Resonant frequency tracking system and method for use in a radio frequency (RF) power supply

  • US 20030071034A1
  • Filed: 11/25/2002
  • Published: 04/17/2003
  • Est. Priority Date: 07/10/1998
  • Status: Active Grant
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First Claim
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1. A radio frequency (RF) power supply for providing RF power to a load placed within an inductor coil of a tank circuit coupled to an output of the RP power supply, comprising:

  • a direct current (DC) voltage source that provides a DC voltage within a first predetermined range;

    an amplifier, coupled to said DC voltage source, to provide an alternating voltage to the tank circuit;

    a frequency controller, coupled to said amplifier, to control a frequency of said alternating voltage provided by said amplifier; and

    a sensor, coupled to the tank circuit and to said frequency controller, comprising a current sensor that measures current flowing into the tank circuit and a voltage sensor that measures a voltage across the tank circuit.

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