 15, wherein adjacent rotor blades in at least one of the first rotor blade portion, second rotor blade portion and third rotor blade portion substantially overlap each other such that there is no direct line of sight from inside to outside so as to prevent gaseous matter having entered the inside from escaping or otherwise leaving, except in a direction towards the high pressure output region.

19. A mass spectrometer, comprising:

a recipient which has at least one compartment that, during operation, is to be maintained at a pressure substantially lower than ambient atmospheric pressure, and

a turbo molecular pump comprising a stationary frame structure and at least one rotor stage located at a low pressure input region, wherein the at least one rotor stage is substantially accommodated within or substantially resides inside the stationary frame structure, wherein the rotor in the at least one rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, wherein the central shaft receiving member, the first rotor blade portion and the second rotor blade portion are designed and configured such that there is a substantially free path between the second rotor blade portion and the central shaft receiving member for gaseous matter deflected substantially radially inwards, and

wherein the turbo molecular pump is mounted at the at least one compartment such that the second rotor blade portion substantially protrudes into the at least one compartment.

20. The mass spectrometer of claim 19, wherein the at least one compartment contains at least one mass analyzer or at least one source of gas, and the second rotor blade portion protrudes such as to be directly exposed to gaseous matter escaping or otherwise leaving the at least one mass analyzer and emanating from the at least one source of gas, respectively.

21. The mass spectrometer of claim 19, wherein the at least one compartment contains at least one of a time-of-flight drift tube, Kingdon-type mass analyzer, 2D or 3D ion trap, mass filter and an ion cyclotron resonance cell.

22. A mass spectrometer, comprising:

a recipient which has at least two adjacent compartments that, during operation, are to be maintained at pressures substantially lower than ambient atmospheric pressure, and

a turbo molecular pump of multi-port configuration comprising a stationary frame structure and at least a first rotor stage located at a low pressure input region, wherein the at least one rotor stage is substantially accommodated within or substantially resides inside the stationary frame structure, wherein the rotor in the first rotor stage rotates about an axis with respect to the stationary frame structure during operation and has an axially aligned central shaft receiving member from which a first rotor blade portion extends substantially radially outward and is connected to a second rotor blade portion which extends substantially paraxially to, and along the central shaft receiving member towards a high pressure output region, wherein, during operation, the first and second rotor blade portions deflect gaseous matter substantially paraxially and radially inwards, wherein the central shaft receiving member, the first rotor blade portion and the second rotor blade portion are designed and configured such that there is a substantially free path between the second rotor blade portion and the central shaft receiving member for gaseous matter deflected substantially radially inwards, and comprising a second rotor stage at a position spaced apart from the low pressure input region, which second rotor stage is of similar configuration as the first rotor stage located at the low pressure input region,

wherein the turbo molecular pump of multi-port configuration is mounted at the at least two adjacent compartments such that the second rotor blade portion substantially protrudes into a first one of the at least two adjacent compartments and the second rotor stage is fluidically connected to a second one of the at least two adjacent compartments.