Pressure sensor
First Claim
1. A pressure sensor comprising a capacitor having a first capacitor pole element and a second capacitor pole element, which are arranged at a distance from one another, wherein at least one of said first and second capacitor pole elements has at least one textured region on the surface of its conductive components facing toward the other capacitor pole element, and wherein the distance between the first and second capacitor pole elements is different in the textured region than in a region adjacent to the textured region, and wherein the difference between the distance between the first and second capacitor pole elements in the textured region and the region adjacent to the textured region is adapted to change by deformation of at least one of said first and second capacitor pole elements when the capacitor is subjected to pressure.
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Accused Products
Abstract
The present invention relates to a pressure sensor comprising a capacitor with a first capacitor pole element (1) and at least one additional capacitor pole element (3) arranged at a distance from one another. In accordance with the invention, at least one capacitor pole element (1, 3) has at least one textured region (31, 31′ and/or 32, 32′) on the surface of its conductive components facing toward the other capacitor pole element (3, 1), and the distance between the two capacitor pole elements (1,3) is different in the textured region (31,31′ and/or 32; 32′) than in an adjacent region (32, 32′ and/or 31, 31′) to the textured region (31; 31′ and/or 32,32′). The difference between these two different distances can be changed—more particularly, reduced—by deformation of at least one capacitor pole element (1,3) when the capacitor is subjected to pressure.
4 Citations
23 Claims
- 1. A pressure sensor comprising a capacitor having a first capacitor pole element and a second capacitor pole element, which are arranged at a distance from one another, wherein at least one of said first and second capacitor pole elements has at least one textured region on the surface of its conductive components facing toward the other capacitor pole element, and wherein the distance between the first and second capacitor pole elements is different in the textured region than in a region adjacent to the textured region, and wherein the difference between the distance between the first and second capacitor pole elements in the textured region and the region adjacent to the textured region is adapted to change by deformation of at least one of said first and second capacitor pole elements when the capacitor is subjected to pressure.
- 2. A pressure sensor comprising a first capacitor pole element, a second capacitor pole element, and an electrically nonconductive insulating device, of which at least part is arranged between the two first and second capacitor pole elements, wherein at least one capacitor pole element in at least one section of its surface facing the other capacitor pole element is spaced apart from the insulating device, and wherein the section is adapted to be moved toward the insulating device through flexible deformation of the respective capacitor pole element by subjecting the pressure sensor to pressure.
- 3. A pressure sensor comprising a first capacitor pole element, a second capacitor pole element, and an electrically nonconductive insulating device, of which at least part is arranged between the two first and second capacitor pole elements, wherein at least one capacitor pole element has on a surface of its electrically conductive components facing toward the other capacitor pole element, at least one textured region having an associated normal height (H), and wherein the normal height (H) is adapted to be reduced to a detection height (h) through flexible deformation of the respective capacitor pole element when the pressure sensor is subjected to pressure.
Specification