Laser beam shaping device and apparatus for material machining
First Claim
1. A laser beam homogenizer and material machining apparatus for machining a surface of a work piece said device comprising:
- a laser beam source said beam having a given energy distribution across said beam;
a controllable reflecting means for controlling said energy distribution of said laser beam, said means comprising;
multiple individual reflecting surfaces for reflecting a portion of said laser beam, each of which is capable of responding to a separate control signal;
a mounting surface upon which said multiple individual reflecting surfaces are mounted; and
, a flexible reflecting surface actuator means for connecting said multiple individual reflecting surfaces to said mounting surface said reflecting surface actuator means being changeable in position in response to varying control signal;
energy distribution monitoring means for monitoring said energy distribution of said beam; and
, reflecting surface control means for controlling said position of said reflecting surface actuator means based on said output signal from said energy distribution monitoring means, whereby said given energy distribution of said beam may be changed according to a preselected program.
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Accused Products
Abstract
A programmable apparatus for laser beam shaping including a preprogrammable mircomirror array produces a spatial energy distribution suitable for accurately and rapidly marking, machining and processing materials. The preprogrammed micromirror array redistributes the laser output beam energy to produce a desired two-dimensional machining pattern on a work piece. The energy pattern created by the preprogrammed micromirror array is changeable between successive pulses of the laser to create accurate, complex three-dimensional machined shapes in a work piece not easily achieved by conventional machining systems. A special application of this invention is laser beam shaping to produce a uniform spatial energy distribution, i.e. homogenizing the beam from a laser with non-uniform energy distribution. Continuous adjustment of beam shaping is provided to maintain beam homogenization in accordance with changes in laser beam output energy profile.
34 Citations
20 Claims
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1. A laser beam homogenizer and material machining apparatus for machining a surface of a work piece said device comprising:
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a laser beam source said beam having a given energy distribution across said beam;
a controllable reflecting means for controlling said energy distribution of said laser beam, said means comprising;
multiple individual reflecting surfaces for reflecting a portion of said laser beam, each of which is capable of responding to a separate control signal;
a mounting surface upon which said multiple individual reflecting surfaces are mounted; and
,a flexible reflecting surface actuator means for connecting said multiple individual reflecting surfaces to said mounting surface said reflecting surface actuator means being changeable in position in response to varying control signal;
energy distribution monitoring means for monitoring said energy distribution of said beam; and
,reflecting surface control means for controlling said position of said reflecting surface actuator means based on said output signal from said energy distribution monitoring means, whereby said given energy distribution of said beam may be changed according to a preselected program. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for laser beam homogenization and material machining for machining a surface of a work piece, said method consisting of the steps of:
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a. generating a laser beam said beam having a given energy distribution across said beam;
b. directing said laser beam at a controllable reflecting means for controlling said energy distribution of said laser beam, said controllable reflecting means including multiple individual reflecting surfaces for reflecting a portion of said laser beam, each of which is capable of responding to a separate control signal;
a mounting surface upon which said multiple individual reflecting surfaces are mounted; and
, a flexible reflecting surface actuator means for connecting said multiple individual reflecting surfaces to said mounting surface said reflecting surface actuator means being changeable in position in response to varying control signal;
c. monitoring said energy distribution of said beam; and
,d. controlling said position of said reflecting surface actuator means based on the result of monitoring said energy distribution, whereby said given energy distribution of said beam may be changed according to a preselected program. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification