Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment

• US 20030027369A1
• Filed: 06/27/2002
• Published: 02/06/2003
• Est. Priority Date: 07/03/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Granted Patent: US 7,129,102 B2
• Time in Patent Office: Days
• US Class Current: 438/21
• CPC Class Codes: H01L 2221/68368 used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
• CPC Class Codes: H05B 33/22 characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/846 comprising getter material or desiccants
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/179 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/80 using temporary substrates
• CPC Class Codes: H10K 77/111 Flexible substrates
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention uses plastic film in vacuum sealing an OLED. Inorganic insulating films which can prevent oxygen or water from being penetrated therein and an organic insulating film which has a smaller internal stress than that of the inorganic insulating films are laminated on an inside of the plastic film. By sandwiching the organic insulating film between the inorganic insulating films, a stress can be relaxed. Further, by laminating a plurality of inorganic insulating films, even if one of the inorganic insulating films has a crack, the other inorganic insulating films can effectively prevent oxygen or water from being penetrated into an organic light emitting layer. Further, the stress of the entire sealing film can be relaxed and cracking due to the stress takes place less often.

Claims

1. A light-emitting device comprising:

a first plastic substrate;

a second plastic substrate;

a light emitting element formed between the first plastic substrate and the second plastic substrate;

a plurality of insulating films covering the first plastic substrate and the second plastic substrate;

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

3. A light-emitting device according to any one of claims 1 and 2, wherein the second plastic substrate is flexible.

4. A light-emitting device according to any one of claims 1 and 2, wherein the second plastic substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

7. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein at least one of the first insulating film and the third insulating film comprises one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

8. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein the second insulating film comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

9. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein the first plastic substrate is flexible.

10. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein the plastic film is flexible.

12. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein the plastic film comprises one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

13. A light-emitting device according to any one of claims 1, 2, 5, and 6, wherein the light-emitting device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

2. A light-emitting device comprising:

a first plastic substrate;

a second plastic substrate;

a light emitting element formed between the first plastic substrate and the second plastic substrate;

a first insulating film covering the first plastic substrate and the second plastic substrate;

a second insulating film covering the first insulating film;

a third insulating film covering the second insulating film; and

a plastic film covering the third insulating film,

wherein an internal stress of the second insulating film is smaller than that of the first insulating film and third insulating film.

5. A light-emitting device comprising:

a first plastic substrate;

a light emitting element formed over the first plastic substrate;

a plurality of insulating films covering the first plastic substrate and the light emitting element; and

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

11. A light-emitting device according to any one of claims 5 and 6, wherein the first plastic substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

6. A light-emitting device comprising:

a first plastic substrate;

a light emitting element formed over the first plastic substrate;

a first insulating film covering the first plastic substrate and the light emitting element;

a second insulating film covering the first insulating film;

a third insulating film covering the second insulating film; and

a plastic film covering the third insulating film,

wherein an internal stress of the second insulating film is smaller than that of the first insulating film and third insulating film.

14. A method of manufacturing a light-emitting device, comprising:

putting a first plastic substrate and a second plastic substrate that sandwich a light emitting element into a bag-like plastic film, an inside of the plastic film covered with layers of a plurality of insulating films;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

16. A method of manufacturing a light-emitting device according to any one of claims 14 and 15, wherein the plastic substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

17. A method of manufacturing a light-emitting device according to any one of claims 14 and 15, wherein the plastic film comprises one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

45. A method of manufacturing a light-emitting device according to any one of claims 14, 15, 18 to 20, and 31 to 33, wherein the light-emitting device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

15. A method of manufacturing a light-emitting device, comprising:

putting a plastic substrate having a light emitting element formed over the plastic substrate into a bag-like plastic film, an inside of the plastic film covered with layers of the plurality of insulating films;

exhausting the bag-like plastic film; and

closing the mouth of the bag-like plastic film,

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

18. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element over the first insulating film;

forming a second insulating film so as to cover the light emitting element;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

providing a bag-like plastic film, in which a plurality of insulating films are laminated on an inside of the bag-like plastic film such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the second substrate and the third substrate comprise plastic, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

21. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein the first adhesive layer is removed by spraying a fluid on the first adhesive layer.

22. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein the first adhesive layer contains silicon.

23. A method of manufacturing a light-emitting device according to claim 22, wherein halogen fluoride is used to remove the first adhesive layer.

24. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein the first adhesive layer contains SOG.

25. A method of manufacturing a light-emitting device according to claim 24, wherein hydrogen fluoride is used to remove the first adhesive layer.

26. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein a laser light is used to remove the first adhesive layer.

27. A method of manufacturing a light-emitting device according to claim 26, wherein the laser light is emitted from one selected from the group consisting of an excimer laser, YAG laser, and YVO₄ laser of a pulse oscillation type or a continuous wave type.

