Vacuum processing apparatus for semiconductor process

• US 20010006094A1
• Filed: 12/20/2000
• Published: 07/05/2001
• Est. Priority Date: 12/22/1999
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Tanaka, Yoshitsugu, Amano, Kenji
• Granted Patent: US 6,565,662 B2
• Time in Patent Office: Days
• US Class Current: 156/345.1
• CPC Class Codes: H01J 37/32458 Vessel
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

A plasma etching apparatus includes a process container formed of a container main body and an upper casing combined with each other. A detaching device is provided to move the upper casing between a mounted position where the upper casing is put on the container main body, and a retreated position where the upper casing is removed from the container main body. The detaching device supports the upper casing to be rotatable, movable up and down, and movable in a lateral direction, relative to the container main body. The retreated position is arranged such that the upper casing does not interfere with the container main body when the upper casing is rotated there.

Claims

1. A vacuum processing apparatus for a semiconductor process, comprising:

a process container forming an airtight process chamber, and comprising a container main body and an upper cover detachably disposed on the container main body;

a supporting member configured to support a target substrate in the process chamber;

a gas supply system configured to supply a process gas into the process chamber;

an exhaust system configured to exhaust the process chamber and set the process chamber at a vacuum; and

a detaching device configured to attach/detach the upper cover relative to the container main body, the detaching device comprising a rotational mechanism configured to rotatably support the upper cover, an up-and-down movement mechanism configured to support the rotational mechanism and the upper cover to be movable up and down, and a lateral movement mechanism configured to support the up-and-down movement mechanism, the rotational mechanism, and the upper cover to be movable in a lateral direction.

2. The apparatus according to

claim 1

, wherein the rotational mechanism comprises a pair of standing frames, which support rotational axis shafts connected to opposite two portions on sidewalls of the upper cover.

3. The apparatus according to

claim 2

, wherein the lateral movement mechanism comprises a pair of guide rails configured to guide the standing frames in the lateral direction, the guide rails extending in the lateral direction and disposed parallel to each other with the container main body interposed therebetween.

4. The apparatus according to

claim 2

, wherein the up-and-down movement mechanism comprises standing guides configured to guide the standing frames up and down, and base frames supporting the standing guides and supported by guide rails.

5. The apparatus according to

claim 1

, wherein the lateral movement mechanism is configured to allow the upper cover to be moved up to a retreated position where the upper cover does not interfere with the container main body when the upper cover is rotated by the rotational mechanism.

6. The apparatus according to

claim 5

, wherein the lateral movement mechanism is configured to allow the upper cover to be moved by a distance more than a length of the upper cover in the lateral direction.

7. The apparatus according to

claim 5

, wherein the lateral movement mechanism comprises a pair of guide rails extending in the lateral direction and disposed parallel to each other with the container main body interposed therebetween, each of the guide rails comprising a primary portion facing a side of the container main body, and a secondary portion extending beyond the container main body in the lateral direction, the secondary portion being foldable toward a side of the container main body.

8. The apparatus according to

claim 1

, wherein the lateral direction is a horizontal direction.

9. The apparatus according to

claim 1

, wherein the container main body and the upper cover are joined to each other at a position on a wall forming the process chamber, with a seal member interposed therebetween.

10. The apparatus according to

claim 9

, wherein the support member comprises a worktable on which the target substrate is mounted in the process chamber, the worktable being attached to the container main body.

11. The apparatus according to

claim 9

, wherein the gas supply system comprises a showerhead including a plurality of gas spouting holes disposed in the process chamber, the showerhead being attached to the upper cover.

12. A vacuum processing apparatus for a semiconductor process, comprising:

a process container forming an airtight process chamber, and comprising a lower casing and an upper casing detachably joined to each other at a position on a wall forming the process chamber;

a seal member interposed between the lower casing and the upper casing;

a worktable on which the target substrate is mounted in the process chamber, the worktable being attached to the lower casing;

a gas supply system configured to supply a process gas into the process chamber, and comprising a showerhead including a plurality of gas spouting holes disposed in the process chamber, the showerhead being attached to the upper casing;

an exhaust system configured to exhaust the process chamber and set the process chamber at a vacuum; and

a detaching device configured to move the upper casing between a mounted position where the upper casing is put on the lower casing, and a retreated position where the upper casing is removed from the lower casing, the detaching device supporting the upper casing to be rotatable, movable up and down, and movable in a lateral direction, relative to the lower casing, such that the upper casing does not interfere with the lower casing when the upper casing is rotated at the retreated position.

13. The apparatus according to

claim 12

, wherein the detaching device comprises an elevating driver configured to move the upper casing up and down.

14. The apparatus according to

claim 12

, wherein the detaching device comprises a rotational driver configured to rotate the upper casing, and a lateral driver configured to move the upper casing in the lateral direction.

15. The apparatus according to

claim 13

, wherein the detaching device comprises a pair of standing frames, which support rotational axis shafts connected to opposite two portions on sidewalls of the upper casing.

16. The apparatus according to

claim 12

, wherein the detaching device comprises a pair of guide rails configured to guide the upper casing in the lateral direction, the guide rails extending in the lateral direction and disposed parallel to each other with the lower casing interposed therebetween.

17. The apparatus according to

claim 16

, wherein each of the guide rails comprises a primary portion facing a side of the lower casing, and a secondary portion extending beyond the lower casing in the lateral direction, the secondary portion being foldable toward a side of the lower casing.