Continuous feed coater

• US 20020069826A1
• Filed: 09/15/2001
• Published: 06/13/2002
• Est. Priority Date: 09/15/2000
• Status: Active Grant

• Current Assignee: Shipley Company, LLC (Dow, Inc.)
• Original Assignee: Shipley Company, LLC (Dow, Inc.)
• Inventors: Oljaca, Miodrag, Hunt, Andrew T., Hwang, Tzyy-Jiuan Jan, Reardon, Edward J., Neilson, Wayne, Bane, David E., Huggins, James D., Xue, Yibin, Campbell, Ian H., Danielson, William D. Jr.
• Granted Patent: US 6,869,484 B2
• Time in Patent Office: Days
• US Class Current: 118/718
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/453 passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD C23C16/513 takes precedence; for flame or plasma spraying of coating material in the molten state C23C4/00
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/45585 Compression of gas before it reaches the substrate
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/545 for coating elongated substrates

Abstract

A continuous feed coater for coating a length of substrate with vaporized or sprayed material, is disclosed. A specific example is a roll-to-roll coater which includes two lower supply rollers for supporting two webs of uncoated material, and two upper take-up rollers for supporting the webs after they are coated. A central web-support forms a plenum that acts as a deposition chimney or chamber by bringing the two webs into close proximity to each other to form two large walls of the plenum. The ends of the webs are sealed using side dams to form the chimney with a rectangular cross section such that the vapor cannot exit from the edges of the material. The vaporized coating constituents to be deposited on the rolled material are directed into the deposition plenum from a coating material supply source located at the bottom of the plenum, and are exhausted through the top of the plenum. By providing a plenum having two large surface area walls formed of the material to be coated, an extremely efficient coating system is provided. The top of the plenum includes an exhaust system with an orifice plate with a plurality of orifices spaced across the width of the deposition plenum. These orifices restrict gas exhaust to provide the gas and vapor residence time for the materials being used. By further controlling the orifices relative to each other, the differential pressure across the width of the chamber can be controlled to further provide an even coating across the width of the two webs of substrate material. Two different web-handling embodiments are disclosed as is a solid substrate system.

Claims

1. A deposition plenum comprising

interior walls of said deposition plenum,

at least two of said walls comprising a substrate of continuously or intermittently moving material, and

coating means associated with said plenum for directing coating material at said moving material.

2. The deposition plenum according to claim 1 wherein at least three of said walls of said plenum comprise substrates of continuously or intermittently moving material and said coating means directs coating material at said moving material.

3. The deposition plenum according to claim 1 wherein said coating means provides coating material in vapor form at a first location within said plenum, and a pressure differential is provided within said plenum such that said vapor is drawn to a second location within said plenum said coating material flowing through said plenum and adjacent said substrate of continuously or intermittently moving material, thereby coating said substrate.

4. The deposition plenum of claim 3 wherein said coating means comprises a flame source that produces said vapor form of said coating material from a precursor chemical solution.

5. The deposition plenum of claim 3 wherein said substrate is heated by an external source, and said coating material in vapor form decomposes on the substrate to form a coating on said moving material.

6. The deposition plenum of claim 3 wherein on each wall of moving material, said coating material is deposited on one surface, each of said one surfaces is heated to decompose said coating material, and the opposite surface of each of said walls of moving material is cooled.

7. The deposition plenum of claim 3 further comprising exhaust means disposed at said second location within said plenum for producing said pressure differential, thereby drawing said coating material through said plenum and adjacent said substrate of continuously or intermittently moving material to coat said substrate.

8. The deposition plenum of claim 3 comprising additional means for directing vaporized coating material towards said walls of moving material.

9. The deposition plenum of claim 8 wherein said additional means for directing comprises gas-flow means associated with said plenum.

10. The deposition plenum of claim 8 wherein said additional means for directing comprises a baffle disposed within said plenum.

11. The deposition plenum of claim 1 wherein said coating means provides a spray of liquid coating material which coats the substrate within the plenum.

12. The deposition plenum of claim 1 wherein said substrate of continuously or intermittently moving material forms at least 40% of the total area of said interior walls of said deposition plenum.

13. The deposition plenum of claim 12 wherein said substrate of continuously or intermittently moving material forms at least 50% of the total area of said interior walls of said deposition plenum.

14. The deposition plenum of claim 13 wherein said substrate of continuously or intermittently moving material forms at least 75% of the total area of said interior walls of said deposition plenum.

15. The deposition plenum of claim 14 wherein said substrate of continuously or intermittently moving material forms at least 95% of the total area of said interior walls of said deposition plenum.

16. The deposition plenum of claim 15 wherein said substrate of continuously or intermittently moving material forms at least 99% of the total area of said interior walls of said deposition plenum.

