Process monitoring device for sample processing apparatus and control method of sample processing apparatus

• US 20020123816A1
• Filed: 09/05/2001
• Published: 09/05/2002
• Est. Priority Date: 03/05/2001
• Status: Active Grant

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Tanaka, Junichi, Ikuhara, Shoji, Yamamoto, Hideyuki, Takahashi, Kazue, Kitsunai, Hiroyuki
• Granted Patent: US 6,879,867 B2
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 21/02 electric
• CPC Class Codes: G05B 2219/32053 Adjust work parameter as function of other cell
• CPC Class Codes: G05B 2219/32182 If state of tool, product deviates from standard, adjust system, feedback
• CPC Class Codes: G05B 23/0221 Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A monitor data acquisition section acquires a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors. A data selection section selects monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for the sample, from among the plurality of monitor data. A monitoring signal generation section generates monitoring signals based on the monitor data belonging to the arbitrary processing division selected by the data selection section. A display setting controller displays a plurality of monitoring signals obtained with respect to samples processed in the processing apparatus, on a display section in a time series manner.

Claims

1. A process monitoring device comprising:

a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;

a data selection section for selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;

a monitoring signal generation section for generating monitoring signals based on the monitor data belonging to said arbitrary processing division selected by said data selection section; and

a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner.

2. A process monitoring device according to claim 1, further comprising:

a database for storing said monitor data for each of said sample processing divisions,

wherein said plurality of processing divisions comprises processing steps of said sample, sample unit, lot unit, and idle time between sample processing times, and

wherein said plurality of monitor data are data that belong to an arbitrary sample processing division.

3. A process monitoring device according to claim 1, further comprising:

a database for storing standard data concerning said apparatus monitoring signals; and

a comparison section for comparing said standard data with said monitoring signals,

wherein a result of said comparison is displayed on said display section in a time series manner.

4. A process monitoring device according to claim 3, wherein said standard data are monitoring signals obtained in past processing of a sample of the same kind with a recipe of the same kind as said processed sample, or data obtained by working the monitoring signals.

5. A process monitoring device according to claim 3, further comprising:

an abnormality detection section for conducting confirmation of the sample processing state or abnormality detection of the processing apparatus, based on said comparison result.

6. A process monitoring device according to claim 1, further comprising:

a database for recording and storing events that occurred in said processing apparatus in the past,

wherein said events are displayed in addition to said time series display.

7. A process monitoring device according to claim 1, further comprising:

an event acquisition section for acquiring events of other processing apparatuses through which said sample is passed,

wherein said events are displayed in addition to said time series display.

8. A process monitoring device according to claim 1, further comprising:

a section for selecting a number of samples or at least one of kinds of samples.

9. A process monitoring device according to claim 1, wherein in said process monitoring device monitoring signals of processing of samples of the same kind as a sample processed immediately before are selected from among monitoring signals of samples processed in the past, and displayed.

10. A process monitoring device according to claim 1, further comprising:

a generation section for generating monitoring signals of a plurality of types; and

a selection section for selecting a type of monitoring signals to be displayed.

11. A process monitoring device according to claim 1, further comprising:

a ranking generation section for providing said sample processing divisions with ranks according to degrees of deviation of said monitoring signals from standard data; and

an abnormal division decision section for judging a sample processing division in which an abnormality of sample processing is occurring to be an abnormal division, based on said ranks, and displaying the abnormal division.

12. A process monitoring device according to claim 1, wherein in case where said monitoring signals include two kinds or more, said display setting controller displays said monitoring signals on said display section in a time series manner by assigning said monitoring signals of one kind to an ordinate of a two-dimensional graph and assigning said monitoring signals of a different kind to an abscissa of the two-dimensional graph.

15. A process monitoring device according to claim 14, wherein a principal ingredient analysis is used as means for working said monitor data.

16. A process monitoring device according to claim 14, wherein a result obtained by predicting sample processing performance from said fewer monitoring signals by using a model expression is displayed.

18. A control method of a sample processing apparatus according to claim 17, wherein said plurality of processing divisions comprises processing steps of said sample, sample unit, lot unit, and idle time between sample processing times, and

said step b) comprises selecting data that belong to an arbitrary sample processing division from among said monitor data, and

said step c) comprises generating monitoring signals by working said selected monitor data.

19. A control method of a sample processing apparatus according to claim 18, wherein said step d) comprises:

comparing standard data of said monitoring signals with said monitoring signals; and

controlling the processing by using a result of said comparison.

20. A control method of a sample processing apparatus according to claim 19, wherein said step d) comprises conducting control of abnormality processing in response to detection of such an abnormality that said monitoring signals depart from a normal range, based on the result of said comparison.

21. A control method of a sample processing apparatus according to claim 19, wherein said step d) comprises:

providing said sample processing divisions with ranks according to degrees of deviation of said monitoring signals from standard data; and

conducting control of processing of a sample processing division having a high degree of abnormality in sample processing according to said ranks, with priority.

22. A control method of a sample processing apparatus according to claim 17, wherein said control method comprises:

acquiring a plurality of monitor data from said sample processing apparatus;

extracting fewer monitoring signals than the number of monitored data, by working said monitor data; and

controlling sample processing by using said monitoring signals.

23. A control method of a sample processing apparatus according to claim 22, wherein said control method comprises:

predicting sample processing performance from said fewer monitoring signals by using a model expression; and

controlling sample processing based on said prediction.

24. A control method of a sample processing apparatus according to claim 17, further comprising the step of:

e) displaying said generated monitoring signals on a display section in a time series manner.

25. A control method of a sample processing apparatus according to claim 17, wherein in case where said monitoring signals include two kinds or more, said step e) comprises displaying said monitoring signals on said display section in a time series manner by assigning said monitoring signals of one kind to an ordinate of a two-dimensional graph and assigning said monitoring signals of a different kind to an abscissa of the two-dimensional graph.

13. A process monitoring device comprising:

a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;

a data selection section for selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;

a monitoring signal generation section for generating monitoring signals based on the monitor data belonging to said arbitrary processing division selected by said data selection section;

a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner; and

a display switchover section for switching over the display according to a use situation of said processing apparatus.

14. A process monitoring device comprising:

a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;

a monitoring signal generation section for extracting fewer monitoring signals than the number of monitored data, from among said plurality of monitor data by working said monitor data; and

a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner.

17. A control method of a sample processing apparatus having a process monitoring device for acquiring a plurality of monitor data relating to a processing state of a sample, via sensors, said control method comprising the steps of:

a) acquiring a plurality of monitor data relating to a processing state of one sample in said processing apparatus, via sensors;

b) selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;

c) generating monitoring signals based on the monitor data belonging to said selected arbitrary processing division; and

d) controlling sample processing by utilizing said monitoring signals.

26. A sample manufacturing method comprising the steps of:

acquiring monitor data concerning a processing state of one sample from a sample processing apparatus via sensors;

selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said monitor data;

generating monitoring signals by working said selected monitor data; and

conducting processing control of said sample by using said monitoring signals and conducting sample manufacturing.

27. A sample manufacturing method comprising the steps of:

acquiring a plurality of monitor data concerning a processing state of one sample in a sample processing apparatus, via sensors;

extracting and generating fewer monitoring signals than the number of monitored data from said plurality of monitor data, by working said monitor data; and

conducting processing control of said sample by using said generated monitoring signals and conducting sample manufacturing.