28. A method of manufacturing a light-emitting device according to claim 26, wherein the laser light is one selected from the group consisting of a fundamental wave, a second harmonic wave, and a third harmonic wave of YAG laser.

29. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein at least one of the second substrate and the third substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

30. A method of manufacturing a light-emitting device according to any one of claims 18 to 20, wherein the plastic film comprises one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

19. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element, a thin film transistor, and a wiring line over the first insulating film;

forming a second insulating film so as to cover the light emitting element, the thin film transistor, and the wiring line;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

removing the second substrate, the second insulating film, and a part of the second adhesive layer to expose a part of the wiring line;

electrically connecting the exposed part of the wiring line with a terminal of an FPC using an anisotropic conductive resin;

providing a bag-like plastic film, in which a plurality of insulating films are laminated on an inside of the bag-like plastic film such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the second substrate and the third substrate comprise plastic, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

20. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element, a thin film transistor, and a wiring line over the first insulating film;

forming a second insulating film so as to cover the light emitting element, the thin film transistor, and the wiring line;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

removing the third substrate, the first insulating film, and a part of the third adhesive layer to expose a part of the wiring line;

electrically connecting the exposed part of the wiring line with a terminal of an FPC using an anisotropic conductive resin;

providing a bag-like plastic film, in which a plurality of insulating films are laminated on an inside of the bag-like plastic such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the second substrate and the third substrate comprise plastic, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

31. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element over the first insulating film;

forming a second insulating film so as to cover the light emitting element;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

removing the second adhesive layer to remove the second substrate and expose the second insulating film;

providing a bag-like plastic film, in which a plurality of insulating films are laminated on an inside of the bag-like plastic film such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the third substrate comprises plastic, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

34. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein at least one of the first adhesive layer and the second adhesive layer is removed by spraying a fluid thereto.

35. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein the first adhesive layer contains silicon.

36. A method of manufacturing a light-emitting device according to claim 35, wherein halogen fluoride is used to remove the first adhesive layer.

37. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein the first adhesive layer contains SOG.

38. A method of manufacturing a light-emitting device according to claim 37, wherein hydrogen fluoride is used to remove the first adhesive layer.

39. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein at least one of the first adhesive layer and the second adhesive layer is removed by irradiating a laser light.

40. A method of manufacturing a light-emitting device according to claim 39, wherein the laser light is emitted from one selected from the group consisting of an excimer laser, YAG laser, and YVO₄ laser of a pulse oscillation type or a continuous wave type.

41. A method of manufacturing a light-emitting device according to claim 39, wherein the laser light is one selected form the group consisting of a fundamental wave, a second harmonic wave, and a third harmonic wave of YAG laser.

42. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein the third substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

43. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein the plastic film comprises one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

44. A method of manufacturing a light-emitting device according to any one of claims 31 to 33, wherein at least one of the plurality of insulating films comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, benzocyclobutene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

32. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element, a thin film transistor, and a wiring line over the first insulating film;

forming a second insulating film so as to cover the light emitting element, the thin film transistor, and the wiring line;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

removing the second adhesive layer to remove the second substrate and expose the second insulating film;

removing a part of the second insulating film to expose a part of the wiring line;

electrically connecting the exposed part of the wiring line with a terminal of an FPC using an anisotropic conductive resin;

providing a bag-like flexible plastic film, in which a plurality of insulating films are laminated on an inside such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the third substrate comprises plastic, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.

33. A method of manufacturing a light-emitting device, comprising:

forming a first adhesive layer on a first substrate;

forming a first insulating film on the first adhesive layer;

forming a light emitting element, a thin film transistor, and a wiring line over the first insulating film;

forming a second insulating film so as to cover the light emitting element, the thin film transistor, and the wiring line;

bonding a second substrate to the second insulating film using a second adhesive layer;

removing the first adhesive layer to remove the first substrate and expose the first insulating film;

bonding a third substrate to the first insulating film using a third adhesive layer;

removing the second adhesive layer to remove the second substrate and expose the second insulating film;

removing the third substrate, the first insulating film, and a part of the third adhesive layer to expose a part of the wiring line;

electrically connecting the exposed part of the wiring line with a terminal of an FPC using an anisotropic conductive resin;

providing a bag-like flexible plastic film, in which a plurality of insulating films are laminated on an inside of the bag-like plastic film such that the laminated plurality of insulating films cover the second substrate and the third substrate;

exhausting the bag-like plastic film; and

closing a mouth of the bag-like plastic film,

wherein the third substrate comprises, and

wherein an internal stress of at least one of the plurality of insulating films is smaller than that of the other insulating films.