17. The deposition plenum of claim 12 wherein said substrate is a flexible web of sheet material.

18. The deposition plenum of claim 17 wherein said web moves in a continuous fashion such that said coating material is uniformly deposited on said web.

19. The deposition plenum of claim 18 wherein said web of sheet material moves in an intermittent fashion such that sequential portions are fed into said plenum, coated and then moved out of said plenum.

20. The deposition plenum of claim 1 wherein said substrate comprises at least one rigid panel of material.

21. The deposition plenum of claim 12 wherein said substrate comprises a plurality of rigid panels of material.

22. The deposition plenum of claim 21 wherein said rigid panels are connected to each other and move through said plenum in a continuous fashion.

23. The deposition plenum of claim 21 wherein said rigid panels are connected to each other and move through said plenum in an intermittent fashion such that sequential panels are fed into said plenum, coated and then moved out of said plenum.

24. The deposition plenum of claim 20 wherein said at least one rigid panel of material is removed from said plenum after a coating is deposited thereon, and is replaced by another non-coated rigid panel of material.

26. The apparatus according to claim 25, wherein, the webs are oriented vertically within said deposition plenum, said coating material source is located at the bottom of the deposition plenum, and said apparatus includes a exhaust system at the top of the deposition plenum, such that the coating material flows between the two webs from the bottom of the deposition plenum to the top of the deposition plenum.

27. The apparatus according to claim 26, wherein said two web-handling portions each include a plurality of arch bars, each of said arch bars supporting the respective webs along a horizontal line, thereby forming bends in the respective webs, wherein the coating material is redirected as it flows past the bends forming turbulence regions within the deposition plenum.

28. The apparatus according to claim 27, wherein:

each of said arch bars on one of said web-handling portions is associated with an arch bar on the other of said web handling portions such that said arch bars are aligned in pairs;

uppermost and lowermost pairs of arch bars are separated by a first distance;

central pairs of said arch bars are separated by a second distance, said second distance being less than said first distance; and

pairs of said arch bars between said central pairs of said arch bars and said uppermost and said lowermost pairs of arch bars are separated by a third distance, said third distance being greater than said second distance and less than said first distance.

29. The apparatus according to claim 28, wherein each of said arch bars includes a plurality of holes along the horizontal line, said holes providing pressurized gas between each arch bar and the respective web, thereby forming a low-friction air bearing.

30. The apparatus according to claim 27, wherein said two web-handling portions each include a vacuum chuck, each said vacuum chuck supporting the respective web such that the web is held against the vacuum check so that the respective webs will not wrinkle as they travel through the deposition plenum.

31. The apparatus according to claim 27, wherein said exhaust system has a width parallel to a width of the webs, said exhaust system including a plurality of runners spaced across the width of the plenum, each said runner comprising:

a venturi; and

a slide valve within said venturi, said slide valve being adjustable to vary the amount of the coating material that flows through said venturi, such that the differential pressure across the width of said deposition plenum can be controlled to provide a more uniform coating on the webs.

32. The apparatus according to claim 31, wherein each of said runners further comprises a runner static pressure sensor within said venturi.

33. The apparatus according to claim 32, wherein each of said runners further comprises a runner temperature sensor within said venturi.

34. The apparatus according to claim 33, wherein said exhaust system further comprises a exhaust system static pressure sensor, said runner static pressure sensors, said runner temperature sensors, and said exhaust system static pressure sensor providing feedback for the control of said slide valves.

35. The apparatus according to claim 25 further comprising:

a frame, said frame including a first and a second side plate attached to each other by a number of cross bars; and

four legs, two of said legs supporting said first side plate and the other two of said legs supporting said second side plate;

wherein

said two supply means, said two web-handling portions, and said two take-up means are attached to and supported by said first and second side plates.

36. The apparatus according to claim 35 wherein each of said two supply means and said two take-up means are rollers that are rotatably attached to said first and second side plates using a first and second adjustment mechanism, one on each end of said rollers, such that the adjustment mechanisms can adjust a distance between the ends of said rollers and an outer edge of the respective side plate to adjust for skewing of the web.

37. The apparatus according to claim 36 wherein each said adjustment mechanisms comprises:

a ledge attached to said outer edge of the respective side plate;

a bearing block slidably mounted on top of said ledge; and

a threaded fastener mounted in a threaded bore in said outer edge of said respective side plate, said threaded fastener including an end abutting said bearing block;

wherein screwing said threaded fastener into and out of said threaded bore adjusts the distance between said bearing block and said outer edge of said respective side plate to adjust for the skewing of the web.

38. The apparatus according to claim 25 further comprising two web temperature controllers for adjusting the temperature of the webs prior to entering the deposition plenum.

