Wearable biomonitor with flexible thinned integrated circuit

• US 20020180605A1
• Filed: 07/16/2002
• Published: 12/05/2002
• Est. Priority Date: 11/11/1997
• Status: Abandoned Application

• Current Assignee: Irvine Sensors Corp.
• Original Assignee: Irvine Sensors Corp.
• Inventors: Ozguz, Volkan H., Khashayar, Abbas
• Application Number:
  US10/197,006
• Publication Number:
  US 20020180605A1
• Time in Patent Office: Days
• US Class Current: 340/573.1
• CPC Class Codes: H01L 21/6836 Wafer tapes, e.g. grinding or dicing support tapes adhesive tapes in general C09J7/20
• CPC Class Codes: H01L 2221/68327 used during dicing or grinding

Abstract

A sensor system (30) has a sensor module (10) and a receiver module (45). The sensor module (10) functions as a wireless data collection device and has a flexible thin sheet of silicon (60, 65, 70) comprising circuitry (71, 72, 73), a flexible power source (105), and a flexible support substrate (55). The silicon, power source, and flexible support substrate are integrated as layers of the sensor module (10). The layers are placed together in the form of an adhesive bandage (10). A plurality of electrodes (80) are connected to the sensor module (10) and protrude from the flexible substrate (55) for contacting the skin of a subject body (20). The receiver module (45) includes one of an RF receiver with a wireless port for continuously receiving data (40), or a physical I/O port (87) to which the sensor module (10) can be physically connected for downloading stored data from the sensor module (10).

Claims

1. A sensor module that functions as a wireless data collection device, comprising:

a flexible thin sheet of silicon comprising circuitry for collecting physiological data, one of a wireless port for continuously transmitting data or a port for intermittently uploading stored data, a flexible power source, and a flexible substrate integrated as layers of the sensor module in the form of an adhesive bandage; and

a plurality of the electrodes protruding from the flexible substrate for contacting the skin of a person.

2. The sensor module of claim 1, further comprising a bonding layer comprising an anisotropic conductive epoxy bonding the flexible thin sheet of silicon to the flexible substrate.

3. The sensor module of claim 2, wherein each of the layers is flexible along a width and along an entire length.

4. The sensor module of claim 2, wherein a thickness of the silicon, the epoxy, and the flexible substrate layers is in the range from 75 to 100 microns.

5. The sensor module of claim 1, wherein a circuit path and the power source comprise means for reducing noise.

6. The sensor module of claim 1, wherein a thickness of the thin sheet of silicon is in the range from 10 to 50 microns.

7. The sensor module of claim 6, wherein the thickness of the thin sheet of silicon is approximately 25 microns.

8. The sensor module of claim 1, wherein the sensor module is one of a plurality of similar sensor modules to be simultaneously placed at a variety of selected locations on the skin of the person.

9. The sensor module of claim 1, further comprising a single integrated circuit on an active surface of the flexible thin sheet of silicon.

10. The sensor module of claim 1, further comprising:

a plurality of flexible thin sheets of silicon that each have integrated circuits on an active surface thereof; and

metallization connecting the integrated circuits to each other.

11. The sensor module of claim 1, further comprising metallization on a surface of the flexible substrate facing the flexible thin sheet of silicon, the metallization forming an antenna.

12. The sensor module of claim 1, wherein:

the flexible substrate is a polyimide and is located on a first side of the flexible thin sheet of silicon; and

the power source is a thin battery and is located on a second side of the flexible thin sheet of silicon opposite to the flexible substrate and thereby helps to center the flexible thin sheet of silicon on a zero stress plane of the sensor module.

13. The sensor module of claim 1, further comprising a plurality of adhesive pads on the flexible substrate for attaching the sensor module to the skin.

14. The sensor module of claim 13, wherein the adhesive pads are double sided and removably attached to the flexible substrate so that the adhesive pads can be removed from the sensor module after use, and the sensor module can be sterilized in an autoclave for subsequent attachment of new adhesive pads and repeated usage.

17. The sensor module of claim 16, wherein the layers include:

a nonconductive flexible substrate;

the silicon layer comprising a thin flexible sheet of silicon comprising an integrated circuit; and

a bonding layer of anisotropic epoxy bonding the silicon to the flexible substrate.

18. The sensor module of claim 17, wherein an overall thickness of the layers is less than or equal to 100 microns.

19. The sensor module of claim 17, wherein the thin flexible sheet of silicon has a thickness in the range from 10 to 50 microns.

20. The sensor module of claim 17, further comprising:

electrodes on a surface of the flexible substrate opposite the anisotropic epoxy layer; and

metallization on the flexible substrate connecting the electrodes to the integrated circuit.

