Method of manufacturing capacitor in semiconductor devices
First Claim
1. A method of manufacturing a capacitor in semiconductor devices, the method comprising:
- forming a silicon oxide film on a surface of a silicon substrate;
forming a nitride film on said silicon oxide film;
forming a contact hole by sequentially etching a portion of said nitride film and said silicon oxide film;
depositing a doped polysilicon layer over the entire surface of said silicon substrate, said doped polysilicon layer filling said contact hole;
performing an etch-back process to remove a portion of said doped polysilicon layer, said etch-back process leaving said doped polysilicon layer in said contact hole;
forming an ohmic contact layer over said doped polysilicon layer in said contact hole;
forming an anti-diffusion film on said ohmic contact layer;
forming a silicate glass film over the entire surface of said silicon substrate including said anti-diffusion film;
forming a concave hole by etching a portion of said silicate glass film, said concave hole having an internal wall;
forming a first electrode on said internal wall of said concave hole;
forming a BST dielectric film on said first Ruthenium electrode, said forming said BST dielectric sequentially including performing a NH3-plasma process, performing a N2O-plasma process, and depositing BST;
crystallizing said BST dielectric film, said crystallizing including performing a rapid thermal process;
forming a second electrode on said BST dielectric film, said BST dielectric film and said first and second electrodes forming a capacitor; and
performing a thermal treatment to stabilize said capacitor.
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Accused Products
Abstract
A method of manufacturing a capacitor in semiconductor devices, the method comprising forming a silicon oxide film on a surface of a silicon substrate; forming a nitride film on said silicon oxide film; forming a contact hole; depositing a doped polysilicon layer; performing an etch-back process to remove a portion of said doped polysilicon layer; forming an ohmic contact layer over said doped polysilicon layer in said contact hole; forming an anti-diffusion film on said ohmic contact layer; forming a silicate glass film; forming a concave hole by etching a portion of said silicate glass film; forming a Ruthenium lower electrode on said internal wall of said concave hole; forming a BST dielectric film on said first Ruthenium electrode; crystallizing said BST dielectric film; forming an upper electrode on said BST dielectric film, thereby forming a capacitor; and performing a thermal treatment to stabilize said capacitor.
4 Citations
16 Claims
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1. A method of manufacturing a capacitor in semiconductor devices, the method comprising:
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forming a silicon oxide film on a surface of a silicon substrate;
forming a nitride film on said silicon oxide film;
forming a contact hole by sequentially etching a portion of said nitride film and said silicon oxide film;
depositing a doped polysilicon layer over the entire surface of said silicon substrate, said doped polysilicon layer filling said contact hole;
performing an etch-back process to remove a portion of said doped polysilicon layer, said etch-back process leaving said doped polysilicon layer in said contact hole;
forming an ohmic contact layer over said doped polysilicon layer in said contact hole;
forming an anti-diffusion film on said ohmic contact layer;
forming a silicate glass film over the entire surface of said silicon substrate including said anti-diffusion film;
forming a concave hole by etching a portion of said silicate glass film, said concave hole having an internal wall;
forming a first electrode on said internal wall of said concave hole;
forming a BST dielectric film on said first Ruthenium electrode, said forming said BST dielectric sequentially including performing a NH3-plasma process, performing a N2O-plasma process, and depositing BST;
crystallizing said BST dielectric film, said crystallizing including performing a rapid thermal process;
forming a second electrode on said BST dielectric film, said BST dielectric film and said first and second electrodes forming a capacitor; and
performing a thermal treatment to stabilize said capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification