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Infrared monitor and control for vapor hydrogen peroxide processing techniques

  • US 20030021724A1
  • Filed: 07/09/2002
  • Published: 01/30/2003
  • Est. Priority Date: 07/10/2001
  • Status: Active Grant
First Claim
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1. A peroxy vapor system including:

  • a light source which supplies light with at least a component in the mid-infrared range;

    a detector which individually detects mid-infrared range light in (a) a first narrow spectrum absorbed by peroxy vapor, (b) a second narrow spectrum absorbed by a carrier vapor, and (c) a third spectrum absorbed by neither the peroxy vapor nor the carrier vapor;

    a processor for determining at least a concentration of the peroxy vapor from the detected light in the mid-infrared range.

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