Double arm substrate transport unit

  • US 20020066330A1
  • Filed: 11/16/2001
  • Published: 06/06/2002
  • Est. Priority Date: 11/17/2000
  • Status: Active Grant
First Claim
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1. A double arm substrate transport unit for transporting a work piece such as a semiconductor wafer, a substrate for a photomask or a glass substrate for a liquid crystal display by using a robotic hand, characterized by the robotic hand comprising:

  • a base arm supported by a base so as to be freely rotatable;

    a first forearm supported by the tip part of the above base arm so as to be freely rotatable;

    a first end effector supported by the tip part of the first forearm so as to be freely rotatable on which a work piece is placed;

    a second forearm supported by the tip part of the base arm so as to be freely rotatable that is attached above the first forearm; and

    a second end effector supported by the tip part of the second forearm so as to be freely rotatable, on which a work piece is placed.

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