Method for reducing defects of electronic components by a supercritical fluid

• US 11,101,141 B2
• Filed: 07/15/2019
• Issued: 08/24/2021
• Est. Priority Date: 01/12/2017
• Status: Active Grant

• Current Assignee: National Sun Yat-sen University
• Original Assignee: National Sun Yat-Sen University KZ
• Inventors: Chang, Ting-Chang, Chang, Kuan-Chang, Shih, Chih-Cheng, Pan, Chih-Hung
• Primary Examiner(s): Qi, Hua
• Application Number:
  US16/511,396
• Publication Number:
  US 20190341267A1
• Time in Patent Office: 771 Days
• CPC Class Codes: H01L 21/045 passivating silicon carbide surfaces
• CPC Class Codes: H01L 21/26 Bombardment with radiation H01L21/3105 takes precedence
• CPC Class Codes: H01L 21/322 to modify their internal properties, e.g. to produce internal imperfections
• CPC Class Codes: H01L 21/3228 of AIIIBV compounds, e.g. to make them semi-insulating
• CPC Class Codes: H01L 29/1608 Silicon carbide
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 29/66068 the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
• CPC Class Codes: H01L 29/66734 with a step of recessing the gate electrode, e.g. to form a trench gate electrode
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236
• CPC Class Codes: H01L 31/1872 Recrystallisation
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A method for reducing defects of an electronic component using a supercritical fluid includes recrystallizing and rearranging grains in the electronic component by introducing the supercritical fluid doped with H₂S together with an electromagnetic wave into a cavity. The cavity has a temperature above a critical temperature of the supercritical fluid and a pressure above a critical pressure of the supercritical fluid.

Claims

1. A method for reducing defects of an electronic component using a supercritical carbon dioxide fluid, comprising:

recrystallizing and rearranging grains in a material layer of the electronic component by introducing the supercritical carbon dioxide fluid doped with H₂S together with an electromagnetic wave into a cavity having a temperature above a critical temperature of the supercritical carbon dioxide fluid and a pressure above a critical pressure of the supercritical carbon dioxide fluid;

wherein the electronic component is a gas sensor.

2. The method for reducing defects of the electronic component using the supercritical carbon dioxide fluid as claimed in claim 1, wherein the cavity has the temperature of 77-1000 K.

3. The method for reducing defects of the electronic component using the supercritical carbon dioxide fluid as claimed in claim 1, wherein the cavity has the pressure of 3-1000 atm.