Chip-mounting device and method of alignment

• US 20030106210A1
• Filed: 11/12/2002
• Published: 06/12/2003
• Est. Priority Date: 05/22/2000
• Status: Abandoned Application

• Current Assignee: Toray Engineering Company Limited (Toray Industries Incorporated)
• Original Assignee: Toray Engineering Company Limited (Toray Industries Incorporated)
• Inventors: Yamauchi, Akira, Kawakami, Mikio, Arai, Yoshiyuki
• Application Number:
  US10/275,908
• Publication Number:
  US 20030106210A1
• Time in Patent Office: Days
• US Class Current: 29/833
• CPC Class Codes: H01L 24/75 Apparatus for connecting with bump connectors or layer connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/14 Integrated circuits
• CPC Class Codes: H05K 13/0812 the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
• CPC Class Codes: Y10T 29/49131 by utilizing optical sighting device
• CPC Class Codes: Y10T 29/49133 with component orienting
• CPC Class Codes: Y10T 29/53174 Means to fasten electrical component to wiring board, base, or substrate

Abstract

A chip-mounting device comprises a chip-holding tool and a substrate-holding stage. At least one of the chip-holding tool and the substrate-holding stage is placed on a coarse adjustment table for coarse positioning of a chip or a substrate. Brake means for fixing the positioned coarse adjustment table is provided on the coarse adjustment table. Fine adjustment means for fine positioning of a chip or a substrate is provided on the coarse adjustment table. The chip-mounting device allows alignment with submicorn accuracy to be performed quickly, shortening tact time in chip mounting remarkably.

Claims

1. A chip-mounting device having a chip-holding tool for holding a chip and a substrate-holding stage for holding a substrate on which said chip is to be mounted, the chip-mounting device comprising:

a coarse adjustment table for coarsely adjusting the position of a chip or a substrate, at least one of said chip-holding tool and said substrate-holding stage being placed on said coarse adjustment table;

brake means provided on said coarse adjustment table for fixing the position of said coarse adjustment table after coarse adjustment; and

fine adjustment means provided on said coarse adjustment table for finely adjusting the position of a chip or a substrate.

2. The chip-mounting device according to claim 1, wherein said fine adjustment means includes a piezo element.

3. The chip-mounting device according to claim 1, wherein a linear scale is provided as means for detecting the adjusted position of a chip or a substrate, said linear scale is fixed at a predetermined reference position on its central portion in the longitudinal direction, and the expansion of said linear scale is allowed in both directions from said reference position.

4. An alignment method in a chip-mounting device for recognizing an alignment mark provided on a chip held on a chip-holding tool and an alignment mark provided on a substrate held on a substrate-holding stage disposed below said chip-holding tool, by recognition means, and controlling the parallel movement and the rotation of at least one of said chip-holding tool and said substrate-holding stage to control a positional shift between both said alignment marks within a target accuracy by correcting the positional shift, comprising the steps of:

coarsely adjusting the position of a chip or a substrate by driving at least one of said chip-holding tool and said substrate-holding stage by a coarse adjustment table;

fixing the coarsely adjusted position of said coarse adjustment table; and

finely adjusting the position of a chip or a substrate by driving at least one of said chip-holding tool and said substrate-holding stage by fine adjustment means.

5. The alignment method in a chip-mounting device according to claim 4, wherein a camera is used as said recognition means for recognizing said alignment marks.