Semiconductor device manufacturing method
First Claim
1. A semiconductor device manufacturing method, in which a circuit pattern, an alignment mark, and a discrimination mark which are formed on a photo mask, are made of the same photo sensitive material, comprising:
- (a) the step of discriminating the photo mask by using said discrimination mark;
(b) the step of aligning the photo mask by using said alignment mark; and
(c) the step of transferring a pattern onto a semiconductor wafer by using said circuit pattern.
5 Assignments
0 Petitions
Accused Products
Abstract
A circuit pattern, a reticle alignment mark, a bar code, and a discrimination mark which are formed on a glass plate of a photo mask is constituted of a photo sensitive and photo attenuative material containing a fine particle material and a binder. Discrimination of the photo mask is performed by irradiating predetermined discrimination light on the discrimination mark or the bar code. Alignment of the photo mask by an aligner is performed by irradiating predetermined detection light on the reticle alignment mark. In an exposure process, the pattern on the photo mask is transferred onto a semiconductor wafer by using exposure light having a wavelength different from that of the discrimination light or that of the detection light.
17 Citations
19 Claims
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1. A semiconductor device manufacturing method, in which a circuit pattern, an alignment mark, and a discrimination mark which are formed on a photo mask, are made of the same photo sensitive material, comprising:
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(a) the step of discriminating the photo mask by using said discrimination mark;
(b) the step of aligning the photo mask by using said alignment mark; and
(c) the step of transferring a pattern onto a semiconductor wafer by using said circuit pattern. - View Dependent Claims (2, 3, 4, 5, 15, 16)
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6. A semiconductor device manufacturing method comprising:
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the step of storing a photo mask having a transparent plate and a photo sensitive and photo attenuative material in a stocker;
the step of reading a mark made of said photo sensitive and photo attenuative material to perform mask discrimination of said photo mask;
the step of installing the photo mask to a predetermined exposure unit of an aligner;
the step of detecting the position of an alignment mark made of the photo sensitive and photo attenuative material on said photo mask to perform alignment between the photo mask and a semiconductor wafer;
the step of exposing a desired pattern of said photo mask onto the semiconductor wafer by said aligner; and
the step of installing the photo mask to said stocker after said exposure. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 17, 18)
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19. A semiconductor device manufacturing method wherein a semiconductor device is manufactured by using a photo mask having a glass plate and a photo sensitive and photo attenuative material in which a transmittance with respect to light having a wavelength of 150 nm to 750 nm is not more than 60%.
Specification