Process for manufacturing integrated chemical microreactors of semiconductor material
First Claim
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1. An integrated microreactor comprising:
- a semiconductor material body having a surface;
a buried channel extending in said semiconductor material body at a distance from said surface, and having a first and a second ends;
first and second trenches extending from said surface respectively as far as said first and second ends of said buried channel, and being in fluid connection with said buried channel; and
a reservoir region, extending above said surface and defining a first and a second reservoirs connected to said first and second trenches.
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Abstract
The microreactor is completely integrated and is formed by a semiconductor body having a surface and housing at least one buried channel accessible from the surface of the semiconductor body through two trenches. A heating element extends above the surface over the channel and a resist region extends above the heating element and defines an inlet reservoir and an outlet reservoir. The reservoirs are connected to the trenches and have, in cross-section, a larger area than the trenches. The outlet reservoir has a larger area than the inlet reservoir. A sensing electrode extends above the surface and inside the outlet reservoir.
51 Citations
32 Claims
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1. An integrated microreactor comprising:
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a semiconductor material body having a surface;
a buried channel extending in said semiconductor material body at a distance from said surface, and having a first and a second ends;
first and second trenches extending from said surface respectively as far as said first and second ends of said buried channel, and being in fluid connection with said buried channel; and
a reservoir region, extending above said surface and defining a first and a second reservoirs connected to said first and second trenches. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A structure comprising:
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a semiconductor material body;
a buried channel formed in the semiconductor material body and at a distance from the surface of the semiconductor material body. a first reservoir, formed on the surface of the semiconductor material body;
a first trench, formed on the semiconductor material body, extending from the first reservoir to a first end of the buried channel;
a second trench formed on the semiconductor material body, extending from the surface of the semiconductor material body to a second end of the buried channel; and
a heating element, formed on the semiconductor material body adjacent to the buried channel. - View Dependent Claims (12, 13, 14, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 27, 28, 29, 30, 31, 32)
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15. A process for the fabrication of an integrated microreactor, comprising:
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forming a semiconductor material body having a surface and a buried channel extending at a distance from said surface and having first and second ends;
forming first and second trenches extending from said surface as far as, respectively, said first and said second ends of said buried channel and being in fluid connection with said buried channel; and
above said surface, forming first and second reservoirs respectively connected to said first and second trenches in a reservoir layer of a first resist.
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25. A method, comprising:
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introducing a fluid from a first reservoir into a first trench, the first reservoir and first trench being integrated in a semiconductor body;
introducing the fluid from the first trench into a buried channel, the buried channel extending in a semiconductor material body at a distance from a surface of the semiconductor material body, the first trench extending from the reservoir on the surface of the semiconductor material body to a first end of the buried channel;
heating the fluid within the buried channel; and
cooling the fluid within the buried channel.
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Specification