Piezoelectric micro-transducers, methods of use and manufacturing methods for the same
First Claim
1. A micro-transducer comprising:
- a first membrane;
a second membrane comprising a first electrode, a second electrode, and a piezoelectric member disposed therebetween;
a fluid-tight cavity cooperatively formed between the first and second membranes; and
a working fluid disposed in the cavity.
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Accused Products
Abstract
Various micro-transducers incorporating piezoelectric materials for converting energy in one form to useful energy in another form are disclosed. In one embodiment, a piezoelectric micro-transducer can be operated either as a micro-heat engine, converting thermal energy into electrical energy, or as a micro-heat pump, consuming electrical energy to transfer thermal energy from a low-temperature heat source to a high-temperature heat sink. In another embodiment, a piezoelectric micro-transducer is used to convert the kinetic energy of an oscillating or vibrating body on which the micro-transducer is placed into useful electrical energy. A piezoelectric micro-transducer also is used to extract work from a pressurized stream of fluid. Also disclosed are a micro-internal combustion engine and a micro-heat engine based on the Rankine cycle in which a single fluid serves as a working fluid and a fuel.
162 Citations
74 Claims
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1. A micro-transducer comprising:
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a first membrane;
a second membrane comprising a first electrode, a second electrode, and a piezoelectric member disposed therebetween;
a fluid-tight cavity cooperatively formed between the first and second membranes; and
a working fluid disposed in the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micro-transducer comprising:
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a first layer;
a second layer having piezoelectric properties and joined to the first layer so as to form a fluid-tight cavity therebetween; and
a working fluid contained within the cavity;
wherein thermal energy flowing into the micro-transducer causes the working fluid to expand, thereby distending the second layer for generating an electrical charge. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 17, 18, 19, 20, 21)
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16. A structure having a plurality of micro-transducers, the structure comprising:
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a first major layer;
a second major layer juxtaposed to the first layer;
a plurality of fluid-tight cavities cooperatively formed between the first and second major layers;
a working fluid contained in the cavities;
a plurality of first electrodes carried by the first major layer at each of said cavities;
a plurality of piezoelectric members carried by the first electrodes at each of said cavities; and
a plurality of second electrodes carried by the piezoelectric members at each of said cavities.
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22. A method for constructing a micro-transducer, the method comprising:
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(a) providing a first substrate and a second substrate;
(b) adding a first metallic layer, a piezoelectric layer, and a second metallic layer to the first substrate;
(c) forming a cavity between the first substrate and the second substrate;
(d) introducing a working fluid into the cavity; and
(e) joining together the first substrate and the second substrate so as to seal the fluid in the cavity. - View Dependent Claims (23, 24, 25, 26, 27, 28, 30, 31, 32, 33, 35, 36, 37, 38, 39, 40)
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29. A method for constructing a plurality micro-transducers, the method comprising:
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providing a first substrate and a second substrate;
forming a plurality of generator members on the first substrate, each generator member comprising a first electrode, a piezoelectric layer, and a second electrode;
forming a plurality of cavities between the first and second substrates;
introducing a working fluid into the cavities; and
joining together the first substrate and the second substrate so as to form a plurality of micro-transducers.
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34. A method of generating electrical energy with a micro-transducer having a chamber for a fluid, wherein a surface of the chamber comprises a piezoelectric generator, the method comprising:
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introducing a fluid into the chamber; and
expanding the fluid to cause the piezoelectric generator to distend outwardly from the chamber, thereby causing the piezoelectric generator to generate electrical energy.
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41. A micro-transducer comprising:
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a support structure;
a piezoelectric generator coupled to the support structure and being deflectable relative to the support structure; and
a mass carried by the piezoelectric generator at a position to decrease the resonant mechanical frequency of the piezoelectric generator;
wherein deflection of the piezoelectric generator relative to the support structure causes the piezoelectric generator to generate an electric charge. - View Dependent Claims (42, 43, 44, 45, 46, 47, 49, 50, 51, 52, 53)
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48. A method of converting kinetic energy to electrical energy with a piezoelectric generator, the method comprising:
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coupling the piezoelectric generator to an oscillable body so that the piezoelectric generator is movable relative to the body, wherein the oscillations of the body causes the piezoelectric generator to oscillate, and thus generate an electric charge; and
conduct the electric charge from the piezoelectric generator.
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54. A piezoelectric apparatus for generating electrical energy, comprising:
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a first substrate;
a plurality of cantilevers formed in the first substrate; and
a respective piezoelectric unit disposed on each cantilever. - View Dependent Claims (55, 56, 57, 58, 60, 61, 62, 63, 64)
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59. An apparatus for generating an electric current, comprising:
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a support structure;
a piezoelectric generator coupled to the support structure and being deflectable relative to the support structure; and
a fluid that, when flowing under pressure, causes the piezoelectric generator to deflect and thus, generate an electric charge.
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65. A piezoelectric micro-transducer comprising:
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a support member defining a plane; and
a cantilevered piezoelectric unit having a first end and an opposing second end, the first end coupled to the support member, the second end being deflectable relative to the support member, and the piezoelectric unit being pre-stressed so that it is curved away from the plane of the support member. - View Dependent Claims (66, 67, 68, 69, 70, 71)
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72. An assembly for generating electrical power, comprising:
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a source of a pressurized working fluid/fuel;
a boiler for heating the working fluid/fuel, the working fluid/fuel also serving as the fuel for the boiler;
a first piezoelectric generator positioned downstream of the boiler and configured to generate an electric charge when deflected by working fluid/fuel flowing from the boiler; and
a combustor positioned downstream of the first piezoelectric generator and configured to burn working fluid/fuel flowing from the first piezoelectric generator for heating working fuel/fluid in the boiler. - View Dependent Claims (73, 74)
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Specification