Low contamination plasma chamber components and methods for making the same

  • US 20020086118A1
  • Filed: 12/29/2000
  • Published: 07/04/2002
  • Est. Priority Date: 12/29/2000
  • Status: Active Grant
First Claim
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1. A method of making a plasma reactor component having one or more surfaces which are exposed to plasma during use, the method comprising plasma spraying a coating material onto a plasma exposed surface of the component to form a coating having surface roughness characteristics that promote the adhesion of polymer deposits.

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