METHOD FOR FABRICATING MULTI-LAYERED SUBSTRATES
First Claim
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1. A method for fabricating a substrate, said method comprising:
- providing a first substrate having a substantially planar surface, said first substrate being of a first substrate type;
implanting particles into said substantially planar surface to a selected depth to define a volume of implanted material within said first substrate, said volume of implanted material having an amorphous characteristic from said selected depth to said substantially planar surface;
contacting a face of a second substrate against said substantially planar implanted surface, said contacting bonding said face to said substantially planar surface;
wherein said implanted material provides a compliant layer for embedding a surface non-uniformity into said compliant layer to facilitate bonding of said face to said substantially planar surface.
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Abstract
A method for forming a multi-layered substrate. The method includes forming a compliant layer on a face of a first substrate (10). Joining the compliant layer against a face of a second substrate (20), where the compliant layer forms around a surface non-uniformity on the second substrate face.
20 Citations
23 Claims
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1. A method for fabricating a substrate, said method comprising:
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providing a first substrate having a substantially planar surface, said first substrate being of a first substrate type;
implanting particles into said substantially planar surface to a selected depth to define a volume of implanted material within said first substrate, said volume of implanted material having an amorphous characteristic from said selected depth to said substantially planar surface;
contacting a face of a second substrate against said substantially planar implanted surface, said contacting bonding said face to said substantially planar surface;
wherein said implanted material provides a compliant layer for embedding a surface non-uniformity into said compliant layer to facilitate bonding of said face to said substantially planar surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 21, 22)
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19. A method for forming a silicon-on-silicon substrate, said method comprising:
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providing a first silicon substrate having a substantially planar surface;
implanting a plurality of particles into said substantially planar surface to a selected depth to define a volume within said substrate, said volume comprising an amorphous silicon material that has a compliant characteristic;
attaching a face of a second silicon substrate against said substantially planar surface to form a multi-layered substrate; and
annealing said multi-layered substrate at a temperature of less than about 200 degrees Celsius to substantially bond said second silicon substrate to said first silicon substrate.
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23. A partially completed semiconductor substrate, said substrate comprising:
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a substantially planar surface;
a volume of substrate material comprising particles implanted through said substantially planar surface to a selected depth, said volume of substrate material having a compliant characteristic from an amorphous material from said selected depth to said substantially planar surface;
wherein said implanted substantially planar surface comprising an activated surface to be bonded to a second surface;
wherein said compliant characteristic allows a surface imperfection to be embedded into said volume of substrate material when said second surface bonds to said substantially planar surface.
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Specification