Polishing apparatus

• US 20010044266A1
• Filed: 05/16/2001
• Published: 11/22/2001
• Est. Priority Date: 05/16/2000
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation, Mitsubishi Materials Corporation
• Inventors: Katsuoka, Seiji, Sekimoto, Masahiko, Fujimoto, Kenji, Chiba, Kazuki, Miyazaki, Mitsuru, Noji, Naoki
• Granted Patent: US 6,629,883 B2
• Time in Patent Office: Days
• US Class Current: 451/66
• CPC Class Codes: B24B 37/345 Feeding, loading or unloading work specially adapted to lapping
• CPC Class Codes: B24B 41/061 axially supporting turning workpieces, e.g. magnetically, pneumatically
• CPC Class Codes: H01L 21/67219 comprising at least one polishing chamber polishing apparatuses B24B
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A multi-head type polishing apparatus has a plurality of top rings for holding workpieces with respect to a single polishing table. A polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces, and a pusher for transferring the workpieces between the rotary transporter and the top rings.

Claims

1. A polishing apparatus having a multi-head, comprising:

a polishing table having a polishing surface;

a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface;

a carousel for supporting said top rings and indexing said top rings;

a rotary transporter disposed in a position which can be accessed by said top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of said rotary transporter for holding the workpieces, said rotary transporter having an indexing function for indexing said plurality of portions; and

a pusher for transferring the workpieces between said rotary transporter and said top rings.

2. A polishing apparatus according to

claim 1

, wherein each of said top rings is connected to a carousel through a swing arm, and is angularly movable by said swing arm to a polishing position on said polishing table and a loading and unloading position on said rotary transporter.

3. A polishing apparatus according to

claim 1

, further comprising a second polishing table provided adjacent to said polishing table;

wherein when each of said top rings is located at a predetermined position, said each of said top rings can access said second polishing table.

4. A polishing apparatus according to

claim 3

, wherein said each of said top rings is connected to said carousel through a swing arm, and is angularly movable by said swing arm to access said second polishing table.

5. A polishing apparatus according to

claim 1

, wherein each of said top rings is connected to said carousel through a swing arm, and is angularly movable by said swing arm to an overhanging position in which the workpiece which has been polished projects from said polishing surface to cause a part of a polished surface of the workpiece to be exposed.

6. A polishing apparatus according to

claim 1

, further comprising a reversing device for transferring the workpieces to and from said rotary transporter and reversing the workpieces.

7. A polishing apparatus according to

claim 6

, wherein said reversing device is positioned above or below said rotary transporter, and transfer of the workpiece between said reversing device and said rotary transporter is conducted by a lifter which holds the workpiece and is vertically movable.

8. A polishing apparatus having a multi-head, comprising:

a polishing table having a polishing surface;

a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface;

a carousel for supporting said top rings and indexing said top rings;

a plurality of cleaning apparatuses for cleaning the workpieces which have been polished;

a transfer mechanism for transferring said polished workpieces between said cleaning apparatuses; and

a workpiece station having workpiece trays for holding the workpieces in a standby state while the workpieces are cleaned in a plurality of stages through said cleaning apparatuses or before the workpieces are cleaned.

9. A polishing apparatus according to

claim 8

, further comprising a cassette for housing a plurality of workpieces, said workpiece station being disposed between said polishing table and said cassette for holding the workpieces to be polished in a standby state before the workpieces to be polished are transferred to said polishing table.

10. A polishing apparatus according to

claim 8

, wherein said workpiece station has a workpiece tray for holding at least one dummy workpiece used for running in the polishing apparatus before polishing regular workpieces.

11. A polishing apparatus comprising:

a pair of polishing units, the polishing unit comprising;

a polishing table having a polishing surface;

a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface; and

a carousel for supporting said top rings and indexing said top rings;

a pair of rotary transporters, the rotary transporter being disposed in a position which can be accessed by said top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of said rotary transporter for holding the workpieces, said rotary transporter having an indexing function for indexing said plurality of portions; and

a pair of pushers, the pusher being adapted for transferring the workpieces between said rotary transporter and said top rings.

12. A polishing apparatus according to

claim 11

, wherein each of said top rings is connected to a carousel through a swing arm, and is angularly movable by said swing arm to a polishing position on said polishing table and a loading and unloading position on said rotary transporter.

13. A polishing apparatus according to

claim 11

, further comprising a second polishing table provided adjacent to said polishing table;

wherein when each of said top rings is located at a predetermined position, said each of said top rings can access said second polishing table.

14. A polishing apparatus according to

claim 13

, wherein said each of said top rings is connected to said carousel through a swing arm, and is angularly movable by said swing arm to access said second polishing table.

15. A polishing apparatus according to

claim 11

, wherein each of said top rings is connected to said carousel through a swing arm, and is angularly movable by said swing arm to an overhanging position in which the workpiece which has been polished projects from said polishing surface to cause a part of a polished surface of the workpiece to be exposed.

16. A polishing apparatus according to

claim 11

, further comprising a reversing device for transferring the workpieces to and from said rotary transporter and reversing the workpieces.

17. A polishing apparatus according to

claim 16

, wherein said reversing device is positioned above or below said rotary transporter, and transfer of the workpiece between said reversing device and said rotary transporter is conducted by a lifter which holds the workpiece and is vertically movable.