DEPOSITED RESISTIVE COATINGS

• US 20010003336A1
• Filed: 05/06/1998
• Published: 06/14/2001
• Est. Priority Date: 05/06/1997
• Status: Active Grant

• Current Assignee: Regal Ware Incorporated
• Original Assignee: Thermoceramix, Inc. (ThermoCeramix Corp.)
• Inventors: ABBOTT, RICHARD C., MAGNANT, GARY P., SANDVEN, OLE, COREY, GEORGE
• Granted Patent: US 6,762,396 B2
• Time in Patent Office: Days
• US Class Current: 219/543
• CPC Class Codes: B29C 45/73 of the mould B29C45/2642 and B29C45/2737 take precedence
• CPC Class Codes: F27D 11/02 Ohmic resistance heating
• CPC Class Codes: H05B 2203/009 Heaters using conductive material in contact with opposing surfaces of the resistive element or resistive layer
• CPC Class Codes: H05B 2203/011 Heaters using laterally extending conductive material as connecting means
• CPC Class Codes: H05B 2203/013 Heaters using resistive films or coatings
• CPC Class Codes: H05B 2203/017 Manufacturing methods or apparatus for heaters
• CPC Class Codes: H05B 2203/018 Heaters using heating elements comprising mosi2
• CPC Class Codes: H05B 3/141 Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
• CPC Class Codes: H05B 3/26 heating conductor mounted on insulating base for transparent areas H05B3/84, H05B3/86

Abstract

The present invention involves coatings deposited on a substrate including a layer having a selected resistivity. The resistive layer can serve as a heat source in a variety of applications and can be fabricated using an arc plasma spraying procedure.

Claims

1. A heater comprising:

a substrate; and

a resistive heating layer coated on the substrate, the resistive heating layer including an electrically-insulating composition mixed with an electrically-conducting composition, the electrically-insulating composition having a higher electrical resistance than the electrically-conducting composition and including a third composition.

2. The heater of

claim 1

wherein the resistive heating layer has the microstructure of a thermal-sprayed coating.

3. The heater of

claim 1

, further comprising a voltage source electrically coupled to the resistive heating layer.

4. The heater of

claim 1

, wherein the third material comprises an additive that enhances a material property of the resistive heating layer.

5. The heater of

claim 1

, wherein the substrate is a ceramic.

6. The heater of

claim 1

, wherein the electrically-insulating composition and the electrically-conducting composition are ceramic.

7. The heater of

claim 1

wherein the third material comprises a thermal conductor.

8. The heater of

claim 1

wherein the third material comprises a conductive metal.

9. The heater of

claim 1

wherein the heater comprises a nozzle.

10. The heater of

claim 1

wherein the heater comprises a tubular body that heats material within the body.

11. A method for making a heater comprising the steps of:

mixing an electrically-conducting composition with an electrically-insulating composition and a third material to form a mixture;

thermal spraying the mixture onto a substrate; and

forming a heater with the sprayed mixture.

12. The method of

claim 11

further comprising forming a bonding layer between the substrate and the heater.

13. The method of

claim 11

wherein the forming step further comprises removing the substrate from the thermal sprayed mixture.

14. The method of

claim 11

wherein the third material comprises a second electrical insulating layer.

15. The method of

claim 11

further comprising forming a heat reflecting layer.

16. The method of

claim 11

further comprising forming a rapid thermal heater for a semiconductor processing system.

17. The method of

claim 11

further comprising forming a resistive heating layer comprising a composition selected from the group consisting of silicon carbide, molybdenum disilicide, lanthanum chromate, zirconium diboride, and titanium diboride.

18. The method of

claim 11

wherein the thermal spraying step comprises plasma spraying a plurality of layers of the mixture.

19. A thermal sprayed resistive heater comprising:

a resistive heating layer including a first electrically-insulating material mixed with a second electrically-conducting material, the electrically-insulating composition having a higher electrical resistance than the electrically-conducting composition, and including a third material; and

a voltage source electrically coupled to the resistive heating layer.

20. The heater of

claim 19

wherein the electrically-insulating material and the electrically-conducting material are ceramic.