Method for patterning thin films
First Claim
1. A method of making an imaged surface comprising:
- A. providing a substrate having a coating and an interface comprising the region where the coating and the substrate are closest to each other;
B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy sufficient to disrupt the interface but insufficient to ablate the coating, and C. removing tie parts of the coating in registry with the portions of the interface area that was disrupted.
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Accused Products
Abstract
Patterned articles, such as RFID antenna, are made by subablation, a process comprising the steps of:
A. providing a substrate having a coating, such as a metal or metal oxide, and an interface comprising the thin region where the coating and the substrate are closest to each other;
B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy, Such as a focused excimer laser beam, sufficient to disrupt the interface but insufficient to ablate the coating, and
C. removing the parts of the coating in registry with the portion of the interface area that was disrupted, by means such as ultrasonic agitation.
The process has advantages over photo-resist processes in that there is no residual chemical resist left on the product and no undercutting of the pattern or image. It has advantages over laser ablation processes in that higher throughput is possible at the same energy level and there is no microscopic debris left on the product surface.
44 Citations
19 Claims
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1. A method of making an imaged surface comprising:
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A. providing a substrate having a coating and an interface comprising the region where the coating and the substrate are closest to each other;
B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy sufficient to disrupt the interface but insufficient to ablate the coating, and C. removing tie parts of the coating in registry with the portions of the interface area that was disrupted. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An optic train comprising the following components arranged in the order stated:
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A. a beam shaper comprising two half cylindrical lenses with a focal length of at least 20 millimeters;
B. a homogenizer oriented to homogenize a beam orthogonally to the direction of shaping effected by the beam shaper; and
C. a cylindrical lens. - View Dependent Claims (16)
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17. An imaged article comprising a polymeric substrate bearing a patterned image characterized by a substantial absence of
A. heat distortion; -
B. debris comprising the material of which the image is made or decomposition products of such material;
C. photo-resist; and
D. undercut of the image. - View Dependent Claims (18, 19)
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Specification