SUBSTRATE SUPPORT WITH MULTILEVEL HEAT TRANSFER MECHANISM

• US 20020189940A1
• Filed: 06/14/2001
• Published: 12/19/2002
• Est. Priority Date: 06/14/2001
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Tsai, Cheng-Hsiung, Tzou, Chien-Shiung
• Granted Patent: US 6,506,291 B2
• Time in Patent Office: Days
• US Class Current: 204/298.15
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C30B 25/12 Substrate holders or susceptors
• CPC Class Codes: C30B 31/14 Substrate holders or susceptors
• CPC Class Codes: H01L 21/67109 mainly by convection

Abstract

A substrate support having heat transfer enhancing topography. Generally, the substrate support includes a first side that supports the substrate and a second side. A ring and a plurality of substrate support pads project from the first side. The ring is disposed proximate the perimeter of the substrate support. A fluid passage is disposed through the substrate support and is coupled to a well disposed in the first side. A plurality of gas flow channels are disposed in the first side and orientated radially outward from the well to a perimeter channel disposed radially inward and adjacent to the ring.

Claims

1. A substrate support for supporting a substrate in a process chamber, comprising:

a body having a first side and a second side bounded by a perimeter;

a ring extending from the first side proximate the perimeter;

a perimeter channel disposed in the first side adjacent to and radially inward of the ring;

a plurality of substrate support pads extending from the first side;

a well disposed in the first side;

a fluid passage disposed through the body and coupled to the well, the passage adapted to provide backside gas to the first side; and

a plurality of gas flow channels disposed in the first side radially outwards from the well and fluidly coupled to the perimeter channel.

2. The substrate support of claim 1, wherein the body is comprised ceramic, metal or a combination thereof.

3. The substrate support of claim 1, wherein the pads comprise about 30 percent or less than an area bounded by a perimeter of the ring.

4. The substrate support of claim 1, wherein the pads project at least about 45 μ

m from the first side.

5. The substrate support of claim 1, wherein the gas flow channels comprise 20 percent or less of an area defined by the ring.

6. The substrate support of claim 5, wherein the gas flow channels have a depth of about 200 to about 500 μ

m.

7. The substrate support of claim 1, wherein each gas flow channel comprises one or more branch channels diverging from the gas flow channel toward the perimeter at an angle less than about 30 degrees.

8. The substrate support of claim 1, wherein the well has a diameter of at least about 40 mm.

9. The substrate support of claim 1, wherein the well has a depth of at least about 300 μ

m.

10. The substrate support of claim 1, wherein the substrate support is a susceptor, heater, electrostatic chuck or a combination thereof.

11. The substrate support of claim 1, wherein the perimeter channel, the well and the gas flow channels extend a common depth into the first side.

12. The substrate support of claim 1 further comprising one or more electrodes disposed within the body.

14. The substrate support of claim 13 further comprising a housing sealingly coupled to the second side of the ceramic body and defining a volume therebetween.

15. The substrate support of claim 14 further comprising a temperature control plate disposed in the volume.

16. The substrate support of claim 13, wherein the pads comprise about 30 percent or less than an area bounded by a perimeter of the ring.

17. The substrate support of claim 13, wherein the pads project at least about 45 μ

m from the first side.

18. The substrate support of claim 13, wherein the gas flow channels comprise 20 percent or less of an area defined by the ring.

19. The substrate support of claim 18, wherein the gas flow channels have a depth of about 200 to about 500 μ

m.

20. The substrate support of claim 13, wherein each gas flow channel comprises one or more branch channels diverging from the gas flow channel toward the perimeter at an angle less than about 30 degrees.

21. The substrate support of claim 13, wherein the well has a diameter of at least 40 mm and a depth of at least about 300 μ

m.

13. A substrate support for supporting a substrate in a process chamber, comprising:

a ceramic body having a first side and a second side bounded by a perimeter;

one or more electrodes disposed within the ceramic body;

a ring integrally extending from the first side proximate the perimeter;

a plurality of substrate support pads integrally extending from the first side;

a well disposed in the first side;

a fluid passage disposed through the body and coupled to the well, the passage adapted to provide backside gas to the first side;

a perimeter channel disposed in the first side proximate the ring; and

a plurality of gas flow channels disposed in the first side fluidly coupling the perimeter channel and the well.

22. A substrate support for supporting a substrate in a semiconductor process chamber comprising:

a ceramic body having a first side and a second side bounded by a perimeter;

a ring extending from the first side proximate the perimeter;

a perimeter channel disposed in the first side adjacent to and radially inward of the ring;

a plurality of substrate support pads integrally extending from the first side;

a well disposed in the first side;

a fluid passage disposed through the body and coupled to the well, the passage adapted to provide backside gas to the first side; and

a plurality of gas flow channels disposed in the first side fluidly coupling the perimeter channel and the well, the fluid channels having a depth of at least 300 μ

m.

23. The substrate support of claim 22, wherein the ring, pads and body are comprised of a singular ceramic member.

24. The substrate support of claim 22 further comprising one or more electrodes disposed within the ceramic body.