39. The apparatus according to claim 38 wherein said two web temperature controllers each comprise a pre-heater.

40. The apparatus according to claim 38 wherein said two web temperature controllers each comprise a pre-cooler.

41. The apparatus according to claim 25 wherein said take-up means comprises driven take-up rollers and said apparatus further comprises two slip-sheet rollers for supplying a slip-sheet to said driven take-up rollers, the slip-sheet being wound around said driven take-up rollers between adjacent layers of the coated web substrate.

42. The apparatus according to claim 25 wherein said two web-handling portions both include an upper and a lower tangent roller for guiding the respective web substrates, the web substrates being routed from said two supply means around said lower tangent rollers, through said deposition plenum, around the upper tangent rollers and onto said take-up means.

43. The apparatus according to claim 42 wherein said upper and lower tangent rollers are rotatably mounted to said first and second side plates.

44. The apparatus according to claim 42 wherein said upper and lower tangent rollers include a plurality of holes, said holes providing pressurized gas between said upper and lower tangent rollers and the respective web thereby forming a low-friction air bearing.

45. The apparatus according to claim 42 wherein said two web-handling portions both include a feed roller, said feed rollers being located below and between said lower tangent rollers and said supply means, said respective webs being routed from said supply means about said feed rollers and to said lower tangent rollers, thereby forming a tent-shaped inlet area for routing the coating material into the deposition plenum.

46. The apparatus according to claim 45 wherein said feed rollers are rotatably mounted to said first and second side plates.

47. The apparatus according to claim 45 wherein said feed rollers include a plurality of holes, said holes providing pressurized gas between said feed rollers and the respective web, thereby forming a low-friction air bearing.

48. The apparatus according to claim 45 wherein said tent-shaped inlet area includes first and second lower side dams for routing the vaporized coating material into the deposition plenum.

49. The apparatus according to claim 25 wherein the deposition plenum further comprises first and second side air dams for keeping the coating material between the two webs, the first and second side air dams and the two webs thereby forming four innermost walls of the deposition plenum.

50. The apparatus according to claim 25 wherein said coating material source comprises a bubbler from which said coating material is vaporized.

51. The apparatus according to claim 25 wherein said coating material source comprises a sublimer from which said coating material is vaporized.

52. The apparatus according to claim 25 wherein said coating material source comprises a vaporizer.

53. The apparatus according to claim 25 wherein said coating material source comprises a nebulizer.

54. The apparatus according to claim 25 wherein said coating material source comprises at least one combustion vapor deposition nozzle.

55. The apparatus according to claim 54 wherein said coating material source comprises at least two combustion chemical vapor deposition nozzles.

56. The apparatus according to claim 55 wherein said coating material source further comprises a gas jet.

57. The apparatus according to claim 55 wherein said at least two combustion chemical vapor deposition nozzles are directed upward and toward one another at a particular angle and said gas jet is directed upward and midway between said two combustion chemical vapor deposition nozzles to thereby direct said vaporized coating material into said deposition plenum.

58. The apparatus according to claim 54 wherein said coating material source further comprises:

a support plate, said at least one chemical vapor deposition nozzle being mounted on said support plate;

an isolation plate, said isolation plate being mounted above said at least one chemical vapor deposition nozzle and including a centrally located opening for the vaporized coating material to enter the deposition plenum therethrough, said at least one chemical vapor deposition nozzle being mounted on directly below said centrally located opening; and

a traversing mechanism, said support plate and said isolation plate being mounted on said traversing mechanism;

wherein said traversing mechanism moves said support plate, said at least one chemical vapor deposition nozzle and said isolation plate back and forth across the width of the deposition plenum, to thereby distribute the vaporized coating material evenly across the webs.

59. The apparatus according to claim 58 wherein said coating material source comprises at least two combustion chemical vapor deposition nozzles.

60. The apparatus according to claim 59 wherein said coating material source further comprises a gas jet, said gas jet being mounted on said support plate.

61. The apparatus according to claim 60 wherein said at least two combustion chemical vapor deposition nozzles are directed upward and toward one another at a particular angle and said gas jet is directed upward and midway between said chemical vapor deposition nozzles to thereby direct said vaporized coating material through said centrally located opening and into said deposition plenum.

62. The apparatus according to claim 61 wherein said at least two chemical vapor deposition nozzles and said gas jet are supplied their respective deposition precursors and other gasses via flexible supply tubes, said flexible supply tubes being surrounded by a flexible conduit to protect the flexible supply tubes as the traversing mechanism moves said support plate, said at least one chemical vapor deposition nozzle, said gas jet, and said isolation plate back and forth.

63. The apparatus according to claim 62 further comprising a web-scanning inspection system, said inspection system scanning the width of both webs after the webs have left the deposition plenum and prior to said webs being taken up by said take-up means.