15. A sensor system, comprising:

a sensor module with;

a flexible thin sheet of silicon comprising circuitry

and a flexible substrate integrated as layers of the sensor module; and

a receiver module that is physically separate from the sensor module during monitoring by the sensor module, the receiver module comprising one of;

an RF receiver with a wireless port for continuously receiving data, or

a port for physically connecting to and downloading stored data from the sensor module.

16. A thin, flexible sensor module, comprising:

a length, a width, and a thickness; and

a plurality of layers of materials including a silicon layer, the layers stacked in a thickness direction, wherein each of the layers is flexible and bendable out of a regular plane of the sensor module about both of a lengthwise axis and a widthwise axis.

21. A sensor system, comprising:

a thin, flexible sensor module having a plurality of layers of materials including a silicon layer, the layers stacked in a thickness direction, wherein each of the layers is flexible and bendable in a thickness direction out of a regular plane of the sensor module;

a receiver module having a data receiving and processing device that is physically separate from the sensor module during monitoring by the sensor module.

22. The sensor system of claim 21 further comprising an intermediate transceiver that is separate from the receiver module.

23. The sensor system of claim 22 further comprising a plurality of sensor modules and wherein the intermediate transceiver receives signals from the plurality of sensor modules, rearranges such signals in time to form a composite signal, and then transmits the composite signal to the receiver module.

24. The sensor system of claim 22 further comprising a plurality of sensor modules and wherein the intermediate transceiver receives signals from the multiple sensor modules, process such signals to form a composite signal that conforms to a communication standard, and then transmits the composite signal to the receiver module.

27. The method of monitoring of claim 26, wherein the step of positioning comprises adhering the sensor module to the skin by adhesive pads on the sensor module.

28. The method of monitoring of claim 27, further comprising the step of discarding the sensor module after use on a single said subject body.

29. The method of monitoring of claim 27, further comprising the subsequent steps of:

removing the adhesive pads from the sensor module; and

heating the sensor module in an autoclave for sterilization.

30. The method of monitoring of claim 26, wherein:

the step of positioning further comprises locating the sensor module in any of a variety of positions on the skin; and

the step of collecting further comprises comfortably leaving the sensor module on the skin during normal activities of the subject body.

31. The method of monitoring of claim 26, wherein the steps of collecting and analyzing further comprise monitoring by EMG.

32. The method of monitoring of claim 26, wherein the steps of collecting and analyzing further comprise monitoring by at least one of EKG, EMG, EEG, blood sugar, blood pulse, or blood pressure.

33. The method of monitoring of claim 32, wherein:

the sensor module is one of a plurality of sensor modules, and further comprising;

positioning the plurality of sensor modules on selected positions on the skin; and

simultaneously collecting data by each of the sensor modules.

35. The method of making of claim 34, wherein the step of grinding further comprises thinning the silicon layer to a thickness in the range from 10 to 50 microns.

36. The method of making of claim 34, further comprising:

metalizing the flexible substrate in order to;

provide an antenna; and

connect the IC to electrodes.

39. The kit of claim 38, further comprising software for controlling collection, analysis, and storage of the data received from the at least one sensor module.

40. The kit of claim 38, further comprising a receiver for receiving data collected by the sensor module.

25. An improved biomedical sensor module suitable for application to the skin of a subject body, the improvement comprising:

a flexible thin sheet of silicon comprising circuitry.

26. A method of monitoring a physiological characteristic, comprising:

positioning a flexible, sensor module on the skin of a subject body to be monitored;

collecting data through the skin for a predetermined period of time; and

analyzing the data on a device that is physically separate from the sensor module.

34. A method of making a flexible sensor module, comprising:

grinding an inactive side of a silicon layer on which an IC resides until the silicon becomes thin and flexible;

mounting the silicon layer on a flexible substrate of polyimide by an anisotropic conductive epoxy intermediate layer; and

covering the silicon layer and the flexible substrate with a thin flexible battery.

37. A method of making a sensor system, comprising:

forming a sensor module by;

grinding an inactive side of a silicon layer on which an IC resides until the silicon becomes thin and flexible; and

mounting the silicon layer on a flexible substrate; and

providing a receiver module in the form of a data processing device for analyzing the data.

38. A bio data monitoring system kit, comprising:

at least one wireless, flexible sensor module having a thinned silicone layer with an IC and a plurality of electrodes thereon;

wherein;

the sensor module has an adhesive bandage configuration;

the electrodes are rigid or flexible; and

all of the other elements of the sensor module are flexible.