Systems for measuring periodic structures

  • US 20020105646A1
  • Filed: 12/20/2000
  • Published: 08/08/2002
  • Est. Priority Date: 12/20/2000
  • Status: Active Grant
First Claim
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1. A method for measuring one or more parameters of a periodic structure, comprising:

  • directing a polychromatic beam of electromagnetic radiation to the structure;

    collecting radiation from the beam after it has been modified by the structure;

    dividing the collected radiation into two collected rays having different polarization states;

    detecting the two rays to provide two outputs; and

    deriving the one or more parameters from the two outputs.

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