64. The apparatus according to claim 63 wherein said web-scanning inspection system includes:

a first track and a second track; and

a first inspection shuttle mounted on said first track and a second inspection shuttle mounted on said second track;

wherein

said first and said second inspection shuttles travel back and forth along their respective tracks across the width of their respective web; and

said first and second shuttles include instruments that inspect the coating on the webs for at least one of the following properties;

depth of the coating;

epitaxial nature of the coating; and

smoothness of the coating.

65. The apparatus according to claim 25 further comprising:

web speed indicating means;

coating material flow rate indicating means;

two drive means for driving said two take-up means, said drive means being controlled by associated drive control circuitry;

coating material flow control circuitry;

web inspection means; and

a computer-based control system;

wherein

said computer-based control system receives signals from said web speed indicating means, said coating material flow rate indicating means, and said web inspection means, and provides control signals to said drive control circuitry and said coating material flow control circuitry, based on these signals.

66. The apparatus according to claim 65 wherein:

said coating material source further comprises at least one chemical vapor deposition nozzle, a support plate, said at least one combustion chemical vapor deposition nozzle being mounted on said support plate, an isolation plate, said isolation plate being mounted above said at least one chemical vapor deposition nozzle and including a centrally located opening for the vaporized coating material to enter the deposition plenum therethrough, said at least one chemical vapor deposition nozzle being mounted directly below said centrally located opening, and a traversing mechanism having a traversing motor, said support plate and said isolation plate being mounted on said traversing mechanism, said traversing mechanism moves said support plate, said at least one chemical vapor deposition nozzle and said isolation plate back and forth across the width of the deposition plenum, to thereby distribute the vaporized coating material evenly across the webs; and

said computer-based control system controls the traversing motor to thereby control the rate at which said support plate, said at least one chemical vapor deposition nozzle and said isolation plate back and forth across the width of the deposition plenum.

68. The fluid flow control exhaust system according to claim 67, wherein each said runner further comprises a runner static pressure sensor within said venturi.

69. The fluid flow control exhaust system according to claim 68, wherein each said runner further comprises a runner temperature sensor within said venturi.

70. The fluid flow control exhaust system according to claim 69, wherein said exhaust system further comprises a exhaust system static pressure sensor, said runner static pressure sensors, said runner temperature sensors and said exhaust system static pressure sensor providing feedback for the control of said slide valves.

71. The fluid flow control exhaust system according to claim 70, wherein said exhaust system further comprises an exhaust fan, said exhaust fan being controlled based on a signal from the exhaust system static pressure sensor.

25. An apparatus for coating two substrates in the form of two rolled webs of material, said apparatus comprising:

two supply means for supplying and supporting respective uncoated portions of the web substrates;

two web-handling portions for guiding the respective web substrates through a coating area, the web substrates being proximal to one another in said coating area to form a deposition plenum;

two take-up means for supporting respective coated portions of the web substrates and for driving the respective web substrates from the supply rollers through the coating area and onto their respective take-up means; and

a coating material source for providing coating material to the deposition plenum.

67. A fluid flow control exhaust system, said exhaust system having a width and including a plurality of runners spaced across said, each said runner comprising:

a venturi; and

a slide valve within said venturi, said slide valve being adjustable to vary the amount of fluid that flows through said venturi, such that a differential pressure across the width of said exhaust system can be controlled to provide a specific differential flow pattern across the width of the exhaust system.

72. An apparatus for coating a substrate in the form of a rolled web of material, said apparatus comprising:

a supply means for supplying and supporting uncoated portions of the web substrate;

a web-handling portion for guiding the web substrate through a coating area, the web substrate being adjacent a surface in said coating area to form a deposition plenum;

a take-up means for supporting coated portions of the web substrate and for driving the web substrate from the supply roller through the coating area and onto said driven take-up roller; and

a coating material source for providing coating material to the deposition plenum.

73. The apparatus according to claim 72 wherein said supply means is below said take-up means, such that the web is substantially vertical while in said deposition plenum.

74. The apparatus according to claim 73 wherein the web substrate converges toward said surface incrementally from a bottom of said deposition plenum to a central region of said deposition plenum, and diverges incrementally from said central region of said deposition plenum to a top of said deposition plenum thereby forming a central venturi region within said deposition plenum.

75. An apparatus for coating wire or tape, said apparatus comprising:

a vertical tube;

at least one deposition vapor source;

at least one supply means for supporting and supplying uncoated portions of the wire or tape through the funnel and vertical tube; and

at least one take-up means for supporting and taking up coated portions of the wire or tape after the wire or tape has exited the vertical tube.

76. The apparatus of claim 75 further comprising a vapor directing means for directing deposition vapor from the at least one deposition vapor source into the vertical tube.

77. The apparatus of claim 76 wherein said vapor directing means comprises a funnel.