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Pressure sensor

  • US 20010020714A1
  • Filed: 03/09/2001
  • Published: 09/13/2001
  • Est. Priority Date: 03/10/2000
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising a capacitor having a first capacitor pole element and a second capacitor pole element, which are arranged at a distance from one another, wherein at least one of said first and second capacitor pole elements has at least one textured region on the surface of its conductive components facing toward the other capacitor pole element, and wherein the distance between the first and second capacitor pole elements is different in the textured region than in a region adjacent to the textured region, and wherein the difference between the distance between the first and second capacitor pole elements in the textured region and the region adjacent to the textured region is adapted to change by deformation of at least one of said first and second capacitor pole elements when the capacitor is subjected to pressure.

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