Light emitting device and method of manufacturing thereof

• US 20020187567A1
• Filed: 05/20/2002
• Published: 12/12/2002
• Est. Priority Date: 05/21/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Seo, Satoshi, Yamazaki, Shunpei
• Granted Patent: US 7,179,756 B2
• Time in Patent Office: Days
• US Class Current: 438/11
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 71/13 using printing techniques, e.g. ink-jet printing or screen printing
• CPC Class Codes: H10K 85/10 Organic polymers or oligomers
• CPC Class Codes: H10K 85/111 comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
• CPC Class Codes: H10K 85/113 Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
• CPC Class Codes: H10K 85/114 Poly-phenylenevinylene; Derivatives thereof
• CPC Class Codes: H10K 85/115 Polyfluorene; Derivatives thereof
• CPC Class Codes: H10K 85/341 Transition metal complexes, e.g. Ru(II)polypyridine complexes H10K85/331 takes precedence
• CPC Class Codes: H10K 85/60 Organic compounds having low molecular weight H10K85/10 - H10K85/50 take precedence

Abstract

A device of forming a film from an organic compound material at low cost is provided, using an organic compound material having high light emission efficiency. An organic compound film is formed on a substrate under an inert gas atmosphere by spraying of a colloid solution in which organic compound aggregates are dispersed (this solution is also referred to as a “sol”). Note that the organic compound may be one in which particles are composed of aggregates of several organic compounds within a liquid, and may be one in which a portion of the organic compound is dissolved within a liquid.

Claims

1. A method of manufacturing a light emitting device, wherein a composition which has organic compound aggregates as distributed particles and has a dispersion medium as a liquid is sprayed onto an object from a nozzle by using an inert gas, forming a film containing the organic compound aggregates.

2. A method according to claim 1, wherein the composition is a liquid having fluidity, and the organic compound aggregates within the liquid are dispersed as colloid particles.

3. A method according to claim 1, wherein the organic compound is one compound or a plurality of compounds, selected from the group consisting of quinacridon, tris(2-phenylpyridine) iridium, and basocuproin.

4. A method according to claim 1, wherein the organic compound is one compound or a plurality of compounds, selected from the group consisting of poly(1,4-phenylene vinylene), poly(1,4-naphthalene vinylene), poly(2-phenyl-1,4-phenylene vinylene), polythiophene, poly(3-phenylthiophene), poly(1,4-phenylene), and poly(2,7-fluorene).

5. A method according to claim 1, wherein the liquid is one liquid or a plurality of liquids, selected from the group consisting of alcohols, toluene, and water.

6. A method according to claim 1, wherein film formation is performed under an inert gas atmosphere.

7. A method according to claim 1, wherein the nozzle is provided with one or more spray outlets.

8. A method according to claim 1, wherein the object is a substrate on which a switching element is formed.

9. A method according to claim 1, wherein a film is formed on the object while moving the object.

10. A method according to claim 1, wherein a film is formed on the object while moving the nozzle.

11. A method according to claim 1, wherein an electric field is generated between the nozzle and the object.

13. A method according to claim 12, wherein the composition is a liquid having fluidity, and the organic compound aggregates within the liquid are dispersed as colloid particles.

14. A method according to claim 12, wherein the organic compound is one compound or a plurality of compounds, selected from the group consisting of quinacridon, tris(2-phenylpyridine) iridium, and basocuproin.

15. A method according to claim 12, wherein the organic compound is one compound or a plurality of compounds, selected from the group consisting of poly(1,4-phenylene vinylene), poly(1,4-naphthalene vinylene), poly(2-phenyl-1,4-phenylene vinylene), polythiophene, poly(3-phenylthiophene), poly(1,4-phenylene), and poly(2,7-fluorene).

16. A method according to claim 12, wherein the composition or the mask is electrically charged.

17. A method according to claim 12, wherein the liquid is one liquid or a plurality of liquids, selected from the group consisting of alcohols, toluene, and water.

18. A method according to claim 12, wherein film formation is performed under an inert gas atmosphere.

19. A method according to claim 12, wherein the nozzle is provided with one or more spray outlets.

20. A method according to claim 12, wherein the object is a substrate on which a switching element is formed.

21. A method according to claim 12, wherein a film is formed on the object while moving the object.

22. A method according to claim 12, wherein a film is formed on the object while moving the nozzle.

23. A method according to claim 12, wherein an electric field is generated between the nozzle and the object.

25. A method according to claim 24, wherein the composition is a liquid having fluidity, and at least a portion of the organic compound is dissolved within the liquid.

26. A method according to claim 24, wherein the liquid is one liquid or a plurality of liquids, selected from the group consisting of alcohols, toluene, and water.

27. A method according to claim 24, wherein film formation is performed under an inert gas atmosphere.

28. A method according to claim 24, wherein the nozzle is provided with one or more spray outlets.

29. A method according to claim 24, wherein the object is a substrate on which a switching element is formed.

30. A method according to claim 24, wherein a film is formed on the object while moving the object.

31. A method according to claim 24, wherein a film is formed on the object while moving the nozzle.

32. A method according to claim 24, wherein an electric field is generated between the nozzle and the object.

12. A method of manufacturing a light emitting device, wherein a composition which has organic compound aggregates as distributed particles and has a dispersion medium as a liquid is sprayed onto an object from a nozzle through an opening portion of a mask disposed between the nozzle and the object by using an inert gas, thus forming a film containing the organic compound aggregates.

24. A method of manufacturing a light emitting device, wherein a composition, in which an organic compound is dissolved in a liquid is sprayed from a nozzle onto an object by using an inert gas, forming a film containing the organic compound.

33. A method of manufacturing a light emitting device, wherein a composition in which an organic compound is dissolved in a liquid is sprayed from a nozzle onto an object through an opening portion of a mask disposed between the nozzle and the object by using an inert gas, thus forming a film containing the organic compound.

34. A method according to claim 33, wherein the composition is a liquid having fluidity, and at least a portion of the organic compound is dissolved within the liquid.

35. A method according to claim 33, wherein the composition or the mask is electrically charged.

36. A method according to claim 33, wherein the liquid is one liquid or a plurality of liquids, selected from the group consisting of alcohols, toluene, and water.

37. A method according to claim 33, wherein film formation is performed under an inert gas atmosphere.

38. A method according to claim 33, wherein the nozzle is provided with one or more spray outlets.

39. A method according to claim 33, wherein the object is a substrate on which a switching element is formed.

40. A method according to claim 33, wherein a film is formed on the object while moving the object.

41. A method according to claim 33, wherein a film is formed on the object while moving the nozzle.

42. A method according to claim 33, wherein an electric field is generated between the nozzle and the object.