Micromirror device using interdigitated cantilevers and applications thereof
First Claim
1. A micromirror device comprising:
- (a) a substrate;
(b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other;
(c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated;
(d) mirror support posts coupled to upper portions of the other ends of the cantilevers;
(e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and
(f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers.
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Accused Products
Abstract
Disclosed are a micromirror device made in a simple structure using interdigitated cantilevers and having two stable rotational states, and applications thereof. The micromirror device comprises: (a) a substrate; (b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other; (c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated; (d) mirror support posts coupled to upper portions of the other ends of the cantilevers; (e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and (f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers. The micromirror device can drive the mirror in two directions and adjust a rotational angle of the mirror using the electrostatic force due to a potential difference between the electrodes and the mirror for reflecting incident light, and the elastic restoring force of the cantilevers.
13 Citations
10 Claims
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1. A micromirror device comprising:
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(a) a substrate;
(b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other;
(c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated;
(d) mirror support posts coupled to upper portions of the other ends of the cantilevers;
(e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and
(f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An 1×
- 2 optical switching element comprising;
(a) light input means;
(b) a micromirror device for reflecting light outputted from the light input means in different two directions, the micromirror device comprising;
(b-1) a substrate;
(b-2) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other;
(b-3) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated;
(b-4) mirror support posts coupled to upper portions of the other ends of the cantilevers;
(b-5) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and
(b-6) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers; and
(c) two light output means for outputting the light reflected by the micromirror device. - View Dependent Claims (8)
- 2 optical switching element comprising;
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9. An n×
- 2n optical switching element comprising;
(a) n-number of light input means;
(b) n-number of arrayed micromirror devices, each micromirror device reflecting light outputted from each of the light input means in different two directions and comprising;
(b-1) a substrate;
(b-2) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other;
(b-3) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated;
(b-4) mirror support posts coupled to upper portions of the other ends of the cantilevers;
(b-5) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and
(b-6) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers; and
(c) 2n-number of light output means for outputting the light reflected by each of the micromirror devices.
- 2n optical switching element comprising;
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10. An image display device comprising:
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(a) a light source;
(b) two-dimensionally arrayed micromirror devices, each micromirror device comprising;
(b-1) a substrate;
(b-2) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other;
(b-3) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated;
(b-4) mirror support posts coupled to upper portions of the other ends of the cantilevers;
(b-5) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and
(b-6) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers;
(c) a driving circuit for applying an electrical signal to electrodes of the arrayed micromirror devices such that light incident upon the arrayed micromirror devices is selectively reflected along a first path and a second path;
(d) a color filter for revealing colors corresponding to pixels when the light reflected along the first path passes through the color filter;
(e) a screen for displaying an image by using the light that passes through the color filter; and
(f) a light absorbing plate for absorbing the light reflected along the second path.
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Specification